Diversified exerciser and accelerator

• US 9,535,113 B1
• Filed: 01/21/2016
• Issued: 01/03/2017
• Est. Priority Date: 01/21/2016
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Miller, Gregory V., Swift, Ann L., Thomas, Joel, Grosch, David A., Noble, Brian C., Van Horn, Jody J.
• Primary Examiner(s): Hollington, Jermele M
• Assistant Examiner(s): NASIR, TAQI R
• Application Number:
  US15/003,249
• Time in Patent Office: 348 Days
• Field of Search: 324/551, 324/760, 324/765, 324/750.05, 324/762.01, 324/762.05, 32476001-76301, 324/719, 324/71.5, 32475701-75705, 714/733, 714/738, 714/718, 714/735
• US Class Current: 1/1
• CPC Class Codes: G01R 31/2601 Apparatus or methods therefor G01R31/2607, G01R31/2642 take precedence
• CPC Class Codes: G01R 31/2858 Measuring of material aspects, e.g. electro-migration [EM], hot carrier injection
• CPC Class Codes: G01R 31/2863 Contacting devices, e.g. sockets, burn-in boards or mounting fixtures in general G01R1/04
• CPC Class Codes: G01R 31/2875 related to heating
• CPC Class Codes: G01R 31/2879 related to electrical aspects, e.g. to voltage or current supply or stimuli or to electrical loads

Abstract

A method, apparatus and computer program product for testing semiconductor products that combines multiple techniques. Depending on the requirements, different ones of the techniques are emphasized over the other techniques. The testing applies a technique to achieve a higher single defect acceleration parameter at the expense of a second parameter, thus enabling acceleration of defects that require higher voltage or higher temperature than a traditional “Burn In” can achieve, which defects would otherwise go unaccelerated. The method manages the adaptation of the different techniques, e.g., how it decides to favor one technique over the other, and how it carries out the favoring of one or more particular techniques in a given test situation. Thus, acceleration to defectivity (defect type and quantity) may be tailored in real time by uniquely leveraging the duration spent in a given section of a process flow based on the prevalence of unique defect types.

Claims

1. A method for testing semiconductor products comprising:

applying, to a semiconductor product, first test voltage and temperature stimuli based on acceleration condition parameters, said parameters comprising a temperature acceleration condition parameter and voltage acceleration condition parameter, at corresponding acceleration condition levels, said first test stimuli for detecting one or more known latent defects in the semiconductor product;

collecting production results from said applying said first test stimuli;

applying to said semiconductor product, test stimuli in succession, and varying, at each successive application, one or more of;

a temperature acceleration condition parameter, a voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters, each successive application of test stimuli applied for inducing an acceleration of a semiconductor product defect,

said varying comprising applying, at one or more of said successive applications, a combination of an increased first acceleration condition parameter and/or acceleration condition level and decreasing a second acceleration condition parameter and/or acceleration condition level parameter;

collecting production results from said applying further test stimuli at each said successive application; and

detecting, based on said collected production results for each said first and successive application of test stimuli, a previously unknown semiconductor product defect.

2. The method as claimed in claim 1, wherein said detecting a previously unknown semiconductor product defect comprises:

comparing, at a processor device, said production results collected responsive to said applying said first test stimuli to said semiconductor product against said production results collected responsive to said applying each successive application of further test stimuli, wherein a previously unknown semiconductor product defect is detected based on said comparing.

3. The method as claimed in claim 1, further comprising:

determining whether the detected previously unknown semiconductor product defect is achievable from applying a known combination of a temperature acceleration condition parameter, a voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters and/or the corresponding acceleration condition level designed to detect a known semiconductor product defect; and

if the detected previously unknown semiconductor product defect is not achievable from applying the known combination, then integrating the varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter as an additional test stimuli to be applied when conducting an initial semiconductor product test after manufacture.

4. The method as claimed in claim 1, further comprising:

obtaining, at a processor device, a first distribution metric representing an amount of detected known defect failures based on tests applied to a plurality of semiconductor products using said applied temperature acceleration condition parameter, voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters and/or the corresponding acceleration condition level designed to detect the known semiconductor product defects;

obtaining, at the processor device, a second distribution metric representing an amount of detected known defect failures based on said further test stimuli applied to a plurality of semiconductor products using the varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter;

comparing the first distribution metric with the second distribution metric to detect a change in a distribution of known defect failures resulting from said varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter; and

adaptively modifying, at a successive application, the applied temperature, voltage or both temperature and voltage stimuli based on detecting a change in the distribution of known defect failures.

5. The method as claimed in claim 4, wherein said adaptively modifying said applied temperature, voltage or both temperature and voltage stimuli comprises adjusting by increasing or decreasing a time duration of an applied temperature, voltage or both temperature and voltage stimuli.

6. The method as claimed in claim 5, wherein said adjusting by increasing or decreasing a time duration of an applied temperature, voltage or both temperature and voltage stimuli, or adjusting a pattern of applying said stimuli is performed in real-time during said successive application.

7. The method as claimed in claim 1, wherein said varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter comprises one of:

a high level temperature condition stimulus and low level voltage stimulus applied to said semiconductor product, or a low level temperature condition stimulus and high level voltage stimulus applied to said semiconductor product.

8. An apparatus for testing semiconductor products comprising:

a processor device;

a memory storage device storing instructions, said instructions for configuring the processor device to perform a method to;

control applying, to a semiconductor product, first test voltage and temperature stimuli based on acceleration condition parameters, said parameters comprising a temperature acceleration condition parameter and voltage acceleration condition parameter, at corresponding acceleration condition levels, said first test stimuli for detecting one or more known latent defects in the semiconductor product;

collect production results from said applying said first test stimuli;

control applying to said semiconductor product, test stimuli in succession, and varying, at each successive application, one or more of;

a temperature acceleration condition parameter, a voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters, each successive application of test stimuli applied for inducing an acceleration of a semiconductor product defect, said varying comprising applying, at one or more of said successive applications, a combination of an increased first acceleration condition parameter and/or acceleration condition level and decreasing a second acceleration condition parameter and/or acceleration condition level parameter;

collect production results from said applying further test stimuli at each said successive application; and

detect, based on said collected production results for each said first and successive application of test stimuli, a previously unknown semiconductor product defect.

9. The apparatus as claimed in claim 8, wherein to detect a previously unknown semiconductor product defect, the processor device is further configured to:

compare said production results collected responsive to said applying said first test stimuli to said semiconductor product against said production results collected responsive to said applying each successive application of further test stimuli, wherein a previously unknown semiconductor product defect is detected based on said comparing.

10. The apparatus as claimed in claim 8, wherein the processor device is further configured to:

determine whether the detected previously unknown semiconductor product defect is achievable from applying a known combination of a temperature acceleration condition parameter, a voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters and/or the corresponding acceleration condition level designed to detect a known semiconductor product defect; and

if the detected previously unknown semiconductor product defect is not achievable from applying the known combination, then integrating the varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter as an additional test stimuli to be applied when conducting an initial semiconductor product test after manufacture.

11. The apparatus as claimed in claim 8, wherein the processor device is further configured to:

obtain a first distribution metric representing an amount of detected known defect failures based on tests applied to a plurality of semiconductor products using said applied temperature acceleration condition parameter, voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters and/or the corresponding acceleration condition level designed to detect the known semiconductor product defects;

obtain a second distribution metric representing an amount of detected known defect failures based on said further test stimuli applied to a plurality of semiconductor products using the varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter;

compare the first distribution metric with the second distribution metric to detect a change in a distribution of known defect failures resulting from said varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter; and

adaptively modify, at a successive application, the applied temperature, voltage or both temperature and voltage stimuli based on detecting a change in the distribution of known defect failures.

12. The apparatus as claimed in claim 11, wherein to adaptively modify said applied temperature, voltage or both temperature and voltage stimuli comprises, said processor device if further configured to adjust by increasing or decreasing a time duration of an applied temperature, voltage or both temperature and voltage stimuli.

13. The apparatus as claimed in claim 12, wherein said adjusting by increasing or decreasing a time duration of an applied temperature, voltage or both temperature and voltage stimuli, or adjusting a pattern of applying said stimuli is performed in real-time during said successive application.

14. The apparatus as claimed in claim 8, wherein said varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter comprises one of:

a high level temperature condition stimulus and low level voltage stimulus applied to said semiconductor product, or a low level temperature condition stimulus and high level voltage stimulus applied to said semiconductor product.

15. A computer program product comprising:

a non-transitory computer readable media embodying a program of instructions executable by a processing unit for testing a semiconductor product, the program of instructions, when executing, performing a method comprising;

applying, to a semiconductor product, first test voltage and temperature stimuli based on acceleration condition parameters, said parameters comprising a temperature acceleration condition parameter and voltage acceleration condition parameter, at corresponding acceleration condition levels, said first test stimuli for detecting one or more known latent defects in the semiconductor product;

collecting production results from said applying said first test stimuli;

applying to said semiconductor product, test stimuli in succession, and varying, at each successive application, one or more of;

a temperature acceleration condition parameter, a voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters, each successive application of test stimuli applied for inducing an acceleration of a semiconductor product defect,

said varying comprising applying, at one or more of said successive applications, a combination of an increased first acceleration condition parameter and/or acceleration condition level and decreasing a second acceleration condition parameter and/or acceleration condition level parameter;

collecting production results from said applying further test stimuli at each said successive application; and

detecting, based on said collected production results for each said first and successive application of test stimuli, a previously unknown semiconductor product defect.

16. The computer program product as claimed in claim 15, wherein said detecting a previously unknown semiconductor product defect comprises:

comparing, at a processor device, said production results collected responsive to said applying said first test stimuli to said semiconductor product against said production results collected responsive to said applying each successive application of further test stimuli, wherein a previously unknown semiconductor product defect is detected based on said comparing.

17. The computer program product as claimed in claim 15, further comprising:

determining whether the detected previously unknown semiconductor product defect is achievable from applying a known combination of a temperature acceleration condition parameter, a voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters and/or the corresponding acceleration condition level designed to detect a known semiconductor product defect; and

if the detected previously unknown semiconductor product defect is not achievable from applying the known combination, then integrating the varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter as an additional test stimuli to be applied when conducting an initial semiconductor product test after manufacture.

18. The computer program product as claimed in claim 15, further comprising:

obtaining, at a processor device, a first distribution metric representing an amount of detected known defect failures based on tests applied to a plurality of semiconductor products using said applied temperature acceleration condition parameter, voltage acceleration condition parameter or both temperature and voltage acceleration condition parameters and/or the corresponding acceleration condition level designed to detect the known semiconductor product defects;

obtaining, at the processor device, a second distribution metric representing an amount of detected known defect failures based on said further test stimuli applied to a plurality of semiconductor products using the varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter;

comparing the first distribution metric with the second distribution metric to detect a change in a distribution of known defect failures resulting from said varied combination of an increased first acceleration condition parameter and/or acceleration condition level and decreased second acceleration condition parameter and/or acceleration condition level parameter; and

adaptively modifying, at a successive application, the applied temperature, voltage or both temperature and voltage stimuli based on detecting a change in the distribution of known defect failures.

19. The computer program product as claimed in claim 18, wherein said adaptively modifying said applied temperature, voltage or both temperature and voltage stimuli comprises adjusting by increasing or decreasing a time duration of an applied temperature, voltage or both temperature and voltage stimuli.

20. The computer program product as claimed in claim 19, wherein said adjusting by increasing or decreasing a time duration of an applied temperature, voltage or both temperature and voltage stimuli, or adjusting a pattern of applying said stimuli is performed in real-time during said successive application.