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MEMS gyros with quadrature reducing springs

  • US 9,541,394 B2
  • Filed: 08/23/2013
  • Issued: 01/10/2017
  • Est. Priority Date: 10/25/2010
  • Status: Active Grant
First Claim
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1. A spring set for a MEMS device comprising:

  • a) a plurality of springs connecting a first mass to a seconds mass, wherein the first and second masses define orthogonal x, y, and z-axes and are configured for relative oscillation about the z-axis, each spring having a spring element anchored to the first mass at a first anchor point and anchored to the second mass at a second anchor point, wherein the first and second anchor points of each spring element are located on a respective common vector that is oblique with respect to the orthogonal axes defined by the first and second masses, wherein the respective common vector is non-radial with respect to the z-axis.

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