Electronic device, electronic apparatus, and method of manufacturing electronic device

• US 9,520,812 B2
• Filed: 05/30/2013
• Issued: 12/13/2016
• Est. Priority Date: 05/31/2012
• Status: Active Grant

• Current Assignee: 138 East LCD Advancements Limited (Vector Capital Corporation)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Maeda, Yoshio
• Primary Examiner(s): Kenerly, Terrance
• Application Number:
  US13/905,316
• Publication Number:
  US 20130320803A1
• Time in Patent Office: 1,293 Days
• Field of Search: 310/300
• US Class Current: 1/1
• CPC Class Codes: B81B 7/0074 3D packaging, i.e. encapsulation containing one or several MEMS devices arranged in planes non-parallel to the mounting board
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 1/00293 maintaining a controlled atmosphere with processes not provided for in B81C1/00285
• CPC Class Codes: B81C 2201/019 Bonding or gluing multiple substrate layers
• CPC Class Codes: B81C 2203/051 Active alignment, e.g. using internal or external actuators, magnets, sensors, marks or marks detectors
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/1461 MEMS
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H05K 13/00 Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

An electronic device includes a first base body, a second base body, a third base body held between the first base body and the second base body, a first functional element disposed in a first cavity surrounded by the first base body and the third base body, and a second functional element disposed in a second cavity surrounded by the second base body and the third base body.

Claims

1. An electronic device comprising:

a first base body having first and second surfaces, a first recess and a first through hole, the first recess being provided in the first surface, the first through hole being formed between the first and second surfaces, a first through electrode being provided in the first through hole;

a second base body having third and fourth surfaces, a second recess and a second through hole, the second recess being provided in the third surface, the second through hole being formed between the third and fourth surfaces, a second through electrode being provided in the second through hole;

a third base body held between the first base body and the second base body, the third base body having fifth and sixth surfaces and third and fourth recesses, the third recess being provided in the fifth surface, the fourth recess being provided in the sixth surface;

a first cavity formed by the first and third recesses;

a second cavity formed by the second and fourth recesses;

a first functional element disposed in the first cavity surrounded by the first base body and the third base body, the first functional element being a gyro sensor configured to detect an angular velocity, the first functional element including;

a vibration member;

a driving electrode; and

a detection electrode; and

a second functional element disposed in the second cavity surrounded by the second base body and the third base body, the second functional element being an acceleration sensor configured to detect acceleration, the second functional element including;

a movable member;

a movable electrode;

a fixed member; and

a fixed electrode, wherein

the first through electrode is electrically connected to one of the driving electrode and the detection electrode, and

the second through electrode is electrically connected to one of the movable electrode and the fixed electrode.

2. The electronic device according to claim 1, wherein

the first base body and the second base body are each provided with an alignment mark.

3. An electronic apparatus comprising:

the electronic device according to claim 2.

4. The electronic device according to claim 1, wherein the third base body has an opening section adapted to communicate the first cavity and the second cavity with each other.

5. An electronic apparatus comprising:

the electronic device according to claim 4.

6. The electronic device according to claim 1, wherein

a material of the first and second base bodies is glass, and

a material of the third base body is one of silicon and glass.

7. An electronic apparatus comprising:

the electronic device according to claim 6.

8. The electronic device according to claim 1, further comprising:

a substrate, which includes an integrated circuit adapted to process signals of the first and second functional elements, and to which the first base body is mounted; and

a mold section adapted to mold the first, second, and third base bodies and the substrate.

9. An electronic apparatus comprising:

the electronic device according to claim 8.

10. An electronic apparatus comprising:

the electronic device according to claim 1.

11. A method of manufacturing an electronic device comprising:

a first preparation step of preparing a first structure by preparing a first base body and then forming a first functional element on the first base body, the first base body has;

first and second surfaces;

a first recess;

a first through hole; and

a first through electrode, wherein the first recess is provided in the first surface, the first through hole is formed between the first and second surfaces, the first through electrode is provided in the first through hole;

a second preparation step of preparing a second structure by preparing a second base body and then forming a second functional element on the second base body, the second base body has;

third and fourth surfaces;

a second recess;

a second through hole; and

a second throat electrode, wherein the second recess is provided in the third surface, the second through hole is formed between the third and fourth surfaces, the second through electrode is provided in the second through hole;

a third preparation step of preparing a third base body, the third base body has;

fifth and sixth surfaces; and

third and fourth recesses, wherein the third recess is provided in the fifth surface, the fourth recess is provided in the sixth recess; and

a stacking step of housing the first functional element in a first cavity, which is formed by the first and third recesses, surrounded by the first base body and the third base body, and housing the second functional element in a second cavity, which is formed by the second and fourth recesses, surrounded by the second base body and the third base body by stacking the first base body, the second base body, and the third base body on each other so that the third base body is held between the first base body and the second base body, wherein

the first functional element is a gyro sensor configured to detect an angular velocity, the gyro sensor including;

a vibration member;

a driving electrode; and

a detection electrode; and

the second functional element is an acceleration sensor configured to detect acceleration, the acceleration sensor including;

a movable member;

a movable electrode;

a fixed member; and

a fixed electrode, wherein

the first through electrode is electrically connected to one of the driving electrode and the detection electrode, and

the second through electrode is electrically connected to one of the movable electrode and the fixed electrode.

12. The method of manufacturing an electronic device according to claim 11, wherein

the stacking step includes

a step of bonding the first base body and the third base body to each other in a first pressure atmosphere to thereby form the first cavity of the first pressure atmosphere, and

a step of bonding the second base body and the third base body to each other in a second pressure atmosphere to thereby form the second cavity of the second pressure atmosphere, and

the first pressure atmosphere and the second atmosphere are different in pressure from each other.

13. The method of manufacturing an electronic device according to claim 11, wherein

the first preparation step further includes a step of forming at least one first alignment mark,

the second preparation step further includes a step of forming at least one second alignment mark,

the first alignment mark and the second alignment mark are simultaneously formed at the time of formation of the first functional element and the second functional element, respectively, and

the stacking step further includes a step of performing alignment by visually detecting the first alignment mark and the second alignment mark.

14. The method of manufacturing an electronic device according to claim 11, wherein

in the first preparation step, a first wafer having a plurality of the first structures in a first element region is prepared,

in the second preparation step, a second wafer having a plurality of the second structures in a second element region is prepared, and

in the third preparation step, a third wafer having a plurality of the third base bodies in a third element region is prepared,

the method further comprising:

a step of dicing the first wafer, the second wafer, and the third wafer stacked on each other into a plurality of electronic devices.

15. The method of manufacturing an electronic device according to claim 14, wherein

the first alignment mark is formed outside the first element region of the first wafer, and

the second alignment mark is formed outside the second element region of the second wafer.