MEMS-based rotation sensor for seismic applications and sensor units having same
First Claim
1. A sensor unit for land-based seismic data acquisition, comprising:
- a particle motion sensor for measuring a vertical wavefield, the vertical wavefield having a horizontal gradient;
a first MEMS-based rotational accelerometer for measuring an x-component of the horizontal gradient;
a second MEMS-based rotational accelerometer positioned orthogonally to the first MEMS-based rotational accelerometer, the second MEMS-based rotational accelerometer for measuring a y-component of the horizontal gradient;
wherein at least one of the first and second MEMS-based rotational accelerometers comprises;
a substrate;
an anchor disposed on the substrate;
a proof mass coupled to the anchor via a plurality of flexural springs, the proof mass having a first electrode coupled to and extending from the proof mass;
a second electrode fixed to the substrate, one of the first and second electrodes being configured to receive an actuation signal, and another of the first and second electrodes being configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode; and
closed loop circuitry configured to receive the electrical signal and provide the actuation signal.
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Accused Products
Abstract
The present disclosure is directed to a MEMS-based rotation sensor for use in seismic data acquisition and sensor units having same. The MEMS-based rotation sensor includes a substrate, an anchor disposed on the substrate and a proof mass coupled to the anchor via a plurality of flexural springs. The proof mass has a first electrode coupled to and extending therefrom. A second electrode is fixed to the substrate, and one of the first and second electrodes is configured to receive an actuation signal, and another of the first and second electrodes is configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode. The MEMS-based rotation sensor further includes closed loop circuitry configured to receive the electrical signal and provide the actuation signal. Related methods for using the MEMS-based rotation sensor in seismic data acquisition are also described.
16 Citations
14 Claims
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1. A sensor unit for land-based seismic data acquisition, comprising:
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a particle motion sensor for measuring a vertical wavefield, the vertical wavefield having a horizontal gradient; a first MEMS-based rotational accelerometer for measuring an x-component of the horizontal gradient; a second MEMS-based rotational accelerometer positioned orthogonally to the first MEMS-based rotational accelerometer, the second MEMS-based rotational accelerometer for measuring a y-component of the horizontal gradient; wherein at least one of the first and second MEMS-based rotational accelerometers comprises; a substrate; an anchor disposed on the substrate; a proof mass coupled to the anchor via a plurality of flexural springs, the proof mass having a first electrode coupled to and extending from the proof mass; a second electrode fixed to the substrate, one of the first and second electrodes being configured to receive an actuation signal, and another of the first and second electrodes being configured to generate an electrical signal having an amplitude corresponding with a degree of angular movement of the first electrode relative to the second electrode; and closed loop circuitry configured to receive the electrical signal and provide the actuation signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification