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Gas shower structure and substrate processing apparatus

  • US 9,550,194 B2
  • Filed: 02/03/2011
  • Issued: 01/24/2017
  • Est. Priority Date: 02/04/2010
  • Status: Active Grant
First Claim
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1. A gas shower structure that is provided to face a substrate within a processing chamber and supplies a processing gas to the substrate as in a shower device, the structure comprising:

  • a plate-shaped member disposed so as to be exposed to a processing atmosphere and having a plurality of gas discharge holes;

    a base member stacked on and press-connected to the plate-shaped member and having gas discharge holes at positions corresponding to positions of the gas discharge holes of the plate-shaped member;

    a joining member for press-connecting the plate-shaped member sandwiched between the joining member and the base member to the base member; and

    a press-connecting elastic member interposed between the joining member and a lowest bottom surface of the plate-shaped member, and deformed to have an elastic restoring force when the joining member approaches the plate-shaped member,wherein the plate-shaped member is press-connected to the base member by the elastic restoring force of the press-connecting elastic member,the elastic restoring force of the press-connecting elastic member is applied to the lowest bottom surface of the plate-shaped member,a gap is formed between the joining member and the lowest bottom surface of the plate-shaped member,the joining member includes a flat portion and a shaft which is protruded from a center of the flat portion,the shaft has a diameter smaller than that of the flat portion,a ring-shaped groove is formed on a surface of the flat portion on a side of the shaft, andthe press-connecting elastic member is provided within the ring-shaped groove, andwherein the flat portion is covered by a cover made of a material capable of protecting the joining member from being damaged by the processing atmosphere,an outer side surface of the flat portion is inclined so that an upper portion of the outer side surface is protruded outwards, and an inner side surface of the cover is inclined so that an upper portion of the inner side surface is protruded inwards, such that the outer side surface of the flat portion and the inner side surface of the cover are inclined when viewed along an axis direction of the shaft of the joining member,a topmost surface of the flat portion and a topmost surface of the cover are in a co-planar relationship, anda cover elastic member for absorbing a thermal expansion difference between the joining member and the cover is interposed between the outer side surface of the flat portion and the inner side surface of the cover with the cover elastic member being in contact with the outer side surface of the flat portion that is inclined and the inner side surface of the cover that is inclined, and is entirely nested below the topmost surfaces of the flat portion and the cover.

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