Electronic device, electronic apparatus, and method of manufacturing electronic device
First Claim
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1. An electronic device comprising:
- a first base body having first and second surfaces, a first recess and a first through hole, the first recess being provided in the first surface, the first through hole being formed between the first and second surfaces, a first through electrode being provided in the first through hole;
a second base body having third and fourth surfaces, a second recess and a second through hole, the second recess being provided in the third surface, the second through hole being formed between the third and fourth surfaces, a second through electrode being provided in the second through hole;
a third base body held between the first base body and the second base body, the third base body having fifth and sixth surfaces and third and fourth recesses, the third recess being provided in the fifth surface, the fourth recess being provided in the sixth surface;
a first cavity formed by the first and third recesses;
a second cavity formed by the second and fourth recesses;
a first functional element disposed in the first cavity surrounded by the first base body and the third base body, the first functional element being a gyro sensor configured to detect an angular velocity, the first functional element including;
a vibration member;
a driving electrode; and
a detection electrode; and
a second functional element disposed in the second cavity surrounded by the second base body and the third base body, the second functional element being an acceleration sensor configured to detect acceleration, the second functional element including;
a movable member;
a movable electrode;
a fixed member; and
a fixed electrode, whereinthe first through electrode is electrically connected to one of the driving electrode and the detection electrode, andthe second through electrode is electrically connected to one of the movable electrode and the fixed electrode.
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Abstract
An electronic device includes a first base body, a second base body, a third base body held between the first base body and the second base body, a first functional element disposed in a first cavity surrounded by the first base body and the third base body, and a second functional element disposed in a second cavity surrounded by the second base body and the third base body.
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Citations
15 Claims
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1. An electronic device comprising:
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a first base body having first and second surfaces, a first recess and a first through hole, the first recess being provided in the first surface, the first through hole being formed between the first and second surfaces, a first through electrode being provided in the first through hole; a second base body having third and fourth surfaces, a second recess and a second through hole, the second recess being provided in the third surface, the second through hole being formed between the third and fourth surfaces, a second through electrode being provided in the second through hole; a third base body held between the first base body and the second base body, the third base body having fifth and sixth surfaces and third and fourth recesses, the third recess being provided in the fifth surface, the fourth recess being provided in the sixth surface; a first cavity formed by the first and third recesses; a second cavity formed by the second and fourth recesses; a first functional element disposed in the first cavity surrounded by the first base body and the third base body, the first functional element being a gyro sensor configured to detect an angular velocity, the first functional element including; a vibration member; a driving electrode; and a detection electrode; and a second functional element disposed in the second cavity surrounded by the second base body and the third base body, the second functional element being an acceleration sensor configured to detect acceleration, the second functional element including; a movable member; a movable electrode; a fixed member; and a fixed electrode, wherein the first through electrode is electrically connected to one of the driving electrode and the detection electrode, and the second through electrode is electrically connected to one of the movable electrode and the fixed electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing an electronic device comprising:
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a first preparation step of preparing a first structure by preparing a first base body and then forming a first functional element on the first base body, the first base body has; first and second surfaces; a first recess; a first through hole; and a first through electrode, wherein the first recess is provided in the first surface, the first through hole is formed between the first and second surfaces, the first through electrode is provided in the first through hole; a second preparation step of preparing a second structure by preparing a second base body and then forming a second functional element on the second base body, the second base body has; third and fourth surfaces; a second recess; a second through hole; and a second throat electrode, wherein the second recess is provided in the third surface, the second through hole is formed between the third and fourth surfaces, the second through electrode is provided in the second through hole; a third preparation step of preparing a third base body, the third base body has; fifth and sixth surfaces; and third and fourth recesses, wherein the third recess is provided in the fifth surface, the fourth recess is provided in the sixth recess; and a stacking step of housing the first functional element in a first cavity, which is formed by the first and third recesses, surrounded by the first base body and the third base body, and housing the second functional element in a second cavity, which is formed by the second and fourth recesses, surrounded by the second base body and the third base body by stacking the first base body, the second base body, and the third base body on each other so that the third base body is held between the first base body and the second base body, wherein the first functional element is a gyro sensor configured to detect an angular velocity, the gyro sensor including; a vibration member; a driving electrode; and a detection electrode; and the second functional element is an acceleration sensor configured to detect acceleration, the acceleration sensor including; a movable member; a movable electrode; a fixed member; and a fixed electrode, wherein the first through electrode is electrically connected to one of the driving electrode and the detection electrode, and the second through electrode is electrically connected to one of the movable electrode and the fixed electrode. - View Dependent Claims (12, 13, 14, 15)
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Specification