Appendage mountable electronic devices conformable to surfaces

• US 9,554,484 B2
• Filed: 03/29/2013
• Issued: 01/24/2017
• Est. Priority Date: 03/30/2012
• Status: Active Grant

• Current Assignee: Board of Trustees of The University of Illinois
• Original Assignee: Board of Trustees of The University of Illinois
• Inventors: Ying, Ming, Bonifas, Andrew, Lu, Nanshu, Rogers, John A
• Primary Examiner(s): Aychillhum, Andargie M
• Application Number:
  US13/853,770
• Publication Number:
  US 20130333094A1
• Time in Patent Office: 1,397 Days
• Field of Search: 361/749, 361/748, 361/679.01
• US Class Current: 1/1
• CPC Class Codes: A41D 19/015 Protective gloves A41D19/0055 takes precedence
• CPC Class Codes: A61B 2034/741 Glove like input devices, e.g. "data gloves"
• CPC Class Codes: A61B 2505/05 Surgical care
• CPC Class Codes: A61B 2562/0233 Special features of optical sensors or probes classified in A61B5/00
• CPC Class Codes: A61B 2562/0247 Pressure sensors
• CPC Class Codes: A61B 2562/0261 Strain gauges
• CPC Class Codes: A61B 2562/0271 Thermal or temperature sensors
• CPC Class Codes: A61B 2562/028 Microscale sensors, e.g. electromechanical sensors [MEMS]
• CPC Class Codes: A61B 2562/0285 Nanoscale sensors
• CPC Class Codes: A61B 2562/029 Humidity sensors
• CPC Class Codes: A61B 2562/046 in a matrix array
• CPC Class Codes: A61B 2562/12 Manufacturing methods specially adapted for producing sensors for in-vivo measurements
• CPC Class Codes: A61B 2562/164 the sensor is mounted in or on a conformable substrate or carrier
• CPC Class Codes: A61B 2562/227 Sensors with electrical connectors
• CPC Class Codes: A61B 34/35 for telesurgery
• CPC Class Codes: A61B 34/76 Manipulators having means for providing feel, e.g. force or tactile feedback
• CPC Class Codes: A61B 42/10 Surgical gloves
• CPC Class Codes: A61B 5/01 Measuring temperature of body parts ; Diagnostic temperature sensing, e.g. for malignant or inflamed tissue clinical contact thermometers G01K13/20
• CPC Class Codes: A61B 5/1125 Grasping motions of hands
• CPC Class Codes: A61B 5/483 by thermal stimulation
• CPC Class Codes: A61B 5/4875 : Hydration status, fluid retention of the body
• CPC Class Codes: A61B 5/6806 : Gloves
• CPC Class Codes: A61B 5/6826 : Finger
• CPC Class Codes: A61B 5/6843 : Monitoring or controlling sensor contact pressure
• CPC Class Codes: A61B 5/7455 : characterised by tactile indication, e.g. vibration or electrical stimulation
• CPC Class Codes: A61N 1/0456 : Specially adapted for transcutaneous electrical nerve stimulation [TENS]
• CPC Class Codes: A61N 1/0476 : Array electrodes (including any electrode arrangement with more than one electrode for at least one of the polarities)
• CPC Class Codes: H01L 2224/95 : at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
• CPC Class Codes: H01L 2224/95001 : involving a temporary auxiliary member not forming part of the bonding apparatus, e.g. removable or sacrificial coating, film or substrate
• CPC Class Codes: H01L 23/5388 : for flat cards, e.g. credit cards cards per se G06K19/00
• CPC Class Codes: H01L 2924/00 : Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 : Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H05K 1/0283 : Stretchable printed circuits
• CPC Class Codes: H05K 1/11 : Printed elements for providing electric connections to or between printed circuits
• CPC Class Codes: H05K 1/162 : incorporating printed capacitors
• CPC Class Codes: H05K 1/189 : characterised by the use of a flexible or folded printed circuit H05K3/326 takes precedence
• CPC Class Codes: H05K 2201/0133 : Elastomeric or compliant polymer
• CPC Class Codes: H05K 2201/055 : Folded back on itself
• CPC Class Codes: H05K 2201/10098 : Components for radio transmission, e.g. radio frequency identification [RFID] tag, printed or non-printed antennas
• CPC Class Codes: H05K 2201/10151 : Sensor
• CPC Class Codes: H05K 3/0014 : Shaping of the substrate, e.g. by moulding
• CPC Class Codes: H05K 3/303 : Surface mounted components, e.g. affixing before soldering, aligning means, spacing means H05K3/32 takes precedence
• CPC Class Codes: H05K 7/02 : Arrangements of circuit components or wiring on supporting structure
• CPC Class Codes: Y10T 29/49124 : On flat or curved insulated base, e.g., printed circuit, etc.

Abstract

Disclosed are appendage mountable electronic systems and related methods for covering and conforming to an appendage surface. A flexible or stretchable substrate has an inner surface for receiving an appendage, including an appendage having a curved surface, and an opposed outer surface that is accessible to external surfaces. A stretchable or flexible electronic device is supported by the substrate inner and/or outer surface, depending on the application of interest. The electronic device in combination with the substrate provides a net bending stiffness to facilitate conformal contact between the inner surface and a surface of the appendage provided within the enclosure. In an aspect, the system is capable of surface flipping without adversely impacting electronic device functionality, such as electronic devices comprising arrays of sensors, actuators, or both sensors and actuators.

Claims

1. An appendage mountable electronic system, said system comprising:

a flexible or stretchable substrate having an inner surface and an outer surface, wherein the inner surface defines an enclosure capable of receiving an appendage having a curved surface; and

a flexible or stretchable electronic device comprising one or more sensors, actuators or both supported by the inner surface or the outer surface of said flexible or stretchable substrate;

said sensors, actuators or both comprising one or more inorganic semiconductor components, one or more metallic components, or one or more inorganic semiconductor components and one or more metallic components;

wherein at least a portion of said inorganic semiconductor components, metallic components or both has a thickness less than or equal to 500 microns;

wherein said flexible or stretchable substrate and said electronic device provide a net bending stiffness of the system low enough such that the inner surface of the substrate is capable of establishing conformal contact with a surface of said appendage provided within said enclosure.

4. The system of claim 1 comprising a human-machine interface system, a device for robotic manipulation, or an instrumented glove that is a medical glove for surgery.

5. The system of claim 1, wherein the substrate is a flexible substrate and the electronic device is a flexible electronic device or the substrate is a stretchable substrate and the electronic device is a stretchable electronic device.

6. The system of claim 1, wherein said electronic device comprises 2 to 1000 of said one or more sensors, actuators or both, or at least 3 different types of said one or more sensors, actuators or both.

7. The system of claim 1, wherein said one or more sensors, actuators or both are provided in an open mesh geometry.

8. The system of claim 1, wherein said one or more sensors, actuators or both have a footprint surface area selected from the range of 0.5 cm² to 100 cm².

9. The system of claim 1, wherein said electronic device comprises one or more sensors selected from the group consisting of an electrode, a tactile sensor, a strain gauge, a capacitance sensor, a temperature sensor, a pressure sensor, a motion sensor, a position sensor, a displacement sensor, an acceleration sensor, a force sensor, a chemical sensor, a pH sensor, a capacitive sensor, an optical sensor, a photodetector, an imaging system and any arrays and combinations thereof;

or one or more actuators selected from the group consisting of an electrotactile stimulator, an electrode, a heat source, a piezoelectric element, an acoustic element, a source of RF energy, a magnetic actuator, a source of electromagnetic radiation, a laser, a light emitting diode and arrays and any arrays and combinations thereof.

10. The system of claim 1, wherein at least a portion of said sensors, actuators or both are supported by said inner surface of said flexible or stretchable substrate and at least a portion of said sensors, actuators or both are supported by said outer surface of said flexible or stretchable substrate.

11. The system of claim 1, wherein said flexible or stretchable electronic device comprises a plurality of said electro-tactile stimulators provided in an array and supported by said inner surface, outer surface, or both inner and outer surfaces of said substrate for electrically stimulating said appendage in the enclosure.

12. The system of claim 11, wherein said flexible or stretchable electronic device comprises a multiplexed array of said electro-tactile stimulators, wherein said electro-tactile stimulators of said array are electrically interconnected via a network of serpentine electrical interconnects.

13. The system of claim 11, wherein each of said electro-tactile stimulators comprise a thin film metal structure having an inner region surrounded by an outer region, wherein a gap is provided between said inner region and said outer region, wherein said inner region has lateral dimensions selected from the range of 10 μ

m to 1000 μ

m, said outer ring has lateral dimensions selected from the range of 10 μ

m to 5000 μ

m, and said gap has lateral dimensions selected from the range of 10 μ

m to 1000 μ

m.

14. The system of claim 13, wherein each of said inner region is a conductive disk-shaped electrode and said outer region is a conductive ring-shaped electrode positioned concentric with said disk-shaped electrode.

15. The system of claim 11, wherein each of said electro-tactile sensors comprise a thin film metal structure having lateral dimensions selected from the range of 100 μ

m to 5000 μ

m.

16. The system of claim 1, wherein said electronic device comprises one or more tactile sensors supported by the outer surface and one or more electro-tactile stimulators supported by said inner surface, wherein said one or more tactile sensors are in electrical communication with said one or more electrotactile stimulators such that an output from the one or more tactile sensors is provided to the one or more electrotactile stimulators to electrically stimulate said appendage in proportion to the tactile sensor output.

17. The system of claim 1, wherein said electronic device comprises a plurality of electrodes, each electrode comprising:

an inner disk having a diameter that is less than 1 mm; and

an outer ring that surround the inner disk, wherein the inner disk and outer ring are concentrically positioned relative to each other, with a separation distance between the inner disk and outer ring selected from a range that is greater than or equal to 100 μ

m and less than or equal to 500 μ

m.

18. The system of claim 1, comprising said one or more inorganic semiconductor components, wherein each of said one or more inorganic semiconductor components independently comprises a polycrystalline semiconductor material, a single crystalline semiconductor material or a doped polycrystalline or single crystalline semiconductor material, each of said one or more inorganic semiconductor components independently has a thickness that is less than or equal to 100 μ

m.

19. The device of claim 18, wherein each of said inorganic semiconductor components of the electronic device has a net flexural rigidity less than or equal to 1×

10<sup>−

4</sup> Nm, a Young'"'"'s modulus selected from the range of 0.5 MPa to 10 GPa, a net bending stiffness less than or equal to 1×

10⁸ GPa μ

m⁴, or independently comprises a semiconductor nanomembrane structure.

20. The system of claim 1, comprising said one or more metallic components, wherein said one or more metallic conductor components comprise a plurality of electrodes provided in an array and each of said electrodes in said array independently has a thickness less than or equal to 100 μ

m.

21. The system of claim 20, wherein the stretchable or flexible electrode array comprises a plurality of electrode unit cells, wherein adjacent electrode unit cells of the electrode array are separated from each other by a distance less than or equal to 50 μ

m.

22. The system of claim 21, wherein each electrode unit cell of the electrode array comprises a contact pad, amplifier and multiplexer, wherein the contact pad provides an electrical interface to the tissue and is in electrical communication with the amplifier and multiplexer.

23. The system of claim 20, wherein said one or more metallic conductor components further comprise a plurality of stretchable electrical interconnects, wherein said stretchable electrical interconnects electrically connect rigid device islands comprising at least a portion of said one or more one or more inorganic semiconductor components, one or more metallic components, or one or more inorganic semiconductor components and one or more metallic components.

24. The system of claim 23, wherein said rigid device islands comprise the one or more sensors, actuators or both, wherein said sensors or actuators are selected from the group consisting of:

an electrode, a tactile sensor, a strain gauge, a capacitance sensor, a temperature sensor, a pressure sensor, a motion sensor, a position sensor, a displacement sensor, an acceleration sensor, a force sensor, a chemical sensor, a pH sensor, a capacitive sensor, an optical sensor, a photodetector, an imaging system, an electrotactile stimulator, an electrode, a heat source, a piezoelectric element, an acoustic element, a source of RF energy, a magnetic actuator, a source of electromagnetic radiation, a laser, a light emitting diode and arrays and any arrays and combinations thereof.

25. The system of claim 1, wherein the inner surface and outer surface are interchangeably flippable without substantial degradation of a functionality parameter of the one or more sensors, actuators or both supported by the inner surface or the outer surface of said flexible or stretchable substrate and an outer surface that supports the electronic device is flipped, so that after flipping the functional electronic device supported by the outer surface is the functional electronic device supported by the inner surface.

26. The system of claim 1, wherein said flexible or stretchable substrate is characterized by a fracture strain greater than or equal to 500%.

27. The system of claim 1, further comprising a barrier layer at least partially encapsulating at least a portion of said functional device, wherein said barrier layer limits a net leakage current from the electronic device to an amount which does not adversely affect a material in contact with said system, limits a heat transfer from the electronic device to an amount which does not adversely affect a material in contact with said system, or substantially prevents passage of an external fluid to at least a portion of said electronic device.

28. The system of claim 1, further comprising one or more stretchable interconnects that electrically connect at least a portion of said one or more sensors, actuators or both, wherein the one or more stretchable interconnects comprises a nanowire in a serpentine configuration, the nanowire having a rectangular cross-section, with a thickness selected from the range of 50 nm to 1 μ

m and a width that is selected from the range of 10 μ

m to 1 mm, the serpentine configuration characterized by an average radius of curvature selected from the range of 100 μ

m to 10 mm.

29. The system of claim 1, wherein a first electronic device is supported by the inner surface and a second electronic device is supported by the second surface;

wherein the first and second electronic devices are spatially aligned and in communication with respect to each other, wherein the communication is characterized by a parameter that varies with a substrate thickness between the first and second electronic devices, thereby forming a pressure sensor.

30. The system of claim 1, wherein the enclosure has a receiving dimension that is smaller than a corresponding dimension of the appendage, wherein during use a strain in the flexible or stretchable substrate increases the receiving dimension to accommodate the appendage within enclosure without adversely impacting the flexible or stretchable electronic device, wherein the strain generates a contact force between the flexible or stretchable substrate and the appendage within the enclosure to establish and maintain intimate and conformal contact between the flexible or stretchable electronic device supported by the substrate inner surface and the curved surface of the appendage.

31. The system of claim 1, wherein said flexible or stretchable substrate and said electronic device provide said net bending stiffness of the system less than or equal to 1×

10⁸ GPa μ

m⁴.

32. The system of claim 1, wherein said flexible or stretchable substrate and said electronic device provide a net flexural rigidity of the system less than or equal to 1×

10<sup>−

4</sup> Nm.

33. The system of claim 1, wherein said flexible or stretchable substrate and said electronic device provide a net bending stiffness of the system low enough such that said one or more sensors, actuators or both supported by the inner surface of the substrate are capable of establishing conformal contact with said surface of said appendage provided within said enclosure.

2. an appendage mountable electronic system, said system comprising:

a flexible or stretchable substrate having an inner surface and an outer surface, wherein the inner surface defines an enclosure capable of receiving an appendage having a curved surface; and

a flexible or stretchable electronic device comprising one or more sensors, actuators or both supported by the inner surface or the outer surface of said flexible or stretchable substrate;

said sensors, actuators or both comprising one or more inorganic semiconductor components, one or more metallic components, or one or more inorganic semiconductor components and one or more metallic components;

wherein at least a portion of said inorganic semiconductor components, metallic components or both has a thickness less than or equal to 500 microns;

wherein said flexible or stretchable substrate and said electronic device provide a net bending stiffness of the system low enough such that the inner surface of the substrate is capable of establishing conformal contact with a surface of said appendage provided within said enclosure;

wherein said flexible or stretchable substrate and said electronic device provide said net bending stiffness of the system less than or equal to 1×

10⁸ GPa μ

m⁴, a net flexural rigidity of the system less than or equal to 1×

10<sup>−

4</sup> Nm, or a net bending stiffness of the system low enough such that said one or more sensors, actuators or both supported by the inner surface of the substrate are capable of establishing conformal contact with said surface of said appendage provided within said enclosure.

3. The system of claim 2, wherein the instrumented glove is a medical glove for surgery.

34. An appendage mountable electronic system, said system comprising:

an elastomeric substrate having an inner surface and an outer surface, wherein the inner surface defines an enclosure capable of receiving an appendage having a curved surface, and the elastomeric substrate has a resting thickness that is less than 10 mm;

a first electronic device supported by the inner surface;

a second electronic device supported by the outer substrate, wherein the first and second electronic devices are in an opposed configuration with respect to each other and separated by a thickness of the elastomeric substrate to form a pressure sensor whose output varies as a function of elastomeric substrate thickness;

each of the first and second electronic devices comprises one or more inorganic semiconductor components, one or more metallic components, or one or more inorganic semiconductor components and one or more metallic components, having a thickness less than 1 mm and a lateral dimension less than 5 mm.