Elastic wave device including a conductive shield electrode and manufacturing method thereof
First Claim
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1. An elastic wave device comprising:
- a piezoelectric substrate;
a first electrode structure provided on the piezoelectric substrate, and defining a first elastic wave element portion;
a second electrode structure provided on the piezoelectric substrate, and defining a second elastic wave element portion;
a support frame provided on the piezoelectric substrate to surround a portion including the first elastic wave element portion and the second elastic wave element portion; and
a cover layer provided on the support frame, and defining first and second hollow portions faced by the first and second elastic wave element portions;
whereinthe support frame includes a dividing wall portion that divides the first elastic wave element portion and the second elastic wave element portion, and a conductive shield electrode provided in a groove in the dividing wall portion.
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Abstract
In an elastic wave device, a first electrode structure and a second electrode structure are provided on a piezoelectric substrate. The first electrode structure and the second electrode structure define first and second elastic wave element portions, respectively. A support frame on the piezoelectric substrate surrounds the first elastic wave element portion and the second elastic wave element portion. The support frame includes a dividing wall portion that divides the first elastic wave element portion and the second elastic wave element portion. A conductive shield electrode is provided in a groove provided in the dividing wall portion.
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19 Claims
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1. An elastic wave device comprising:
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a piezoelectric substrate; a first electrode structure provided on the piezoelectric substrate, and defining a first elastic wave element portion; a second electrode structure provided on the piezoelectric substrate, and defining a second elastic wave element portion; a support frame provided on the piezoelectric substrate to surround a portion including the first elastic wave element portion and the second elastic wave element portion; and a cover layer provided on the support frame, and defining first and second hollow portions faced by the first and second elastic wave element portions;
whereinthe support frame includes a dividing wall portion that divides the first elastic wave element portion and the second elastic wave element portion, and a conductive shield electrode provided in a groove in the dividing wall portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification