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MEMS structures and methods for forming the same

  • US 9,533,876 B2
  • Filed: 06/05/2015
  • Issued: 01/03/2017
  • Est. Priority Date: 10/24/2011
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a substrate;

    a micro-electro-mechanical system (MEMS) device over the substrate, wherein the MEMS device comprises;

    a movable element as a first capacitor plate of a capacitor; and

    a fixed element as a second capacitor plate of the capacitor;

    a bond ring encircling the MEMS device, wherein the bond ring comprises a metal; and

    a protection layer over the bond ring, wherein the protection layer is capable of forming a eutectic metal with the bond ring.

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