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Electronic device, electronic apparatus, and method of manufacturing electronic device

  • US 9,520,812 B2
  • Filed: 05/30/2013
  • Issued: 12/13/2016
  • Est. Priority Date: 05/31/2012
  • Status: Active Grant
First Claim
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1. An electronic device comprising:

  • a first base body having first and second surfaces, a first recess and a first through hole, the first recess being provided in the first surface, the first through hole being formed between the first and second surfaces, a first through electrode being provided in the first through hole;

    a second base body having third and fourth surfaces, a second recess and a second through hole, the second recess being provided in the third surface, the second through hole being formed between the third and fourth surfaces, a second through electrode being provided in the second through hole;

    a third base body held between the first base body and the second base body, the third base body having fifth and sixth surfaces and third and fourth recesses, the third recess being provided in the fifth surface, the fourth recess being provided in the sixth surface;

    a first cavity formed by the first and third recesses;

    a second cavity formed by the second and fourth recesses;

    a first functional element disposed in the first cavity surrounded by the first base body and the third base body, the first functional element being a gyro sensor configured to detect an angular velocity, the first functional element including;

    a vibration member;

    a driving electrode; and

    a detection electrode; and

    a second functional element disposed in the second cavity surrounded by the second base body and the third base body, the second functional element being an acceleration sensor configured to detect acceleration, the second functional element including;

    a movable member;

    a movable electrode;

    a fixed member; and

    a fixed electrode, whereinthe first through electrode is electrically connected to one of the driving electrode and the detection electrode, andthe second through electrode is electrically connected to one of the movable electrode and the fixed electrode.

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