Power-generating device with vibration plate that applies compressive stress to the piezoelectric layer when the vibration plate does not vibrate
First Claim
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1. A power-generating device comprising:
- a piezoelectric power-generating transducer including;
a single metal plate made of stainless steel and having a free end, a fixed end and a first main surface,a first lower electrode disposed on the first main surface of the metal plate and having a surface in parallel with the first main surface,a first piezoelectric layer made of piezoelectric material and disposed on the first lower electrode, anda first upper electrode disposed on the first piezoelectric layer to face the first lower electrode across the first piezoelectric layer;
a fixing member supporting the fixed end of the metal plate;
a first output terminal connected to the first lower electrode; and
a second output terminal connected to the first upper electrode,wherein the power-generating transducer is configured to vibrate in a direction perpendicular to the first main surface,wherein the metal plate applies first compressive stress to the first piezoelectric layer when the power-generating transducer does not vibrate,wherein a direction of the first compressive stress is in parallel with the surface of the lower electrode,wherein an end portion of the first main surface of the metal plate at the free end of the metal plate is exposed from the first lower electrode,wherein the first piezoelectric layer has a portion exposed from the first upper electrode, andwherein the piezoelectric power-generating transducer further includes a first coating covering the exposed portion of the first piezoelectric layer.
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Abstract
A power-generating device includes a vibration plate, a lower electrode on the vibration plate, a piezoelectric layer made of piezoelectric material on the lower electrode, and an upper electrode on the piezoelectric layer, a fixing member for supporting a fixed end of the vibration plate. The vibration plate applies compressive stress to the piezoelectric layer when the vibration plate does not vibrate. The power generating device is excellent in long-term reliability.
24 Citations
20 Claims
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1. A power-generating device comprising:
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a piezoelectric power-generating transducer including; a single metal plate made of stainless steel and having a free end, a fixed end and a first main surface, a first lower electrode disposed on the first main surface of the metal plate and having a surface in parallel with the first main surface, a first piezoelectric layer made of piezoelectric material and disposed on the first lower electrode, and a first upper electrode disposed on the first piezoelectric layer to face the first lower electrode across the first piezoelectric layer; a fixing member supporting the fixed end of the metal plate; a first output terminal connected to the first lower electrode; and a second output terminal connected to the first upper electrode, wherein the power-generating transducer is configured to vibrate in a direction perpendicular to the first main surface, wherein the metal plate applies first compressive stress to the first piezoelectric layer when the power-generating transducer does not vibrate, wherein a direction of the first compressive stress is in parallel with the surface of the lower electrode, wherein an end portion of the first main surface of the metal plate at the free end of the metal plate is exposed from the first lower electrode, wherein the first piezoelectric layer has a portion exposed from the first upper electrode, and wherein the piezoelectric power-generating transducer further includes a first coating covering the exposed portion of the first piezoelectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A power-generating device comprising:
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a piezoelectric power-generating transducer including; a single metal plate made of stainless steel and having a free end, a fixed end and a first main surface, a first lower electrode disposed on the first main surface of the metal plate and having a surface in parallel with the first main surface, a first piezoelectric layer made of piezoelectric material and disposed on the first lower electrode, and a first upper electrode disposed on the first piezoelectric layer to face the first lower electrode across the first piezoelectric layer; a fixing member supporting the fixed end of the metal plate; a first output terminal connected to the first lower electrode; and a second output terminal connected to the first upper electrode, wherein the power-generating transducer is configured to vibrate in a direction perpendicular to the first main surface, wherein the metal plate applies first compressive stress to the first piezoelectric layer when the power-generating transducer does not vibrate, wherein a direction of the first compressive stress is in parallel with the surface of the lower electrode, and wherein the upper electrode has an exposed surface opposite to a lower surface in contact with the first piezoelectric layer.
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19. A power-generating device comprising:
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a piezoelectric power-generating transducer including; a vibration plate having a free end, a fixed end and a main surface, the vibration plate being configured to vibrate in a direction perpendicular to the main surface, a lower electrode disposed on the main surface of the vibration plate, a piezoelectric layer made of piezoelectric material and disposed on the lower electrode, and an upper electrode disposed on the piezoelectric layer to face the lower electrode across the piezoelectric layer; a fixing member supporting the fixed end of the vibration plate; an output terminal connected to the lower electrode; and a second output terminal connected to the upper electrode, wherein the vibration plate applies compressive stress to the piezoelectric layer when the vibration plate does not vibrate, and wherein the piezoelectric layer has an exposed portion at a part of an upper surface and a side surface of the piezoelectric layer exposed from the upper electrode. - View Dependent Claims (20)
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Specification