Actuator for motion control in miniature cameras

• US 9,541,815 B2
• Filed: 06/08/2015
• Issued: 01/10/2017
• Est. Priority Date: 11/15/2010
• Status: Expired due to Fees

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): Berhan, Ahmed A
• Application Number:
  US14/733,780
• Publication Number:
  US 20150346508A1
• Time in Patent Office: 582 Days
• US Class Current: 1/1
• CPC Class Codes: B81B 7/0067 for controlling the passage of optical signals through the package
• CPC Class Codes: G02B 27/646 compensating for small deviations, e.g. due to vibration or shake movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68
• CPC Class Codes: G02B 7/04 with mechanism for focusing or varying magnification
• CPC Class Codes: G03B 2205/0007 Movement of one or more optical elements for control of motion blur
• CPC Class Codes: G03B 2205/0084 using other types of actuators
• CPC Class Codes: G03B 3/10 Power-operated focusing
• CPC Class Codes: G03B 5/00 Adjustment of optical system relative to image or object surface other than for focusing
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type
• CPC Class Codes: H04M 1/0264 for a camera module assembly
• CPC Class Codes: H04N 23/685 performed by mechanical compensation
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

A device can comprise an outer frame, a platform, and a motion control mechanism. The motion control mechanism can be adapted to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame. An actuator can be contained at least partially within the motion control mechanism.

Claims

1. An actuator device, comprising:

a platform configured to support an optical element;

a plurality of actuators surrounding and supporting the platform, the plurality of actuators and the platform are arranged along a same plane; and

an outer frame arranged along the same plane and surrounding the plurality of actuators,

wherein each of the plurality of actuators comprises;

a fixed frame;

a movable frame configured to cooperate with the fixed frame to move the platform in a direction perpendicular to the same plane; and

a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame, wherein an electrical voltage is supplied from an electrical contact disposed at the outer frame via one or more of the plurality flexures to actuate the movable frame.

2. The actuator device of claim 1, wherein one or more of the plurality of flexures, through which the electrical voltage is supplied, comprise a serpentine contact flexure disposed between the outer frame and the fixed frame.

3. The actuator device of claim 1 further comprising a damping material extending across a gap between the outer frame and the movable frame and configured to inhibit undesired motion of the movable frame relative to the outer frame due to a shock.

4. The actuator device of claim 3, wherein the damping material permit a rotational movement of the movable frame relative to the outer frame and inhibit a lateral movement of the movable frame relative to the outer frame during the shock.

5. The actuator device of claim 3,

wherein the movable frame is configured to pivot about a pivot axis to selectively pivot in and out of the plane relative to the outer frame, and

wherein the actuator device further comprises a flap damper arranged at the pivot axis and configured to provide damping.

6. The actuator device of claim 5, wherein the flap damper comprises:

a first flap extending from the movable frame;

a second flap extending from the outer frame with the gap formed between the first flap and the second flap.

7. The actuator device of claim 6, wherein the damping material is disposed on the first flap and the second flap across the gap.

8. The actuator device of claim 1, wherein the plurality of flexures comprises at least one torsional flexure configured to provide a lateral stiffness between the movable frame and the outer frame.

9. The actuator device of claim 1, wherein the plurality of flexures comprises at least one hinge flexure configured to provide a rotational stiffness between the movable frame and the outer frame.

10. A method of using the actuator device of claim 1, the method comprising:

supplying the electrical voltage from the electrical contact via the one or more flexures to actuate the movable frame; and

adjusting an amount of the electrical voltage to change a position or a movement of the movable frame.

11. A method, comprising:

forming a platform for supporting an optical element;

forming a plurality of actuators surrounding and supporting the platform, the plurality of actuators and the platform arranged along a same plane; and

forming an outer frame arranged along the same plane and surrounding the plurality of actuators,

wherein each of the plurality of actuators comprises;

a fixed frame;

a movable frame configured to cooperate with the fixed frame to pivot away from the plane to move the platform in a direction perpendicular to the same plane; and

a plurality of flexures configured to cooperate to provide a lateral stiffness and a rotational stiffness between the outer frame and the moveable frame, wherein an electrical voltage is supplied from an electrical contact disposed at the outer frame via one or more of the plurality flexures to actuate the movable frame.

12. The method of claim 11, wherein the outer frame, the movable frame, the platform, and the actuators are formed by a MEMS process.

13. The method of claim 11, further comprising providing a damping material that extends across a gap between the outer frame and the movable frame and configured to inhibit undesired motion of the movable frame relative to the outer frame due to a shock.

14. The method of claim 13,

wherein the movable frame is configured to pivot about a pivot axis to selectively pivot in and out of the plane relative to the outer frame, and

wherein the method further comprising forming a flap damper at the pivot axis and configured to provide damping.

15. The method of claim 14, wherein forming the flap damper further comprises:

forming a first flap extending from the movable frame; and

forming a second flap extending from the outer frame with the gap formed between the first flap and the second flap.

16. The method of claim 15, further comprising disposing the damping material on the first flap and the second flap across the gap.

17. The method of claim 11, further comprising supplying an electrical voltage from the electrical contact to the fixed frame via a serpentine contact flexure disposed between the outer frame and the fixed frame.

18. The method of claim 11, further comprising:

pivoting the movable frame about a pivotal axis to pivot the movable frame relative to the outer frame.

19. The method of claim 11, further comprising forming a torsional flexure to provide a lateral stiffness between the movable frame and the outer frame.

20. The method of claim 11, further comprising forming a hinge flexure to provide a rotational stiffness between the movable frame and the outer frame.