Apparatus and method of using impedance resonance sensor for thickness measurement

• US 9,528,814 B2
• Filed: 05/16/2012
• Issued: 12/27/2016
• Est. Priority Date: 05/19/2011
• Status: Active Grant

• Current Assignee: Neovision LLC (Medtronic Plc)
• Original Assignee: Neovision LLC (Medtronic Plc)
• Inventors: Nikolenko, Yury, Fauss, Matthew
• Primary Examiner(s): HOQUE, FARHANA AKHTER
• Application Number:
  US13/473,092
• Publication Number:
  US 20120293188A1
• Time in Patent Office: 1,686 Days
• Field of Search: 324/232, 324/655, 324/724
• US Class Current: 1/1
• CPC Class Codes: B24B 37/005 Control means for lapping machines or devices
• CPC Class Codes: G01B 7/06 for measuring thickness measuring during the manufacture of coatings C23C14/54
• CPC Class Codes: G01B 7/08 using capacitive means
• CPC Class Codes: G01B 7/10 using magnetic means, e.g. by measuring change of reluctance

Abstract

An apparatus for, and methods of use for, measuring film thickness on an underlying body are provided. The apparatus may include at least one Impedance Resonance (IR) sensor, which may include at least one sensing head. The at least one sensing head may include an inductor having at least one excitation coil and at least one sensing coil. The excitation coil may propagate energy to the sensing coil so that the sensing coil may generate a probing electromagnetic field. The apparatus may also include at least one power supply, at least one RF sweep generator electrically connected to the excitation coil; at least one data acquisition block electrically connected to the sensing coil; at least one calculation block; and at least one communication block. Methods of monitoring conductive, semiconductive or non-conductive film thickness, and various tools for Chemical Mechanical Polishing/Planarization (CMP), etching, deposition and stand-alone metrology are also provided.

Claims

1. An apparatus for measuring film thickness on an underlying body comprising at least one Impedance Resonance (IR) sensor comprising the following:

at least one sensing head which is an open core or coreless (air core) inductor comprising at least one excitation coil and at least one sensing coil, wherein;

(i) said excitation coil is intended to propagate an energy to the sensing coil, which is intended to generate a probing electromagnetic field;

(ii) said at least one sensing coil is designed in such a way that intrinsic inductance L, capacitance C, and resistance R parameters of said sensing coil are capable of providing resonance conditions within predetermined frequency range for measuring impedance of wafer (or substrate) part falling within the scope of the sensor'"'"'s sensitive area; and

(iii) said at least one sensing coil is not connected to any capacitance means located externally to said at least one sensing coil such that said at least one sensing coil is capable of measuring one or more properties of said wafer (or substrate) part;

at least one power supply;

at least one RF sweep generator electrically connected to said excitation coil;

at least one data acquisition block with a high impedance input, greater than 10 MΩ

electrically connected to both the excitation coil and the sensing coil of the sensor;

at least one calculation block; and

at least one communication block.

2. The apparatus of claim 1, wherein at least one of:

(i) a core of the at least one said sensor'"'"'s inductor is a ferrite pot half;

(ii) the apparatus further comprises at least two sensors and the at least two sensors are configured to different predetermined resonant frequency ranges; and

(iii) the at least one data acquisition block operates as a two-channel comparator and to increase the sensitivity of both of the IR sensor'"'"'s excitation and sensing coils, the excitation and sensing coils being electrically connected to the two-channel comparator, wherein a first signal from the excitation coil is electrical current and a second signal from sensing coil is voltage, and the calculation block uses a ratio between the first and second signals, or a phase shift, or both the ratio between the first and second signals and the phase shift.

3. A Chemical Mechanical Polishing/Planarization (CMP) tool comprising at least one apparatus of claim 2 that operates to control a removal of film from an underlying body.

4. The CMP tool of claim 3, further comprising a polishing platen, wherein the at least one IR sensor is embedded in the polishing platen of the CMP tool.

5. The CMP tool of claim 3, further comprising a wafer handler, wherein the at least one IR sensor is embedded in the wafer handler of the CMP tool.

6. A method of monitoring conductive, semiconductive or non-conductive film thickness during chemical mechanical polishing/planarization using the apparatus of any of claims 3-5, the method comprising:

positioning a wafer (or substrate) having a conductive, semiconductive or non-conductive film disposed thereon in contact with a polishing surface of a polishing pad;

creating relative motion between the wafer (substrate) and the polishing pad to polish the wafer (substrate);

providing the excitation coil of each said IR sensor with alternating current from the RF sweep generator, wherein a range of frequency sweeping includes a resonant frequency of the sensing coil electromagnetically coupled with a polished wafer (or substrate) part falling within the scope of the IR sensor'"'"'s sensitive area, the excitation coil, being electromagnetically coupled with the sensing coil, propagates an energy to the sensing coil and the sensing coil in turn emits a probing electromagnetic field, which penetrates the polished wafer (or substrate) part falling within the scope of the IR sensor'"'"'s sensitive area;

perceiving an influence on the probing electromagnetic field induced by the measured film by means of both the excitation coil and the sensing coil of the sensor; and

transferring information about the influence to the calculation block by means of the data acquisition block for data processing.

7. The method of claim 6, further comprising at least one of:

(i) using data acquired in the wafer'"'"'s (substrate'"'"'s) presence for in real time (in-situ) controlling of film removing during a CMP process, wherein a rate of film removal is adjusted by changing the pressure of the wafer carrier against a different wafer'"'"'s (or substrate'"'"'s) zone to level film thickness;

(ii) monitoring, in real time (in-situ), removal of a film during a CMP process to determine an “

end point”

of the CMP process, wherein said “

end point”

of the CMP process substantially corresponds or corresponds to a situation when a difference in the IR sensor'"'"'s readings between two alternate states is getting constant, the first state occurring when the wafer (substrate) is present in the sensitive area of the sensor, and the second state occurring when there is no wafer (or substrate) within the sensitive area of the sensor;

(iii) compensating a “

zero drift”

by using the sensor'"'"'s reading while the sensor periodically finds itself without a wafer in its sensing area; and

(iv) removing at least two films, wherein the at least one IR sensor is configured to control the removal of a first film of the at least two films and at least one other IR sensor is configured to control the removal of a second film of the at least two films.

8. The method of claim 7, wherein at least one of:

(i) a reading, or the IR sensor'"'"'s output used in data processing, of the at least one IR sensor is at least one of;

the sensor'"'"'s resonance frequency, the sensor'"'"'s resonance amplitude, the sensor'"'"'s phase shift measured at a fixed frequency chosen in a vicinity of the resonance frequency, and the sensor'"'"'s amplitude measured at a fixed frequency chosen in a vicinity of the resonance frequency;

(ii) the film thickness is being calculated during a wafer processing or one or more stand-alone measurements using previously prepared calibration data acquired by measuring one or more etalon wafers (or substrates) with known film thickness;

(iii) the wafer processing stops when the film has reached a desired film thickness; and

(iv) the results of the film thickness measurements of the conductive, semiconductive and non-conductive films deposited on the wafer or substrate operate to be used for one or more of the following;

determining the resistance and conductance of the film at a plurality of locations;

determining the sheet resistance at each of the plurality of locations;

determining the film thickness at the plurality of locations;

calculating average sheet resistance over the plurality of locations;

calculating average film thickness over the plurality of locations; and

calculating total film thickness deviation.

9. The method of claim 8, further comprising using two IR sensors of the at least one IR sensor, which are placed against opposite sides of the wafer, for excluding an influence of the underlying body'"'"'s one or more electromagnetic properties on one or more results of the film thickness measurement(s).

10. The method of claim 6, wherein at least one of:

(i) a reading, or the IR sensor'"'"'s output used in data processing, of the at least one IR sensor is at least one of;

the sensor'"'"'s resonance frequency, the sensor'"'"'s resonance amplitude, the sensor'"'"'s phase shift measured at a fixed frequency chosen in a vicinity of the resonance frequency, and the sensor'"'"'s amplitude measured at a fixed frequency chosen in a vicinity of the resonance frequency;

(ii) the film thickness is being calculated during a wafer processing or one or more stand-alone measurements using previously prepared calibration data acquired by measuring one or more etalon wafers (or substrates) with known film thickness;

(iii) the wafer processing stops when the film has reached a desired film thickness; and

(iv) the results of the film thickness measurements of the conductive, semiconductive and non-conductive films deposited on the wafer or substrate operate to be used for one or more of the following;

determining the resistance and conductance of the film at a plurality of locations;

determining the sheet resistance at each of the plurality of locations;

determining the film thickness at the plurality of locations;

calculating average sheet resistance over the plurality of locations;

calculating average film thickness over the plurality of locations; and

calculating total film thickness deviation.

11. The method of claim 10, further comprising using two IR sensors of the at least one IR sensor, which are placed against opposite sides of the wafer, for excluding an influence of the underlying body'"'"'s one or more electromagnetic properties on one or more results of the film thickness measurement(s).

12. An etching tool comprising at least one apparatus of claim 1 that operates to perform one or more etching processes to control a removal of film from an underlying body.

13. A deposition tool to perform one or more deposition processes to control a deposition of film onto an underlying body, the one or more deposition processes comprising at least one of:

evaporation, sputtering, physical vapor deposition (“

PVD”

), chemical vapor deposition (“

CVD”

), electro-chemical deposition (“

ECD”

), plasma enhanced chemical vapor deposition (“

PECVD”

) and atomic layer deposition (“

ALD”

), the deposition tool comprising at least one apparatus of claim 1.

14. A stand-alone metrology tool comprising at least one apparatus of claim 1.

15. The apparatus of any of claims 1-14, wherein at least one of:

(i) the at least one IR sensor is placed against a front side of a wafer;

(ii) the at least one IR sensor is placed against a back side of a wafer; and

(iii) the at least one IR sensor comprises at least two sensors and the at least two sensors are configured to different predetermined resonant frequency ranges.

16. A method for testing and inspecting one or more different properties of different materials using at least one Impedance Resonance (IR) sensor of claim 1, wherein the one or more different properties comprising at least one of:

density, hardness, structure, and composition, the method comprising;

providing an excitation coil of at least one Impedance Resonance (IR) sensor with alternating current from an RF sweep generator, wherein a range of frequency sweeping includes a resonant frequency of a sensing coil electromagnetically coupled with a wafer (or a substrate) part falling within the scope of the IR sensor'"'"'s sensitive area, the excitation coil, being electromagnetically coupled with the sensing coil, propagates an energy to the sensing coil and the sensing coil in turn emits a probing electromagnetic field, which penetrates the wafer (substrate) part falling within the scope of the IR sensor'"'"'s sensitive area, the sensing coil is not connected to a capacitance means located externally to the sensing coil such that the sensing coil is capable of measuring one or more properties of the wafer (or substrate) part;

perceiving an influence on the probing electromagnetic field induced by the measured film by means of both the excitation coil and the sensing coil of the sensor; and

transferring information about the influence to a calculation block by means of a data acquisition block for data processing.

17. The method of claim 16, further comprising at least one of:

(i) measuring thickness and uniformity of different types of conductive, semiconductive and non-conductive coating, the coating comprising one or more of;

paint, plating, insulator(s), and isolation such as cover for wires or other conductors, which are capable of preventing and/or reducing electrical shortcut;

(ii) detecting one or more of;

corrosion, cracks, and metal fatigue of at least one of steering racks, gears, output shafts, aircraft'"'"'s lending gear and fuselage skin panels; and

(iii) performing component unit defectoscopy of other vehicles, buildings and erections.

18. A method of measuring conductive, semiconductive or non-conductive film thickness, comprising:

providing an excitation coil of at least one Impedance Resonance (IR) sensor with alternating current from an RF sweep generator, wherein a range of frequency sweeping includes a resonant frequency of a sensing coil electromagnetically coupled with a wafer (or a substrate) part falling within the scope of the IR sensor'"'"'s sensitive area, the excitation coil, being electromagnetically coupled with the sensing coil, propagates an energy to the sensing coil and the sensing coil in turn emits a probing electromagnetic field, which penetrates the wafer (substrate) part falling within the scope of the IR sensor'"'"'s sensitive area, the sensing coil is not connected to any capacitance means located externally to the sensing coil such that the sensing coil is capable of measuring one or more properties of the wafer (or substrate) part;

perceiving an influence on the probing electromagnetic field induced by the measured film by means of both the excitation coil and the sensing coil of the sensor; and

transferring information about the influence to a calculation block by means of a data acquisition block for data processing.

19. The method of claim 18, further comprising monitoring a conductive, semiconductive or non-conductive film thickness during a chemical mechanical polishing/planarization using an etching tool that operates to perform one or more etching processes to control a removal of film from an underlying body, the etching tool comprising at least one apparatus for measuring film thickness on an underlying body, the at least one apparatus comprising at least one Impedance Resonance (IR) sensor comprising the following:

at least one sensing head which is an open core or coreless (air core) inductor comprising at least one excitation coil and at least one sensing coil, wherein;

(i) said excitation coil is intended to propagate an energy to the sensing coil, which is intended to generate a probing electromagnetic field;

(ii) said at least one sensing coil is designed in such a way that intrinsic inductance L, capacitance C, and resistance R parameters of said sensing coil are capable of providing resonance conditions within predetermined frequency range for measuring impedance of wafer (or substrate) part falling within the scope of the sensor'"'"'s sensitive area; and

(iii) said at least one sensing coil is not connected to a capacitance means located externally to said at least one sensing coil such that said at least one sensing coil is capable of measuring one or more properties of said wafer (or substrate) part;

at least one power supply;

at least one RF sweep generator electrically connected to said excitation coil;

at least one data acquisition block with a high impedance input, greater than 10 MΩ

electrically connected to both the excitation coil and the sensing coil of the sensor;

at least one calculation block; and

at least one communication block.

20. The method of claim 18, further comprising monitoring a conductive, semiconductive or non-conductive film thickness during the one or more etching processes using an etching tool that operates to perform one or more etching processes to control a removal of film from an underlying body, the etching tool comprising at least one apparatus for measuring film thickness on an underlying body, the at least one apparatus comprising at least one Impedance Resonance (IR) sensor comprising the following:

at least one sensing head which is an open core or coreless (air core) inductor comprising at least one excitation coil and at least one sensing coil, wherein;

(i) said excitation coil is intended to propagate an energy to the sensing coil, which is intended to generate a probing electromagnetic field;

(ii) said at least one sensing coil is designed in such a way that intrinsic inductance L, capacitance C, and resistance R parameters of said sensing coil are capable of providing resonance conditions within predetermined frequency range for measuring impedance of wafer (or substrate) part falling within the scope of the sensor'"'"'s sensitive area; and

(iii) said at least one sensing coil is not connected to a capacitance means located externally to said at least one sensing coil such that said at least one sensing coil is capable of measuring one or more properties of said wafer (or substrate) part;

at least one power supply;

at least one RF sweep generator electrically connected to said excitation coil;

at least one data acquisition block with a high impedance input, greater than 10 MΩ

electrically connected to both the excitation coil and the sensing coil of the sensor;

at least one calculation block; and

at least one communication block.

21. The method of claim 18, further comprising monitoring a conductive, semiconductive or non-conductive film thickness during the one or more deposition processes using a deposition tool to perform one or more deposition processes to control a deposition of film onto an underlying body, the one or more deposition processes comprising at least one of:

evaporation, sputtering, physical vapor deposition (“

PVD”

), chemical vapor deposition (“

CVD”

), electro-chemical deposition (“

ECD”

), plasma enhanced chemical vapor deposition (“

PECVD”

) and atomic layer deposition (“

ALD”

), the deposition tool comprising at least one apparatus for measuring film thickness on an underlying body, the at least one apparatus comprising at least one Impedance Resonance (IR) sensor comprising the following;

at least one sensing head which is an open core or coreless (air core) inductor comprising at least one excitation coil and at least one sensing coil, wherein;

(i) said excitation coil is intended to propagate an energy to the sensing coil, which is intended to generate a probing electromagnetic field;

(ii) said at least one sensing coil is designed in such a way that intrinsic inductance L, capacitance C, and resistance R parameters of said sensing coil are capable of providing resonance conditions within predetermined frequency range for measuring impedance of wafer (or substrate) part falling within the scope of the sensor'"'"'s sensitive area; and

(iii) said at least one sensing coil is not connected to a capacitance means located externally to said at least one sensing coil such that said at least one sensing coil is capable of measuring one or more properties of said wafer (or substrate) part;

at least one power supply;

at least one RF sweep generator electrically connected to said excitation coil;

at least one data acquisition block with a high impedance input, greater than 10 MΩ

electrically connected to both the excitation coil and the sensing coil of the sensor;

at least one calculation block; and

at least one communication block.

22. The method of claim 18, further comprising measuring a conductive, semiconductive or non-conductive film thickness with a stand-alone metrology tool using a stand-alone metrology tool comprising at least one apparatus for measuring film thickness on an underlying body, the at least one apparatus comprising at least one Impedance Resonance (IR) sensor comprising the following:

at least one sensing head which is an open core or coreless (air core) inductor comprising at least one excitation coil and at least one sensing coil, wherein;

(i) said excitation coil is intended to propagate an energy to the sensing coil, which is intended to generate a probing electromagnetic field;

(ii) said at least one sensing coil is designed in such a way that intrinsic inductance L, capacitance C, and resistance R parameters of said sensing coil are capable of providing resonance conditions within predetermined frequency range for measuring impedance of wafer (or substrate) part falling within the scope of the sensor'"'"'s sensitive area; and

(iii) said at least one sensing coil is not connected to a capacitance means located externally to said at least one sensing coil such that said at least one sensing coil is capable of measuring one or more properties of said wafer (or substrate) part;

at least one power supply;

at least one RF sweep generator electrically connected to said excitation coil;

at least one data acquisition block with a high impedance input, greater than 10 MΩ

electrically connected to both the excitation coil and the sensing coil of the sensor;

at least one calculation block; and

at least one communication block.

23. The method of any of claims 18-22, wherein at least one of:

(i) a reading, or the IR sensor'"'"'s output used in data processing, of the at least one IR sensor is at least one of;

the sensor'"'"'s resonance frequency, the sensor'"'"'s resonance amplitude, the sensor'"'"'s phase shift measured at a fixed frequency chosen in a vicinity of the resonance frequency, and the sensor'"'"'s amplitude measured at a fixed frequency chosen in a vicinity of the resonance frequency;

(ii) the film thickness is being calculated during a wafer processing or one or more stand-alone measurements using previously prepared calibration data acquired by measuring one or more etalon wafers (or substrates) with known film thickness;

(iii) the wafer processing stops when the film has reached a desired film thickness; and

(iv) the results of the film thickness measurements of the conductive, semiconductive and non-conductive films deposited on the wafer or substrate operate to be used for one or more of the following;

determining the resistance and conductance of the film at a plurality of locations;

determining the sheet resistance at each of the plurality of locations;

determining the film thickness at the plurality of locations;

calculating average sheet resistance over the plurality of locations;

calculating average film thickness over the plurality of locations; and

calculating total film thickness deviation.

24. The method of claim 23, further comprising at least one of:

(i) using two IR sensors of the at least one IR sensor, which are placed against opposite sides of the wafer, for excluding an influence of the underlying body'"'"'s one or more electromagnetic properties on one or more results of the film thickness measurement(s);

(ii) measuring thickness and uniformity of different types of conductive, semiconductive and non-conductive coating, the coating comprising one or more of;

paint, plating, insulator(s), and isolation such as cover for wires or other conductors, which are capable of preventing and/or reducing electrical shortcut;

(iii) detecting one or more of;

corrosion, cracks, and metal fatigue of at least one of steering racks, gears, output shafts, aircraft'"'"'s lending gear and fuselage skin panels; and

(iv) performing component unit defectoscopy of other vehicles, buildings and erections.