Sapphire substrate having elongated projection and semiconductor light emitting device utilizing the same

• US 9,525,103 B2
• Filed: 06/09/2015
• Issued: 12/20/2016
• Est. Priority Date: 08/06/2010
• Status: Active Grant

• Current Assignee: Nichia Corporation
• Original Assignee: Nichia Corporation
• Inventors: Narita, Junya, Okada, Takuya, Wakai, Yohei, Inoue, Yoshiki, Sako, Naoya, Kadan, Katsuyoshi
• Primary Examiner(s): Bradford, Peter
• Application Number:
  US14/734,961
• Publication Number:
  US 20150270443A1
• Time in Patent Office: 560 Days
• US Class Current: 1/1
• CPC Class Codes: H01L 21/0242 Crystalline insulating materials
• CPC Class Codes: H01L 21/0243 Surface structure
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/10 with a light reflecting structure, e.g. semiconductor Bragg reflector
• CPC Class Codes: H01L 33/20 with a particular shape, e.g. curved or truncated substrate
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: Y10T 428/24 Structurally defined web or sheet [e.g., overall dimension, etc.]
• CPC Class Codes: Y10T 428/24479 including variation in thickness

Abstract

The sapphire substrate has a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device and comprising a plurality of projections of the principal surface, wherein an outer periphery of a bottom surface of each of the projections has at least one depression. This depression is in the horizontal direction. The plurality of projections are arranged so that a straight line passes through the inside of at least any one of projections when the straight line is drawn at any position in any direction in a plane including the bottom surfaces of the plurality of projections.

Claims

1. A sapphire substrate having a principal surface for growing a nitride semiconductor to form a nitride semiconductor light emitting device, the sapphire substrate comprising:

a plurality of elongated projections on the principal surface, the elongated projections being separated from one another with gaps therebetween,

wherein each of the elongated projections is elongated in exactly one direction,

wherein each of the elongated projections extends in a direction that is within a range of ±

10 degrees of a direction that is rotated clockwise or counter clockwise by 30 degrees from a crystal axis “

a”

of the sapphire substrate, and

wherein a length of each of the elongated projections in the direction that is within a range of ±

10 degrees of a direction that is rotated clockwise or counter clockwise by 30 degrees from a crystal axis “

a”

of the sapphire substrate is greater than a length of each of the elongated projections in any other direction.

2. The sapphire substrate according to claim 1,

wherein the plurality of elongated projections are arranged so that any straight line that is drawn at any position in any direction in a plane including bottom peripheries of the plurality of elongated projections passes through the bottom periphery of at least one of the elongated projections.

3. The sapphire substrate according to claim 1, wherein each of the elongated projections has a top surface that has a periphery with a shape substantially similar to a shape of a periphery of a bottom of the elongated projection.

4. The sapphire substrate according to claim 1, wherein the plurality of elongated projections are divided into a plurality of groups of three elongated projections extending in three directions from a center of the group, the elongated projections within each group being separated from each other at a center of the group.

5. A nitride semiconductor light emitting device formed by growing a nitride semiconductor layer on the principal surface of the sapphire substrate according to claim 1.

6. The sapphire substrate according to claim 1, wherein each of the elongated projections has a petal shape.

7. The sapphire substrate according to claim 1, wherein at least one end of each of the elongated projections has a vertex.