Micro-electro mechanical apparatus with interdigitated spring
First Claim
1. A micro-electro mechanical apparatus, adapted to sense an acceleration, comprising:
- a substrate;
a first mass;
a movable electrode, disposed on the first mass along a first axial direction;
a stationary electrode, disposed on the substrate along the first axial direction, wherein the movable electrode and the stationary electrode have a critical gap there between;
an anchor; and
an interdigitated spring, connecting the first mass and the anchor along the first axial direction, and comprising;
a plurality of first folded portions, wherein each of the first folded portions comprising two first spans and a first head portion configured to connect the two first spans;
a plurality of first connecting portions, wherein each of the first connecting portions is respectively connected to the first spans of two adjacent first folded portions to define a first space;
a plurality of second folded portions, wherein each of the second folding portions comprising two second spans and a second head portion configured to connect the two second spans; and
a plurality of second connecting portions, wherein each of the second connecting portions is respectively connected to the second spans of two adjacent second folded portions to define a second space;
wherein at least one of the first folded portions is disposed in the second space, and at least one of the second folded portions is disposed in the first space, a width of the first span is greater than the critical gap and a width of the second span is greater than the critical gap.
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Accused Products
Abstract
A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.
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Citations
26 Claims
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1. A micro-electro mechanical apparatus, adapted to sense an acceleration, comprising:
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a substrate; a first mass; a movable electrode, disposed on the first mass along a first axial direction; a stationary electrode, disposed on the substrate along the first axial direction, wherein the movable electrode and the stationary electrode have a critical gap there between; an anchor; and an interdigitated spring, connecting the first mass and the anchor along the first axial direction, and comprising; a plurality of first folded portions, wherein each of the first folded portions comprising two first spans and a first head portion configured to connect the two first spans; a plurality of first connecting portions, wherein each of the first connecting portions is respectively connected to the first spans of two adjacent first folded portions to define a first space; a plurality of second folded portions, wherein each of the second folding portions comprising two second spans and a second head portion configured to connect the two second spans; and a plurality of second connecting portions, wherein each of the second connecting portions is respectively connected to the second spans of two adjacent second folded portions to define a second space; wherein at least one of the first folded portions is disposed in the second space, and at least one of the second folded portions is disposed in the first space, a width of the first span is greater than the critical gap and a width of the second span is greater than the critical gap. - View Dependent Claims (2, 3, 4, 5, 23)
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6. A micro-electro mechanical apparatus, adapted to sense an angular velocity, comprising:
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a substrate; a first mass; a second mass; a movable electrode, disposed on the second mass along a second axial direction; a stationary electrode, disposed on the substrate along the second axial direction, wherein the movable electrode and the stationary electrode have a critical gap there between; an anchor; and an interdigitated spring, connecting the second mass and the anchor along the second axial direction, and comprising; a plurality of first folded portions, wherein each of the first folded portion comprising two first spans and a first head portion configured to connect the two first spans; a plurality of first connecting portions, wherein each of the first connecting portions is respectively connected to the first spans of two adjacent first folded portions to define a first space; a plurality of second folded portions, wherein each of the second folded portion comprising two second spans and a second head portion configured to connect the two second spans; and a plurality of second connecting portions, wherein each of the second connecting portions is respectively connected to the second spans of two adjacent second folded portions to define a second space; wherein at least one of the first folded portions is disposed in the second space, and at least one of the second folded portions is disposed in the first space, a width of the first span is greater than the critical gap and a width of the second span is greater than the critical gap. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13, 24)
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14. A micro-electro mechanical apparatus comprising:
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a substrate; at least one mass; a movable electrode, disposed on the mass along an axial direction; a stationary electrode, disposed on the substrate along the axial direction, wherein the movable electrode and the stationary electrode have a critical gap there between; an anchor; and an interdigitated spring, connecting the mass and the anchor, and comprising; a plurality of first folded portions, wherein each of the first portions comprising two first spans and a first head portion configured to connect the two first spans; a plurality of first connecting portions, wherein each of the first connecting portions is respectively connected to the first spans of two adjacent first folded portions to define a first space; a plurality of second folded portions, wherein each of the second portions comprising two second spans and a second head portion configured to connect the two second spans; and a plurality of second connecting portions, wherein each of the second connecting portions is respectively connected to the second spans of two adjacent second folded portions to define a second space; wherein at least one of the first folded portions is disposed in the second space, and at least one of the second folded portions is disposed in the first space, a width of the first span is greater than the critical gap and a width of the second span is greater than the critical gap. - View Dependent Claims (15, 16, 17, 18, 19, 25)
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20. A method for mitigating frequency drift of a micro-electro mechanical apparatus, comprising:
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using an interdigitated spring to connect at least one mass and an anchor of the micro-electro mechanical apparatus, wherein the interdigitated spring comprises; a plurality of first folded portions, wherein each of the first folded portions comprises two first spans and a first head portion connecting the two first spans; a plurality of first connecting portions, wherein each of the first connecting portions is respectively connected to the first spans of two adjacent first folded portions to define a first space; a plurality of second folded portions, wherein each of the second folded portions comprises two second spans and a second head portion connecting the two second spans; and a plurality of second connecting portions, wherein each of the second connecting portions is respectively connected to the second spans of two adjacent second folded portions to define a second space; and arranging at least one of the first folded portions in the second space, and arranging at least one of the second folded portions in the first space; and
defining a width of the first span which is greater than a critical gap and defining a width of the second span which is greater than a critical gap, wherein the critical gap is located between a movable electrode and a stationary electrode of the micro-electro mechanical apparatus. - View Dependent Claims (21, 22, 26)
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Specification