Angular rate sensor
First Claim
1. A rotation sensing device comprising a structure comprising:
- a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis;
a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams;
an actuation mechanism configured and operable to apply an electrostatic force to the proof masses, causing deformation of the beams and periodic variation of the beams'"'"' stiffness, to thereby parametrically excite the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.
1 Assignment
0 Petitions
Accused Products
Abstract
A rotation sensing device is presented. The device comprises: a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; and an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.
4 Citations
22 Claims
-
1. A rotation sensing device comprising a structure comprising:
-
a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; an actuation mechanism configured and operable to apply an electrostatic force to the proof masses, causing deformation of the beams and periodic variation of the beams'"'"' stiffness, to thereby parametrically excite the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. A rotation sensing device comprising:
-
at least one pair of proof masses spaced-apart from one another along a first axis; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses of said at least one pair of proof masses to an anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams; an actuation mechanism adapted to apply an electrostatic force to the proof masses causing deformation of the beams and periodic variation of the beams'"'"' stiffness, to thereby parametrically excite the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, such that a sense-mode oscillatory movement of the proof masses is generated during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation.
-
-
22. A rotation sensing device comprising a structure comprising:
-
a proof mass arrangement comprising at least one pair of proof masses spaced-apart from one another along a first axis, each of the proof masses being enclosed between first and second anchors of an anchor assembly located at first and second opposite sides of said proof mass; a suspension assembly comprising flexible suspension beams having a main axis deformable between their substantially straight and curved states, the suspension assembly coupling the proof masses to an the anchor assembly, while allowing a drive-mode oscillatory movement of the proof masses at least along a second axis substantially perpendicular to the main axis of the beams and substantially parallel to said first axis along which the proof masses are spaced; an actuation mechanism configured and operable to cause the drive-mode oscillatory movement of the proof masses in opposite directions along said second axis, thereby generating a sense-mode oscillatory movement of the proof masses during the rotation of the device about at least one rotation axis perpendicular to said second axis, said sense-mode movement being indicative of a rate of the rotation; and an electrodes arrangement, comprising movable electrodes and fixed electrodes, wherein each of said proof masses is enclosed between first and second movable electrodes which are located at said first and second opposite sides of said proof mass, each the first and second movable electrodes being connected to the one of the first and second anchors respectively via at least one of said beams and connected to the respective proof mass via at least another one of said beams.
-
Specification