Microelectromechanical system resonators and related methods and apparatus

• US 9,537,466 B1
• Filed: 04/30/2013
• Issued: 01/03/2017
• Est. Priority Date: 05/02/2012
• Status: Active Grant

• Current Assignee: Analog Devices, Inc.
• Original Assignee: Analog Devices, Inc.
• Inventors: Thalmayr, Florian, Kuypers, Jan H., Sparks, Andrew
• Primary Examiner(s): Dougherty, Thomas
• Application Number:
  US13/873,906
• Time in Patent Office: 1,344 Days
• Field of Search: 310/313.A, 310/313.B, 310/313.C, 310/313.D, 310/313.R, 310183-193, 310311-371, 333183-196
• US Class Current: 1/1
• CPC Class Codes: H03H 9/02228 Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
• CPC Class Codes: H03H 9/02338 Suspension means

Abstract

Microelectromechanical systems (MEMS) resonators and related methods and apparatus are provided. A MEMS resonator may include a first portion and a second portion. The first portion may be configured to resonate, and the second portion may be configured to operate based on an energy trapping principle to prevent energy from traveling therethrough from the first portion. The MEMS resonator may be a Lamb wave resonator. The MEMS resonator may be anchorless. The MEMS resonator may have a side contacted by the anchor, wherein the anchor contacts greater than approximately 50% of the side.

Claims

1. An apparatus, comprising:

a substrate;

a mechanical resonating structure having a side with a first length; and

an anchor coupling the mechanical resonating structure to the substrate and having a first end contacting the side and a second end contacting the substrate,

wherein the anchor is laterally patterned such that a second length of the first end differs from and is greater than approximately 50% of the first length.

2. The apparatus of claim 1, wherein the anchor is laterally patterned such that the second length is greater than 75% of the first length.

3. The apparatus of claim 2, wherein the anchor is laterally patterned such that the second length is greater than approximately 85% of the first length.

4. The apparatus of claim 3, wherein the anchor is laterally patterned such that the second length is greater than approximately 95% of the first length.

5. The apparatus of claim 1, wherein the mechanical resonating structure is configured to exhibit vibration in a direction substantially parallel to the side, and wherein the contact between the side and the anchor spans a node and an anti-node of the vibration.

6. The apparatus of claim 1, wherein the anchor has a varying lateral dimension in a direction substantially parallel to the side, such that the anchor contacts substantially the entire side and then varies in dimension along a direction substantially perpendicular to the side.

7. The apparatus of claim 6, wherein the anchor becomes narrower away from the contact between the anchor and the side.

8. The apparatus of claim 7, wherein the varying lateral dimension varies substantially continuously.

9. The apparatus of claim 6, wherein the anchor becomes wider away from the contact between the anchor and the side.

10. The apparatus of claim 1, wherein the mechanical resonating structure is configured to exhibit primary vibration in a direction substantially parallel to the side.

11. A device, comprising:

a suspended microelectromechancial systems (MEMS) resonator body configured to support a primary mode of vibration in a first direction; and

means for confining energy within the suspended MEMS resonator body by evanescent decay of the primary mode in a direction different than the first direction.

12. The device of claim 11,

wherein the suspended MEMS resonator body comprises a suspended membrane having two trenches formed therethrough, the two trenches defining a boundary of the suspended MEMS resonator body.

13. The device of claim 12, wherein the suspended membrane comprises an active layer and one or more additional layers configured to compensate for temperature-induced variation in resonant behavior of at least the active layer.

14. The device of claim 13, wherein the one or more additional layers comprises a multi-layer stack of materials, wherein a first layer of the multi-layer stack of materials comprises a material whose stiffness increases with increasing temperature and wherein a second layer of the multi-layer stack of materials comprises a material whose stiffness decreases with increasing temperature.

15. The device of claim 11,

wherein the suspended MEMS resonator body comprises a suspended membrane having at least two trenches formed therethrough, wherein exactly two trenches define a boundary of the suspended MEMS resonator body.

16. An apparatus, comprising:

a microelectromechanical systems (MEMS) Lamb wave resonator comprising a first portion and a second portion, wherein the first portion is configured to resonate and wherein the second portion is laterally patterned to operate based on an evanescent decay energy trapping principle to limit energy from traveling therethrough from the first portion.

17. The apparatus of claim 16, wherein the first and second portions are part of a suspended membrane coupled to a substrate.

18. The apparatus of claim 17, wherein the MEMS Lamb wave resonator further comprises a third portion that is part of the suspended membrane, with the second portion being positioned between the first and third portions, and wherein the second portion has a greater lateral dimension than the third portion.

19. The apparatus of claim 17, wherein the MEMS Lamb wave resonator further comprises a third portion, wherein the second portion is adjacent a first side of the first portion and the third portion is adjacent a second side of the first portion, and wherein each of the second and third portions is laterally patterned to limit energy in the first portion from reaching the substrate.

20. The apparatus of claim 16, wherein the first and second portions have different lateral dimensions, and wherein a lateral dimension of the second portion varies substantially continuously over at least part of a length of the second portion.