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Vertical transistor device structure with cylindrically-shaped regions

  • US 9,543,396 B2
  • Filed: 10/22/2014
  • Issued: 01/10/2017
  • Est. Priority Date: 12/13/2013
  • Status: Active Grant
First Claim
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1. A vertical power transistor device comprising:

  • a semiconductor layer of a first conductivity type;

    a plurality of cylindrically-shaped dielectric regions disposed in the semiconductor layer, each cylindrically-shaped dielectric region having an outer side that extends in a vertical direction from a top surface of the semiconductor layer downward, each cylindrically-shaped dielectric region having a circular cross-section in a horizontal plane perpendicular to the vertical direction, adjacent ones of the cylindrically-shaped dielectric regions being laterally separated along a common diametrical axis by a narrow region of the semiconductor layer having a first width;

    each cylindrically-shaped dielectric region having a cylindrical field plate member centrally disposed therein, the cylindrical field plate member having a circular cross-section in the horizontal plane and comprising a conductive material that fully extends laterally across a diameter of the circular cross-section of the cylindrical field plate member, the conductive material extending in the vertical direction from the top surface downward to near a bottom of the cylindrically-shaped dielectric region, the cylindrically-shaped dielectric region laterally separating the cylindrical field plate member from the narrow region;

    a source region of the first conductivity type disposed at the top surface of the narrow region;

    a body region of a second conductivity type, the body region separating the source from a lower portion of the narrow region, the lower portion comprising a drift region;

    a drain region of the first conductivity type disposed beneath the semiconductor layer; and

    a ring-shaped gate member disposed in each cylindrically-shaped dielectric region between the narrow region and the cylindrical field plate member.

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