Electrostatic chuck

• US 9,543,184 B2
• Filed: 06/27/2012
• Issued: 01/10/2017
• Est. Priority Date: 01/26/2012
• Status: Active Grant

• Current Assignee: Kyocera Corporation
• Original Assignee: Kyocera Corporation
• Inventors: Ono, Hiroshi
• Primary Examiner(s): Tran, Thienvu
• Assistant Examiner(s): BROOKS, ANGELA D
• Application Number:
  US14/373,976
• Publication Number:
  US 20150049410A1
• Time in Patent Office: 1,658 Days
• US Class Current: 1/1
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H02N 13/00 Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

Abstract

The present invention is an electrostatic chuck including a ceramic base body and an adsorption electrode provided inside of or on the lower surface of the ceramic base body and having a portion where a Mn content is 1×10⁻⁴% by mass or less in a region from the upper surface of the ceramic base body to the adsorption electrode.

Claims

1. An electrostatic chuck, comprising:

a ceramic base body; and

an adsorption electrode provided inside of or on a lower surface of the ceramic base body, wherein

the electrostatic chuck has a portion where a manganese content is 1×

10<sup>−

4</sup>% by mass or less in a region from an upper surface of the ceramic base body to the adsorption electrode.

2. The electrostatic chuck according to claim 1, wherein the adsorption electrode is provided inside of the ceramic base body and the manganese content in the region from the upper surface to the adsorption electrode is 1×

10<sup>−

4</sup>% by mass or less.

3. The electrostatic chuck according to claim 1, wherein the adsorption electrode is provided inside of the ceramic base body and the manganese content in a region from the upper surface to a vicinity of a lower surface of the adsorption electrode is 1 ×

10<sup>−

4</sup>% by mass or less.

4. The electrostatic chuck according to claim 1, wherein the ceramic base body contains polycrystal.

5. The electrostatic chuck according to claim 4, wherein the manganese content in a crystal grain boundary phase in the ceramic base body is 1 ×

10<sup>−

4</sup>% by mass or less.

6. The electrostatic chuck according to claim 1, wherein a plurality of convex portions are formed in the upper surface of the ceramic base body.