Acceleration sensor and angular velocity sensor
First Claim
Patent Images
1. An acceleration sensor, comprising:
- a mass body part comprising a first mass body and a second mass body;
a frame supporting the first mass body and the second mass body;
first flexible parts each connecting the first mass body and the second mass body to the frame; and
second flexible parts each connecting the first mass body and the second mass body to the frame,wherein the second flexible parts are connected to the first mass body and the second mass body so as to be spaced apart from the centers of gravity of the first mass body and the second mass body,wherein the first flexible parts have a width W1 in a Y-axis direction larger than a thickness T1 in the Z-axis direction, andwherein the second flexible parts have a width W2 in a Z-axis direction larger than a thickness T2 in the X-axis direction.
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Abstract
Disclosed herein is an acceleration sensor, including: a mass body part including a first mass body and a second mass body; a frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the frame; and second flexible parts each connecting the first mass body and the second mass body to the frame, wherein the first mass body and the second mass body are each connected to the frame so as to be eccentric by the second flexible part.
34 Citations
40 Claims
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1. An acceleration sensor, comprising:
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a mass body part comprising a first mass body and a second mass body; a frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the frame; and second flexible parts each connecting the first mass body and the second mass body to the frame, wherein the second flexible parts are connected to the first mass body and the second mass body so as to be spaced apart from the centers of gravity of the first mass body and the second mass body, wherein the first flexible parts have a width W1 in a Y-axis direction larger than a thickness T1 in the Z-axis direction, and wherein the second flexible parts have a width W2 in a Z-axis direction larger than a thickness T2 in the X-axis direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An angular velocity sensor, comprising:
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a mass body part comprising a first mass body and a second mass body; an internal frame supporting the first mass body and the second mass body; first flexible parts each connecting the first mass body and the second mass body to the internal frame; second flexible parts each connecting the first mass body and the second mass body to the internal frame, an external frame supporting the internal frame; a third flexible part connecting the internal frame and the external frame; and
a fourth flexible part connecting the internal frame and the external frame,wherein the second flexible parts are connected to the first mass body and the second mass body so as to be spaced apart from the centers of gravity of the first mass body and the second mass body, wherein the first flexible parts have a width W1 in a Y-axis direction larger than a thickness T1 in the Z-axis direction, and wherein the second flexible parts have a width W2 in a Z-axis direction larger than a thickness T2 in the X axis direction. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification