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Sensor with moving sensitive element having mixed vibrating and pendular operation, and methods for controlling such a sensor

  • US 9,519,004 B2
  • Filed: 10/21/2014
  • Issued: 12/13/2016
  • Est. Priority Date: 11/20/2013
  • Status: Active Grant
First Claim
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1. A sensor comprising:

  • a stand;

    a first body connected to the stand to be movable along a sensing axis by first suspension means defining a suspension plane;

    two resonators that are arranged symmetrically about the first body along the sensing axis and each of which comprises a pair of second bodies each connected to the stand by second suspension means in order to be capable of vibrating along a vibration axis that is substantially perpendicular to the sensing axis, and that are connected to each other by third suspension means;

    transducer members connected to a control unit for detecting a position of the first body relative to the stand, for setting the second bodies into vibration along the vibration axis, and for detecting respective vibration frequencies of the second bodies; and

    surface electrostatic coupling means connecting each second body to the first body in such a manner that a movement of the first body relative to the stand along the sensing axis leads to an increase in electrostatic coupling for one of the pairs of second bodies and to a decrease in electrostatic coupling for the other pair of second bodies.

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