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Illumination optical assembly, exposure apparatus, and device manufacturing method

  • US 9,513,560 B2
  • Filed: 04/24/2014
  • Issued: 12/06/2016
  • Est. Priority Date: 10/24/2011
  • Status: Active Grant
First Claim
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1. An illumination optical system which illuminates an illumination target surface with light, the illumination optical system comprising:

  • a spatial light modulator having a plurality of optical elements arrayed on a predetermined surface and individually controlled, the spatial light modulator being configured to variably form a light intensity distribution on an illumination pupil of the illumination optical system;

    a divergence angle providing member arranged in a conjugate space in which a surface optically conjugate with the predetermined surface is disposed, the divergence angle providing member being configured to provide a divergence angle to an incident beam and emit the beam; and

    a polarizing member arranged in a predetermined space in which the predetermined surface is disposed or in the conjugate space, the polarizing member being configured to change a polarization state of a partial beam which is a part of the light.

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