Resonant sensor and an associated sensing method

• US 9,538,657 B2
• Filed: 06/29/2012
• Issued: 01/03/2017
• Est. Priority Date: 06/29/2012
• Status: Active Grant

• Current Assignee: GE Infrastructure Technology, LLC (General Electric Company)
• Original Assignee: General Electric Company
• Inventors: Potyrailo, Radislav Alexandrovich, Surman, Cheryl Margaret, Go, Steven Yuehin, Lee, Yongjae
• Primary Examiner(s): Assouad, Patrick
• Assistant Examiner(s): Nasir, Taqi
• Application Number:
  US13/538,570
• Publication Number:
  US 20140002111A1
• Time in Patent Office: 1,649 Days
• Field of Search: 324/655, 324/309, 324/315, 324/316, 324/633, 324/652, 324/668, 324/675, 324/682, 324/708, 324/76.51, 324/696, 324/654, 324/658, 324/661, 324/663, 324/519, 324/548, 324/662, 324/669, 324/671, 324/684, 324/76.79, 324/76.81, 324/123.R, 324/123.C, 324/750.17, 702/47, 702/52, 345/174, 345/173
• US Class Current: 1/1
• CPC Class Codes: G01N 27/026 Dielectric impedance spectroscopy electrochemical impedance spectroscopy for measuring corrosion G01N17/02
• CPC Class Codes: G01N 27/3278 involving nanosized elements, e.g. nanogaps or nanoparticles nanopores G01N33/48721; magnetic beads G01N27/745
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array
• CPC Class Codes: G01N 33/48792 Data management, e.g. communication with processing unit for in vivo diagnostics A61B5/0002; transmission systems for measured values G08C
• CPC Class Codes: H05K 1/16 incorporating printed electric components, e.g. printed resistor, capacitor, inductor
• CPC Class Codes: H05K 2201/0338 Layered conductor, e.g. layered metal substrate, layered finish layer, layered thin film adhesion layer etched tri-metal structure H05K2201/0361
• CPC Class Codes: H05K 2201/09263 Meander
• CPC Class Codes: H05K 2201/10151 Sensor
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A sensing system includes an inductor-capacitor-resistor (LCR) resonator sensor having a substrate, a plurality of first sensing elements mutually spaced apart and disposed on the substrate, and a sensing material film being disposed on a first sensing region of the corresponding first sensing element.

Claims

1. A sensing system for selective analyte detection in presence of interferences, comprising:

an inductor-capacitor-resistor (LCR) resonator sensor comprising;

a substrate;

a plurality of first sensing elements mutually spaced apart and disposed on the substrate;

a plurality of second sensing elements, each second sensing element disposed overlapping the corresponding first sensing element;

at least one first sensing material film being disposed on a first sensing region of the corresponding first sensing element; and

at least one second sensing material film being disposed on a second sensing region of the corresponding second sensing element,

wherein at least one among the at least one first sensing material film and the at least one second material film swell resulting in modulation of an inductance of the inductor-capacitor-resistor (LCR) resonator sensor when the at least one first sensing material film and the at least one second material film interacts with an analyte.

2. The sensing system of claim 1, wherein the at least one first sensing material film and the at least one second sensing material film comprises a same type of sensing material film.

3. The sensing system of claim 1, wherein the at least one first sensing material film is a different type compared to the at least one second sensing material film.

4. The sensing system of claim 1, further comprising a plurality of dielectric isolators, each dielectric isolator being disposed between the corresponding first and second sensing elements.

5. The sensing system of claim 1, wherein the plurality of first sensing elements and the second sensing elements form a sensing coil structure.

6. The sensing system of claim 5, wherein a first end of each first sensing element is coupled to one end of the corresponding second sensing element, and a second end of each first sensing element is coupled to another end of the corresponding second sensing element.

7. The sensing system of claim 1, wherein the first sensing element is non-galvanically coupled to second sensing element.

8. The sensing system of claim 1, wherein the LCR resonator sensor further comprises a plurality of holes formed in the substrate, for enabling flow of an analyte through the holes, wherein the holes are disposed between the plurality of first sensing elements.

9. The sensing system of claim 8, wherein the LCR resonant sensor is a multivariable LCR resonant sensor;

wherein an electric field distribution between the plurality of first sensing elements is substantially uniform along a plane of the plurality of first sensing elements and the holes.

10. The sensing system of claim 1, wherein the plurality of first sensing elements is disposed on a first surface of the substrate.

11. The sensing system of claim 10, wherein the LCR resonator sensor further comprises a plurality of second sensing elements disposed on a second surface opposite to the first surface of the substrate.

12. The sensing system of claim 11, further comprising a plurality of holes formed in the substrate, wherein the holes are disposed between the plurality of first sensing elements and the plurality of second sensing elements.

13. The sensing system of claim 12, further comprising at least one second sensing material film disposed on a second sensing region of the corresponding second sensing element.

14. The sensing system of claim 1, wherein the LCR resonator sensor comprises a split ring resonator sensor.

15. The sensing system of claim 14, wherein the LCR resonator sensor comprises a serpentine sensing region configured to tune electric field penetration.

16. The sensing system of claim 1, wherein the LCR resonator sensor further comprises a memory chip.

17. The sensing system of claim 1, wherein each sensing material film comprises at least one of a polymer, an organic material, an inorganic material, a biological material, a nanomaterial, a nanocomposite material, and a colloidal crystal material.

18. The sensing system of claim 1, wherein the sensing system is used for measurement of at least one of physical, chemical, and biological properties of analyte.

19. A method for measuring one or more conditions of a sample, the method comprising:

transmitting an electromagnetic signal from an inductor-capacitor-resistor (LCR) resonator sensor;

wherein the LCR resonator sensor comprises a substrate;

a plurality of first sensing elements mutually spaced apart and disposed on the substrate;

a plurality of second sensing elements, each second sensing element disposed overlapping the corresponding first sensing element;

at least one first sensing material film being disposed on a first sensing region of the corresponding first sensing element, and at least one second sensing material film being disposed on a second sensing region of the corresponding second sensing element; and

sensing the LCR resonator sensor signal via a detector,

wherein at least one among the at least one first sensing material film and the at least one second material film swell resulting in modulation of an inductance of the inductor-capacitor-resistor (LCR) resonator sensor when the at least one first sensing material film and the at least one second material film interacts with the sample.

20. The method of claim 19, wherein the step of sensing comprises determining impedance spectrum of the at least one first sensing material film, the at least one second sensing material film and calculating dielectric change based on the impedance spectrum, using multivariate analysis.

21. A method for fabrication of an inductor-capacitor-resistor (LCR) resonator sensor, comprising:

applying a plurality of first sensing elements on a substrate;

applying at least one dielectric layer on the plurality of first sensing elements; and

applying a plurality of second sensing elements on the at least one dielectric layer, each second sensing element being disposed corresponding to position of each first sensing element such that the at least one dielectric layer is disposed between the first and second sensing elements;

wherein shape of the substrate does not change during fabrication;

disposing at least one first sensing material film on a first sensing region of the corresponding first sensing element; and

disposing at least one second sensing material film on a second sensing region of the corresponding second sensing element,

wherein at least one among the at least one first sensing material film and the at least one second material film swell resulting in modulation of an inductance of the inductor-capacitor-resistor (LCR) resonator sensor when the at least one first sensing material film and the at least one second material film interacts with an analyte.

22. The method of claim 21, wherein the at least one dielectric layer has a thickness in a range of one to five thousand nanometers.

23. A method for fabrication of an inductor-capacitor-resistor (LCR) resonator sensor, comprising:

applying a plurality of first sensing elements on a substrate;

applying at least one dielectric layer on the plurality of first sensing elements, and

applying a plurality of second sensing elements on the at least one dielectric layer, each second sensing element being disposed corresponding to position of each first sensing element such that the at least one dielectric layer is disposed between the plurality of first and second sensing elements;

removing a portion of dielectric layer to form a horizontal gap between the plurality of first and second sensing elements;

wherein shape of the substrate does not change during fabrication;

disposing at least one first sensing material film on a first sensing region of the corresponding first sensing element; and

disposing at least one second sensing material film on a second sensing region of the corresponding second sensing element,

wherein at least one among the at least one first sensing material film and the at least one second material film swell resulting in modulation of an inductance of the inductor-capacitor-resistor (LCR) resonator sensor when the at least one first sensing material film and the at least one second material film interacts with an analyte.

24. The method of claim 23, wherein the gap is a sensing region.

25. The method of claim 23, wherein the LCR resonant sensor is a multivariable LCR resonant sensor.

26. The method of claim 25, wherein the at least one dielectric layer has a thickness in a range of one to five thousand nanometers.

27. The method of claim 23, wherein the gap is in the range of one nanometer to thousand nanometers.

28. The method of claim 23, wherein the gap is in the range of one micrometer to thousand micrometers.

29. The method of claim 23, wherein the gap is in the range of one nanometer to thousand micrometers.

30. The method of claim 23, wherein the gap is in the range of one nanometer to thousand nanometers.