Metrology target indentification, design and verification

• US 9,546,946 B2
• Filed: 03/28/2014
• Issued: 01/17/2017
• Est. Priority Date: 03/28/2013
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: KLA-Tencor Corporation
• Inventors: Golovanevsky, Boris, Sapiens, Noam
• Primary Examiner(s): KIM, PAUL
• Application Number:
  US14/361,610
• Publication Number:
  US 20150233814A1
• Time in Patent Office: 1,026 Days
• Field of Search: 381/71.2, 356/244
• US Class Current: 1/1
• CPC Class Codes: F16F 15/02 Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems F16F15/005 takes precedence ; layered products B32B; suppression of vibration in ships B63; relieving load on bearings, using magnetic means F16C39/06
• CPC Class Codes: F16F 15/023 using fluid means
• CPC Class Codes: F16F 15/04 using elastic means single elements or their attachment F16F1/00 - F16F13/00; F16F15/023, F16F15/03 take precedence
• CPC Class Codes: F16F 7/01 using friction between loose particles, e.g. sand
• CPC Class Codes: F16F 9/306 of the constrained layer type, i.e. comprising one or more constrained viscoelastic layers
• CPC Class Codes: G01N 21/01 Arrangements or apparatus for facilitating the optical investigation
• CPC Class Codes: G01N 21/9501 Semiconductor wafers manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 2201/025 Mechanical control of operations
• CPC Class Codes: G10K 11/1785 Methods, e.g. algorithms; Devices G10K11/1781, G10K11/1783 take precedence
• CPC Class Codes: G10K 11/17873 using a reference signal without an error signal, e.g. pure feedforward
• CPC Class Codes: G10K 2210/10 Applications
• CPC Class Codes: G10K 2210/129 Vibration, e.g. instead of, or in addition to, acoustic noise

Abstract

Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.

Claims

1. A metrology tool comprising:

at least one active vibration isolation device; and

,

at least one passive vibration isolation device, wherein at least one of the at least one active vibration isolation devices or at least one passive vibration isolation devices, is selected from a group consisting of;

A) a constrained layer damper and at least one particle or liquid impact damper within a supporting structure of the metrology tool;

B) at least one noise cancellation transducer arranged to reduce mechanical frequencies by cancelling noise;

C) at least one noise cancellation transducer arranged to detect a vibration wave and generate an opposite wave having reversed polarity;

D) at least one acoustic skin with at least one noise cancellation transducer configured to isolate the tool from acoustic vibrations in an environment of the tool;

E) at least one acoustic transducer applied to at least one of a tool base table and optics'"'"' supporting structures; and

,

F) combinations thereof.

2. The metrology tool of claim 1, further comprising:

viscoelastic layers embedded into structural materials of the metrology tool or into a supporting structure of the metrology tool.

3. The metrology tool of claim 1, further comprising:

at least one particle or liquid impact damper in the metrology tool arranged to transmit vibratory energy into granular material or liquid of the damper for dissipation.

4. The metrology tool of claim 1, wherein the passive vibration isolation device isolates frequencies within a frequency range of 0.5 Hz to 150 Hz associated with a pedestal of the tool.

5. The metrology tool of claim 1, further comprising:

at least one viscoelastic layer arranged to dampen vibrations within a frequency range of 50 Hz to 1 kHz and embedded in at least one of a tool bench and an optics supporting structure of the tool.

6. The metrology tool of claim 1, further comprising:

at least one impact damper arranged to dampen vibrations within a frequency range of 1 kHz to 10 kHz and embedded within at least one of tool bench supports and a tool base table of the tool.

7. The metrology tool of claim 1, further comprising:

an active isolation system configured to isolate vibration frequencies with a range of 2 Hz to 150 Hz.

8. The metrology tool of claim 1, further comprising:

an active chuck leveler having sensor controlled actuators configured to maintain horizontal wafer position and minimize stage settling waiting time.

9. A method comprising:

combining at least one active vibration isolation device and at least one passive vibration isolation device into a metrology tool, and,

performing at least one step selected from a group consisting of;

A) introducing constrained layer dampers and at least one particle or liquid impact damper into a supporting structure of the metrology tool;

B) reducing mechanical frequencies by cancelling noise using at least one noise cancellation transducer;

C) cancelling noise by detecting a vibration wave and generating an opposite wave having reversed polarity;

D) combining at least one acoustic skin with at least one noise cancellation transducer configured to isolate the tool from acoustic vibrations in an environment of the tool;

E) applying acoustic transducers to at least one of a tool base table and optics'"'"' supporting structures; and

,

F) combinations thereof.

10. The method of claim 9, further comprising:

embedding viscoelastic layers into structural materials of the metrology tool or into a supporting structure of the metrology tool.

11. The method of claim 9, further comprising:

transmitting vibratory energy using at least one particle or liquid impact damper in the metrology tool into granular material or liquid of the damper for dissipation.

12. The method of claim 9, further comprising:

associating passive vibration isolation within a frequency range of 0.5 Hz to 150 Hz using a pedestal of the tool.

13. The method of claim 9, further comprising:

embedding at least one viscoelastic layer arranged to dampen vibrations within a frequency range of 50 Hz to 1 kHz in at least one of a tool bench and an optics supporting structure of the tool.

14. The method of claim 9, further comprising:

embedding at least one impact damper arranged to dampen vibrations within a frequency range of 1 kHz to 10 kHz within at least one of tool bench supports and a tool base table of the tool.

15. The method of claim 9, further comprising:

providing an active isolation system configured to handle vibration frequencies with a range of 2 Hz to 150 Hz.

16. The method of claim 9, further comprising:

providing an active chuck leveler having sensor controlled actuators configured to maintain horizontal wafer position and minimize stage settling waiting time.