Piezoelectric element, piezoelectric vibration module, and methods of manufacturing the same

• US 9,544,694 B2
• Filed: 07/13/2012
• Issued: 01/10/2017
• Est. Priority Date: 04/05/2012
• Status: Active Grant

• Current Assignee: Tokin Corporation (Yageo Corporation)
• Original Assignee: NEC Tokin Corporation (Yageo Corporation)
• Inventors: Abe, Yoshiyuki, Mizuno, Takeshi, Shima, Hiroshi, Ikezawa, Noriaki, Kumasaka, Katsunori, Yamaguchi, Masao
• Primary Examiner(s): MONIKANG, GEORGE C
• Application Number:
  US14/390,997
• Publication Number:
  US 20150163598A1
• Time in Patent Office: 1,642 Days
• Field of Search: 381/114, 381/111, 381/162, 381/190
• US Class Current: 1/1
• CPC Class Codes: H04R 17/00 Piezoelectric transducers; Electrostrictive transducers piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners H10N30/00
• CPC Class Codes: H04R 31/006 Interconnection of transducer parts of diaphragm and outer suspension by moulding H04R31/003
• CPC Class Codes: H10N 30/03 Assembling devices that include piezoelectric or electrostrictive parts
• CPC Class Codes: H10N 30/05 Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
• CPC Class Codes: H10N 30/204 using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
• CPC Class Codes: H10N 30/2041 Beam type
• CPC Class Codes: H10N 30/2047 Membrane type
• CPC Class Codes: H10N 30/50 having a stacked or multilayer structure
• CPC Class Codes: H10N 30/875 Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
• CPC Class Codes: H10N 30/88 Mounts; Supports; Enclosures; Casings
• CPC Class Codes: Y10T 29/42 Piezoelectric device making
• CPC Class Codes: Y10T 29/4913 Assembling to base an electrical component, e.g., capacitor, etc.

Abstract

A piezoelectric vibration module includes a piezoelectric element, a wiring member connected to the piezoelectric element and drawn out to the outside, and an elastic plate bonded to one surface of the piezoelectric element, wherein the elastic plate is made of a silicone rubber.

Claims

1. A piezoelectric vibration module comprising a piezoelectric element, a wiring member connected to the piezoelectric element and drawn out to the outside, and an elastic plate attached to one surface of the piezoelectric element,

wherein the elastic plate is made of a silicone rubber,

wherein the piezoelectric element comprises a laminate in which piezoelectric body layers and electrode layers are alternately laminated, and a first and a second side electrode provided on both end faces or both side surfaces in a second direction crossing a first direction being a lamination direction of the laminate,

wherein each electrode layer comprises a first electrode portion and a second electrode portion electrically separated from the first electrode portion,

wherein the first side electrode comprises a first external electrode and a second external electrode which are disposed side by side in a third direction crossing the first and second directions,

wherein the first electrode portion of each electrode layer is connected to the first external electrode, and

wherein one end, in the second direction, of the second electrode portion of each electrode layer is connected to the second external electrode.

2. The piezoelectric vibration module according to claim 1, further comprising a housing member provided so as to cover, jointly with the elastic plate, the piezoelectric element and a connecting portion, with the piezoelectric element, of the wiring member, wherein the housing member is made of the same silicone rubber as the elastic plate.

3. The piezoelectric vibration module according to claim 1, having an electrode lead-out portion on the other surface, facing the one surface, of the piezoelectric element, wherein the wiring member is a flexible wiring board conductively connected to the electrode lead-out portion.

4. The piezoelectric vibration module according to claim 1, wherein the silicone rubber has a hardness of 30 to 130.

5. The piezoelectric vibration module according to claim 1, wherein the elastic plate and the piezoelectric element are bonded to each other through a cold-setting silicone adhesive.

6. The piezoelectric vibration module according to claim 1,

wherein the other end, in the second direction, of the second electrode portion of each of the electrode layers at both ends in the first direction is connected to the second side electrode, and

wherein the electrode layers and the first and second side electrodes are electrically connected so that a driving voltage can be applied between the first electrode portions and the second electrode portions using the second electrode portions of the electrode layers at both ends in the first direction as driving external electrodes and the first electrode portions of the intermediate electrode layers between both ends in the first direction as driving internal electrodes.

7. The piezoelectric vibration module according to claim 6, wherein the piezoelectric body layers at both ends in the first direction of the laminate are polarized in a direction along the lamination direction by application of a polarization voltage.

8. The piezoelectric vibration module according to claim 7, having a structure in which the piezoelectric body layers expand and contract along the second direction when the driving voltage is applied between the first electrode portions and the second electrode portions.

9. An electroacoustic transducer wherein the elastic plate of the piezoelectric vibration module according to claim 1 is bonded to a diaphragm.

10. A piezoelectric element comprising a laminate in which piezoelectric body layers and electrode layers are alternately laminated, and a first and a second side electrode provided on both end faces or both side surfaces in a second direction crossing a first direction being a lamination direction of the laminate,

wherein each electrode layer comprises a first electrode portion and a second electrode portion electrically separated from the first electrode portion,

wherein the first side electrode comprises a first external electrode and a second external electrode which are disposed side by side in a third direction crossing the first and second directions,

wherein the first electrode portion of each electrode layer is connected to the first external electrode,

wherein one end, in the second direction, of the second electrode portion of each electrode layer is connected to the second external electrode,

wherein the other end, in the second direction, of the second electrode portion of each of the electrode layers at both ends in the first direction is connected to the second side electrode, and

wherein the electrode layers and the first and second side electrodes are electrically connected so that a driving voltage can be applied between the first electrode portions and the second electrode portions using the second electrode portions of the electrode layers at both ends in the first direction as driving external electrodes and the first electrode portions of the intermediate electrode layers between both ends in the first direction as driving internal electrodes.

11. The piezoelectric element according to claim 10, wherein the piezoelectric body layers at both ends in the first direction of the laminate are polarized in a direction along the lamination direction by application of a polarization voltage.

12. The piezoelectric element according to claim 11, having a structure in which the piezoelectric body layers expand and contract along the second direction when the driving voltage is applied between the first electrode portions and the second electrode portions.

13. A method of manufacturing a piezoelectric element, comprising:

a step of preparing a first piezoelectric body having three mutually insulated electrodes;

a step of preparing a second piezoelectric body having two mutually insulated electrodes;

a step of preparing at least one third piezoelectric body having three mutually insulated electrodes;

a step of forming a laminate in which

the third piezoelectric body is laminated between the first and second piezoelectric bodies, and

the three electrodes of the first piezoelectric body and the three electrodes of the third piezoelectric body are electrically connected to each other and two of the three electrodes of each of the first and third piezoelectric bodies and the two electrodes of the second piezoelectric body are electrically connected to each other;

a step of polarizing the first and second piezoelectric bodies using the three electrodes of the first piezoelectric body;

a step of electrically connecting one and another one of the three electrodes of the first piezoelectric body to each other and forming two mutually electrically insulated element electrodes; and

a step of connecting a terminal having conductor patterns which are electrically connected to the two element electrodes of the first piezoelectric body.

14. A method of manufacturing a piezoelectric vibration module, comprising connecting a flexible wiring board to the element electrodes of the piezoelectric element manufactured by the method of manufacturing a piezoelectric element according to claim 13 and attaching a vibration plate to a surface other than a surface where the element electrodes are formed.

15. A method of manufacturing an electroacoustic transducer, comprising, in addition to the method of manufacturing a piezoelectric vibration module according to claim 14, covering the piezoelectric element including a connecting portion of the flexible wiring board with a housing member.

16. A piezoelectric vibration module comprising:

a piezoelectric element,

a wiring member connected to the piezoelectric element and drawn out to the outside,

an elastic plate attached to one surface of the piezoelectric element,

a housing member provided so as to cover the piezoelectric element and a connecting portion, with the piezoelectric element, of the wiring member, and

a sound pressure adjusting means,

wherein the sound pressure adjusting means comprises a protruding portion provided so as to protrude from a surface of the housing member and wherein the protruding portion is provided at a portion corresponding to a node of resonance, excited by the piezoelectric vibration module, of a mounting member to which the piezoelectric vibration module is mounted.

17. The piezoelectric vibration module according to claim 16, having an electrode lead-out portion provided on the other surface, facing the one surface to which the elastic plate is attached, of the piezoelectric element, wherein the wiring member is one of a flexible wiring board and an elastic conductive member conductively connected to the electrode lead-out portion.

18. The piezoelectric vibration module according to claim 16, wherein the wiring member is the flexible wiring board and wherein the flexible wiring board passes through the housing member in a direction along the one surface or the other surface of the piezoelectric element from the electrode lead-out portion and is drawn out in a longitudinal direction of the piezoelectric element.

19. The piezoelectric vibration module according to claim 17, wherein the wiring member is the conductive member and wherein the conductive member passes through the housing member and protrudes in a direction crossing the other surface of the piezoelectric element from the electrode lead-out portion.

20. The piezoelectric vibration module according to claim 16, wherein the sound pressure adjusting means comprises a compositing member integrally provided with the housing member in parallel to the piezoelectric element and wherein the compositing member causes vibration of the piezoelectric element itself and vibration, excited by the piezoelectric vibration module, of a mounting member to be canceled each other.

21. The piezoelectric vibration module according to claim 17, comprising a laminate in which a plurality of piezoelectric element portions forming the piezoelectric element are laminated in a first direction, wherein the piezoelectric element portions have piezoelectric body layers, surface electrode layers formed on the piezoelectric body layers in a second direction crossing the first direction, and first and second lead-out electrodes formed at ends in the second direction of the piezoelectric body layers and connected to the surface electrode layers, wherein the first and second lead-out electrodes are drawn out from the surface electrode layers to the ends of the piezoelectric body layers corresponding to lamination positions of the laminate.

22. The piezoelectric vibration module according to claim 19, wherein the laminate comprises a bottom piezoelectric element portion located at a bottom portion and a uppermost piezoelectric element portion located at an uppermost portion and wherein a polarization direction of the uppermost piezoelectric element portion differs from a polarization direction of the other piezoelectric element portions including the bottom piezoelectric element portion.

23. The piezoelectric vibration module according to claim 22, wherein a piezoelectric body layer of the uppermost piezoelectric element portion and piezoelectric body layers, excluding a piezoelectric body layer of the bottom piezoelectric element portion, other than the uppermost piezoelectric element portion have electrode structures that excite expansion-contraction vibrations opposite to each other.

24. The piezoelectric vibration module according to claim 20, wherein the sound pressure adjusting means forms a piezoelectric bimorph structure that performs bending vibration determined by the lamination number of the piezoelectric element portions, polarization directions of the piezoelectric element portions, and a driving voltage application direction of the piezoelectric element portions.

25. The piezoelectric vibration module according to claim 20, wherein the number of the piezoelectric body layers is 2n (n is an integer of 1 or more).

26. An electroacoustic transducer comprising the piezoelectric vibration module according to claim 19, a drive circuit board, and a housing, wherein the housing holds the conductive member in pressure contact with the drive circuit board through the piezoelectric vibration module.

27. A mounting method of placing the piezoelectric vibration module according to claim 19 in a housing and mounting it, wherein the wiring member is the conductive member passing through the housing member and protruding to the outside and wherein the housing causes a protruding end of the conductive member of the piezoelectric vibration module to be in pressure contact with a drive circuit board.

28. A piezoelectric element comprising a laminate in which a plurality of piezoelectric element portions are laminated in a first direction, wherein the piezoelectric element portions have piezoelectric body layers, surface electrode layers formed on the piezoelectric body layers in a second direction crossing the first direction, and first and second lead-out electrodes formed at ends in the second direction of the piezoelectric body layers and connected to the surface electrode layers, wherein the first and second lead-out electrodes are drawn out from the surface electrode layers to the ends of the piezoelectric body layers corresponding to lamination positions of the piezoelectric element portions in the laminate.

29. The piezoelectric element according to claim 28, wherein the laminate comprises the bottom piezoelectric element portion located at a bottom portion and the uppermost piezoelectric element portion located at an uppermost portion and wherein a polarization direction of the uppermost piezoelectric element portion differs from a polarization direction of the other piezoelectric element portions including the bottom piezoelectric element portion.

30. The piezoelectric element according to claim 29, wherein a piezoelectric body layer of the uppermost piezoelectric element portion and piezoelectric body layers, excluding a piezoelectric body layer of the bottom piezoelectric element portion, other than the uppermost piezoelectric element portion have electrode structures that excite expansion-contraction vibrations opposite to each other.

31. The piezoelectric element according to claim 28, further comprising a sound pressure adjusting means, wherein the sound pressure adjusting means forms a piezoelectric bimorph structure that performs bending vibration determined by the lamination number of the piezoelectric element portions, polarization directions of the piezoelectric element portions, and a driving voltage application direction of the piezoelectric element portions.

32. The piezoelectric element according to claim 28, wherein the number of the piezoelectric body layers is 2n (n is an integer of 1 or more).

33. A method of manufacturing a piezoelectric element, comprising:

a step of preparing a plurality of piezoelectric element portions having piezoelectric body layers, surface electrode layers, and mutually different end electrode layers formed at ends; and

a step of forming a laminate by laminating the plurality of piezoelectric element portions in a first direction in order,

wherein, in the step of forming a laminate, the end electrode layers of the piezoelectric element portions are laminated so as to be drawn out to the end sides corresponding to lamination positions of the piezoelectric element portions in the laminate.

34. The method of manufacturing a piezoelectric element according to claim 33, wherein the laminate comprises the bottom piezoelectric element portion located at a bottom portion and the uppermost piezoelectric element portion located at an uppermost portion and wherein the method further comprises a step of performing polarization so that a polarization direction of the uppermost piezoelectric element portion differs from a polarization direction of the other piezoelectric element portions including the bottom piezoelectric element portion.

35. The method of manufacturing a piezoelectric element according to claim 34, wherein a piezoelectric body layer of the uppermost piezoelectric element portion and piezoelectric body layers, excluding a piezoelectric body layer of the bottom piezoelectric element portion, other than the uppermost piezoelectric element portion have electrode structures that excite expansion-contraction vibrations opposite to each other.

36. The method of manufacturing a piezoelectric element according to claim 33, further comprising a step of forming a sound pressure adjusting means, wherein the step of forming a sound pressure adjusting means forms a piezoelectric bimorph structure that performs bending vibration determined by the lamination number of the piezoelectric element portions, polarization directions of the piezoelectric element portions, and a driving voltage application direction of the piezoelectric element portions.

37. The method of manufacturing a piezoelectric element according to claim 33, comprising laminating 2n (n is an integer of 1 or more) piezoelectric body layers.

38. A method of manufacturing a piezoelectric vibration module, comprising:

in addition to the method of manufacturing a piezoelectric element according to claim 33,

a step of connecting a wiring member, for leading out to the outside, to the piezoelectric element;

a step of attaching an elastic plate to one surface of the piezoelectric element; and

a step of providing a housing member covering the piezoelectric element and a connecting portion, with the piezoelectric element, of the wiring member.

39. The method of manufacturing a piezoelectric vibration module according to claim 38, wherein the wiring member is a flexible wiring board or an elastic conductive member conductively connected to an electrode lead-out portion.

40. The method of manufacturing a piezoelectric vibration module according to claim 39, wherein the wiring member is the flexible wiring board and wherein the method comprises forming the flexible wiring board so that it passes through the housing member in a direction along the one surface or the other surface of the piezoelectric element from the electrode lead-out portion and is drawn out in a longitudinal direction of the piezoelectric element.

41. The method of manufacturing a piezoelectric vibration module according to claim 39, wherein the wiring member is the conductive member and wherein the method comprises forming the conductive member so that it passes through the housing member and protrudes in a direction crossing the other surface of the piezoelectric element from the electrode lead-out portion.

42. The method of manufacturing a piezoelectric vibration module according to claim 38, further comprising a step of forming a sound pressure adjusting means, wherein the step of forming a sound pressure adjusting means comprises forming a protruding portion protruding from a surface of the housing member.

43. The method of manufacturing a piezoelectric vibration module according to claim 38, further comprising a step of forming a sound pressure adjusting means, wherein the step of forming a sound pressure adjusting means comprises forming a compositing member integrally with the housing member in parallel to the piezoelectric element.