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Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation

  • US 9,535,084 B2
  • Filed: 03/17/2011
  • Issued: 01/03/2017
  • Est. Priority Date: 03/17/2010
  • Status: Active Grant
First Claim
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1. A method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least four trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass,wherein the rotation rate sensor comprises a control arrangement to measure rotation rate, and wherein the control arrangement comprises a sigma-delta converter with which a controlled variable (y) representing the detected deflection of the seismic mass in its secondary mode (q2) is digitized directly or at least a variable dependent thereon is digitized, and after which:

  • 1) a resetting variable (ũ

    S) is generated as a digital variable, and2) both a resonance frequency manipulated variable (ũ

    T), and a quadrature manipulated variable (ũ

    C) are generated as digital variables based on the digital resetting variable (ũ

    S), andwherein each of the electric trimming voltages (u1, u2, u3, u4) is set as a function of a square root of a different sum of the digitized resonance frequency manipulated variable (ũ

    T), the quadrature manipulated variable (ũ

    C) and another resetting variable (ũ

    S).

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