Acoustic resonator structure having an electrode with a cantilevered portion
First Claim
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1. An acoustic resonator, comprising:
- a first electrode;
a second electrode comprising a plurality of sides, at least one of the plurality of sides comprising a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height;
a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a gap exists between the cantilevered portion and the piezoelectric layer, wherein the piezoelectric layer extends over an edge of the first electrode; and
a bridge disposed adjacent to one of the sides of the second electrode.
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Abstract
An acoustic resonator comprises a first electrode and second electrode comprising a plurality of sides. At least one of the sides of the second electrode comprises a cantilevered portion. A piezoelectric layer is disposed between the first and second electrodes. A bridge disposed adjacent to one of the sides of the second electrode.
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Citations
29 Claims
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1. An acoustic resonator, comprising:
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a first electrode; a second electrode comprising a plurality of sides, at least one of the plurality of sides comprising a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height; a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a gap exists between the cantilevered portion and the piezoelectric layer, wherein the piezoelectric layer extends over an edge of the first electrode; and a bridge disposed adjacent to one of the sides of the second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An acoustic resonator, comprising:
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a first electrode; a second electrode comprising a plurality of sides, at least one of the plurality of sides comprising a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height; a piezoelectric layer disposed between the first and second electrodes; a reflective element disposed beneath the first electrode, the second electrode and the piezoelectric layer, a contacting overlap of the reflective element, the first electrode, the second electrode and the piezoelectric layer defining an active area of the acoustic resonator, wherein the first electrode substantially covers the reflective element, and the piezoelectric layer extends over an edge of the first electrode; and a bridge adjacent to a termination of the active area of the acoustic resonator, wherein the bridge overlaps a portion of the first electrode. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. An acoustic resonator, comprising:
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a first electrode; a second electrode comprising a plurality of sides, at least one of the plurality of sides comprising a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height; and a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a gap exists between the cantilevered portion and the piezoelectric layer, wherein the piezoelectric layer extends over an edge of the first electrode. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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Specification