Method for the decoupled control of the quadrature and the resonance frequency of a micro-mechanical rotation rate sensor by means of sigma-delta-modulation
First Claim
1. A method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least four trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass,wherein the rotation rate sensor comprises a control arrangement to measure rotation rate, and wherein the control arrangement comprises a sigma-delta converter with which a controlled variable (y) representing the detected deflection of the seismic mass in its secondary mode (q2) is digitized directly or at least a variable dependent thereon is digitized, and after which:
- 1) a resetting variable (ũ
S) is generated as a digital variable, and2) both a resonance frequency manipulated variable (ũ
T), and a quadrature manipulated variable (ũ
C) are generated as digital variables based on the digital resetting variable (ũ
S), andwherein each of the electric trimming voltages (u1, u2, u3, u4) is set as a function of a square root of a different sum of the digitized resonance frequency manipulated variable (ũ
T), the quadrature manipulated variable (ũ
C) and another resetting variable (ũ
S).
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Accused Products
Abstract
A method for the precise measuring operating of a micro-mechanical rotation rate sensor, including at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass. An electric trimming voltage (u1, u2, u3, u4) is set respectively between the trimming electrode elements and the seismic mass. Each of the electric trimming voltages (u1, u2, u3, u4) are adjusted in accordance with a resonance frequency variable (ũT, ŨT,0), a quadrature variable (ũc, ŨC,0) and a restoring variable (ũS).
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Citations
15 Claims
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1. A method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least four trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass,
wherein the rotation rate sensor comprises a control arrangement to measure rotation rate, and wherein the control arrangement comprises a sigma-delta converter with which a controlled variable (y) representing the detected deflection of the seismic mass in its secondary mode (q2) is digitized directly or at least a variable dependent thereon is digitized, and after which: -
1) a resetting variable (ũ
S) is generated as a digital variable, and2) both a resonance frequency manipulated variable (ũ
T), and a quadrature manipulated variable (ũ
C) are generated as digital variables based on the digital resetting variable (ũ
S), andwherein each of the electric trimming voltages (u1, u2, u3, u4) is set as a function of a square root of a different sum of the digitized resonance frequency manipulated variable (ũ
T), the quadrature manipulated variable (ũ
C) and another resetting variable (ũ
S). - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in the primary mode and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage is applied between each of these trimming electrode elements and the seismic mass, wherein the rotation rate sensor is embodied in such a way that it is suitable for carrying out the method comprising:
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a method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass, wherein the rotation rate sensor comprises a control arrangement to measure rotation rate, and wherein the control arrangement comprises a sigma-delta converter with which a controlled variable (y) representing the detected deflection of the seismic mass in its secondary mode (q2) is digitized directly or at least a variable dependent thereon is digitized, and after which; 1) and a resetting variable (ũ
S) is generated as a digital variable, and2) both a resonance frequency manipulated variable (ũ
T), and a quadrature manipulated variable (ũ
C) are generated as digital variables based on the digital resetting variable (ũ
S), andwherein each of the electric trimming voltages (u1, u2, u3, u4) is set as a function of a square root of a different sum of the digitized resonance frequency manipulated variable (ũ
T), the quadrature manipulated variable (ũ
C) and another resetting variable (ũ
S).
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15. A method for the precise measuring operation of a micro-mechanical rotation rate sensor, comprising at least one seismic mass, at least one drive device for driving the seismic mass in a primary mode (q1) and at least three trimming electrode elements which are jointly associated directly or indirectly with the seismic mass, wherein in each case an electric trimming voltage (u1, u2, u3, u4) is applied between each of these trimming electrode elements and the seismic mass,
wherein each of these electric trimming voltages (u1, u2, u3, u4) is set as a function of a resonance frequency manipulated variable (ũ -
T), a quadrature manipulated variable
(ũ
C) and a resetting variable (ũ
S);wherein the rotation rate sensor comprises a control arrangement to measure a rotation rate, and wherein the control arrangement comprises a sigma-delta converter with which a controlled variable (y) representing the detected deflection of the seismic mass in its secondary mode (q2) is digitized directly or at least a variable dependent thereon is digitized, and after which the resonance frequency manipulated variable (ũ
T), the quadrature manipulated variable (ũ
C) and the resetting variable (ũ
S) are generated as digital variables, andwherein the control arrangement firstly forms a control error variable from the controlled variable (y) with predefinition of a control reference variable, wherein the controlled variable (y) represents the detected deflection of the seismic mass in the direction of its secondary mode, and wherein the control reference variable is a harmonic frequency identification signal (yD) with the frequency ω
s modulated with the frequency of the primary mode (ω
1), or such a frequency identification signal is superimposed on the control reference variable, after which the control error variable formed in this way is fed to a first controller unit in which at least the resetting variable(ũ
S) is generated.
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T), a quadrature manipulated variable
Specification