Oscillating voltage of sense electrodes in a MEMS tuning fork gyroscope

• US 9,534,896 B2
• Filed: 03/27/2013
• Issued: 01/03/2017
• Est. Priority Date: 03/27/2013
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Sutton, Michael S., Weber, Mark W.
• Primary Examiner(s): Lyons, Michael A
• Assistant Examiner(s): NATH, SUMAN KUMAR
• Application Number:
  US13/851,448
• Publication Number:
  US 20150253138A1
• Time in Patent Office: 1,378 Days
• Field of Search: 735/041.2, 735/041.6, 735/041.4, 324/661
• US Class Current: 1/1
• CPC Class Codes: G01C 19/5614 Signal processing
• CPC Class Codes: G01C 19/5621 the devices involving a micromechanical structure
• CPC Class Codes: G01C 19/5726 Signal processing

Abstract

Embodiments of the subject application provide a method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope. The method includes oscillating a voltage on a first sense electrode out-of-plane from and proximate a first side of a first proof mass between a first voltage and a second voltage at a first frequency. The method also includes oscillating a voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the voltage on the first sense electrode. The method also includes generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

Claims

1. A method for operating a micro-electro-mechanical system (MEMS) tuning fork gyroscope, the method comprising:

applying a first AC drive signal to a first in-plane electrode that is in-plane with a first proof mass in order to induce in-plane motion on the first proof mass;

oscillating a first voltage on a first sense electrode out-of-plane from and proximate a first side of the first proof mass between a first voltage value and a second voltage value at a first frequency, wherein the first voltage value is different from the second voltage value;

oscillating a second voltage on a second sense electrode out-of-plane from and proximate a second side of the first proof mass between the first voltage value and the second voltage value at the first frequency and 180 degrees out-of-phase with the first voltage on the first sense electrode; and

generating a rate signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane motion of the first proof mass.

2. The method of claim 1, wherein oscillating the first voltage on the first sense electrode and oscillating the second voltage on the second sense electrode comprises oscillating the first voltage on the first sense electrode and oscillating the second voltage on the second sense electrode according to square waves such that the first voltage on the first sense electrode and the second voltage on the second sense electrode alternate between the first voltage value and the second voltage value.

3. The method of claim 1, wherein oscillating the first voltage on the first sense electrode and oscillating the second voltage on the second sense electrode comprises oscillating the first voltage on the first sense electrode and oscillating the second voltage on the second sense electrode according to sine waves.

4. The method of claim 1, wherein the first voltage value is delta-v volts above a DC voltage level of the first proof mass and the second voltage value is delta-v volts below the DC voltage level of the first proof mass.

5. The method of claim 4, wherein delta-v volts is in the range of 1-10 volts.

6. The method of claim 1, comprising

applying a first quad cancelling signal to the first in-plane electrode, the first quad cancelling signal having the first frequency and in-phase with either the first voltage on the first sense electrode or the second voltage on the second sense electrode.

7. The method of claim 6, comprising:

oscillating a third voltage on a third sense electrode out-of-plane from and proximate a first side of a second proof mass between the first voltage value and the second voltage value at the first frequency and 180 degrees out-of-phase with the first voltage on the first sense electrode, wherein the second proof mass is in-plane with the first proof mass and the first side of the second proof mass faces the same direction as the first side of the first proof mass;

oscillating a fourth voltage on a fourth sense electrode out-of-plane from and proximate a second side of the second proof mass between the first voltage and the second voltage at the first frequency and 180 degrees out-of-phase with the third voltage on the third sense electrode;

wherein the first proof mass and the second proof mass are electrically coupled together;

applying a second AC drive signal to a second in-plane electrode that is in-plane with the second proof mass in order to induce in-plane drive motion on the second proof mass; and

applying a second quad cancelling signal to the second in-plane electrode, the second quad cancelling signal having the first frequency and being 180 degrees out-of-phase with the first quad cancelling signal.

8. The method of claim 6, comprising:

generating a quad signal by first demodulating the out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal at 90 degrees out-of-phase from the in-plane motion of the first proof mass;

determining a motor bias value based on the magnitude of the quad signal; and

mixing the motor bias value with a signal having the first frequency and in-phase with either the first voltage on the first sense electrode or the second voltage on the second sense electrode to generate the first quad cancelling signal.

9. The method of claim 1, wherein the first frequency is in the range of 1 Hz to 100 KHz.

10. A micro-electro-mechanical system (MEMS) tuning fork gyroscope comprising:

a first planar proof mass defining a first surface and a second surface;

a first sense electrode out-of-plane from the first proof mass and proximate the first surface;

a second sense electrode out-of-plane from the first proof mass and proximate the second surface;

a first in-plane electrode having a comb that interleaves with a comb on the first planar proof mass; and

control electronics configured to;

apply a first AC drive signal to the first in-plane electrode to induce in-plane drive motion on the first proof mass;

apply a first oscillating voltage to the first sense electrode and a second oscillating voltage to the second sense electrode, wherein the first oscillating voltage oscillates between a first voltage value and a second voltage value at a first frequency, and wherein the second oscillating voltage oscillates between the first voltage value and the second voltage value at the first frequency and 180 degrees out-of-phase from the first oscillating voltage, wherein the first voltage value is different from the second voltage value; and

determine a signal corresponding to a rotation rate of the first proof mass by first demodulating an out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal in phase with in-plane drive motion of the first proof mass.

11. The MEMS tuning fork gyroscope of claim 10, wherein the first oscillating voltage and the second oscillating voltage oscillate according to square waves such that the first oscillating voltage on the first sense electrode and the second oscillating voltage on the second sense electrode alternate between the first voltage value and the second voltage value.

12. The MEMS tuning fork gyroscope of claim 10, wherein the first oscillating voltage and the second oscillating voltage oscillate according to sine waves.

13. The MEMS tuning fork gyroscope of claim 10, wherein the first voltage value is delta-v volts above a DC voltage level of the first proof mass and the second voltage value is delta-v volts below the DC voltage level of the first proof mass.

14. The MEMS tuning fork gyroscope of claim 13, wherein delta-v volts is in the range of 1-10 volts.

15. The MEMS tuning fork gyroscope of claim 10, wherein the control electronics are configured to apply a first quad cancelling signal to the first in-plane electrode, the first quad cancelling signal having the first frequency and in-phase with either the first oscillating voltage on the first sense electrode or the second oscillating voltage on the second sense electrode.

16. The MEMS tuning fork gyroscope of claim 15, comprising:

a second planar proof mass in-plane with and electrically coupled to the first proof mass and defining a third surface and a fourth surface, wherein the third surface faces the same direction as the first surface;

a third sense electrode out-of-plane from the second proof mass and proximate the third surface;

a fourth sense electrode out-of-plane from the second proof mass and proximate the fourth surface; and

a second in-plane electrode having a comb that interleaves with a comb of the second planar proof mass;

wherein the control electronics are configured to;

apply a second AC drive signal to the second in-plane electrode to induce in-plane drive motion on the second proof mass;

apply a third oscillating voltage to the third sense electrode and a fourth oscillating voltage to the fourth sense electrode, wherein the third oscillating voltage oscillates between the first voltage value and the second voltage value at the first frequency and 180 out-of-phase from the first oscillating voltage; and

apply a second quad cancelling signal to the second in-plane electrode, the second quad cancelling signal having the first frequency and 180 degrees out-of-phase with the first quad cancelling signal.

17. The MEMS tuning fork gyroscope of claim 15, wherein the control electronics are configured to:

generate a quad signal by first demodulating the out-of-plane signal from the first proof mass at the first frequency and second demodulating the out-of-plane signal at 90 degrees out-of-phase from the in-plane motion of the first proof mass;

determine a motor bias value based on the magnitude of the quad signal; and

mix the motor bias value with a signal having the first frequency and in-phase with either the first oscillating voltage on the first sense electrode or the second oscillating voltage on the second sense electrode to generate the first quad cancelling signal.

18. The MEMS tuning fork gyroscope of claim 10, wherein the first frequency is in the range of 1 Hz to 100 KHz.

19. A micro-electro-mechanical system (MEMS) tuning fork gyroscope comprising:

a first planar proof mass defining a first surface and a second surface;

a first sense electrode out-of-plane from the first proof mass and proximate the first surface;

a second sense electrode out-of-plane from the first proof mass and proximate the second surface;

a first in-plane electrode having a comb that interleaves with a comb on the first planar proof mass;

a second planar proof mass in-plane with the first proof mass and defining a third surface and a fourth surface, wherein the third surface faces the same direction as the first surface;

a third sense electrode out-of-plane from the second proof mass and proximate the third surface;

a fourth sense electrode out-of-plane from the second proof mass and proximate the fourth surface;

a second in-plane electrode having a comb that interleaves with a comb of the second planar proof mass; and

control electronics configured to;

apply a first AC drive signal to the first in-plane electrode to induce in-plane drive motion on the first proof mass;

apply a second AC drive signal to the second in-plane electrode to induce in-plane drive motion on the first proof mass;

apply a first oscillating voltage to the first sense electrode and a second oscillating voltage to the second sense electrode, wherein the first oscillating voltage oscillates between a first voltage value and a second voltage value at a first frequency, and wherein the second oscillating voltage oscillates between the first voltage value and the second voltage value at the first frequency and 180 degrees out-of-phase from the first oscillating voltage, wherein the first voltage value is different from the second voltage value;

apply the first oscillating voltage to the fourth sense electrode and the second oscillating voltage to the third sense electrode; and

determine a signal corresponding to a rotation rate of the first and second proof masses by first demodulating an out-of-plane signal from the first and second proof masses at the first frequency and second demodulating the out-of-plane signal in phase with in-plane drive motion of the first and second proof mass.

20. The MEMS tuning fork gyroscope of claim 19, wherein the control electronics are configured to:

apply a first quad cancelling signal to the first in-plane electrode, the first quad cancelling signal having the first frequency and in-phase with either the first oscillating voltage or the second oscillating voltage; and

apply a second quad cancelling signal to the second in-plane electrode, the second quad cancelling signal having the first frequency and 180 degrees out-of-phase with the first quad cancelling signal.