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Isolation rings for packages and the method of forming the same

  • US 9,548,245 B2
  • Filed: 05/29/2015
  • Issued: 01/17/2017
  • Est. Priority Date: 05/31/2012
  • Status: Active Grant
First Claim
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1. A method comprising:

  • bonding a first package component with a second package component;

    encapsulating the second package component in a molding material;

    forming a trench in the first package component, with the molding material exposed to the trench, wherein the forming the trench comprises;

    performing a first grooving to form a wide portion of the trench, wherein the wide portion extends from a surface of the first package component into the molding material; and

    performing a second grooving to form a first narrow portion extending from a bottom of the wide portion into the molding material, wherein the first narrow portion is narrower than the wide portion;

    filling an isolation material into the trench to form an isolation region; and

    sawing through the isolation region and the molding material to form a package.

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