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Method for manufacturing touch screen panels using a dry etching apparatus

  • US 9,552,122 B2
  • Filed: 07/07/2015
  • Issued: 01/24/2017
  • Est. Priority Date: 03/16/2010
  • Status: Active Grant
First Claim
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1. A method for manufacturing touch screen panels using a dry etching apparatus, the method comprising:

  • forming patterns on a mother substrate for manufacturing a plurality of touch screen panels, the patterns including sensing cells and interconnections;

    depositing SiO2 on the mother substrate having the patterns formed thereon;

    loading the mother substrate having the SiO2 deposited thereon into a dry etching apparatus; and

    performing a dry etching process in which SiO2 deposited in the depositing of the SiO2 is removed using the dry etching apparatus, the dry etching apparatus having a shadow mask in which exposure windows are formed respectively corresponding to exposure portions of touch screen panels on the mother substrate, wherein the shadow mask is between one of a pair of electrodes and a surface to support the mother substrate and is spaced from the support surface by a distance greater than a thickness of the mother substrate so as not to contact either of the mother substrate or the support surface, the pair of electrodes to generate an electric field during the dry etching process; and

    performing a scribing process with respect to the mother substrate after the dry etching process, the scribing process dividing the mother substrate into individual touch screen panels.

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