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Acoustic resonator structure having an electrode with a cantilevered portion

  • US 9,520,856 B2
  • Filed: 01/27/2014
  • Issued: 12/13/2016
  • Est. Priority Date: 06/24/2009
  • Status: Active Grant
First Claim
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1. An acoustic resonator, comprising:

  • a first electrode;

    a second electrode comprising a plurality of sides, at least one of the plurality of sides comprising a cantilevered portion, wherein the second electrode comprises a first surface disposed substantially at a first height, and the cantilevered portion comprises a second surface disposed substantially at a second height, which is higher than the first height;

    a piezoelectric layer disposed between the first and second electrodes, the cantilevered portion extending above the piezoelectric layer, wherein a gap exists between the cantilevered portion and the piezoelectric layer, wherein the piezoelectric layer extends over an edge of the first electrode; and

    a bridge disposed adjacent to one of the sides of the second electrode.

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