Multi-laminate hermetic barriers and related structures and methods of hermetic sealing

• US 9,555,595 B2
• Filed: 09/20/2013
• Issued: 01/31/2017
• Est. Priority Date: 04/20/2010
• Status: Active Grant

• Current Assignee: Corning Incorporated
• Original Assignee: Corning Incorporated
• Inventors: Koval, Shari Elizabeth, Edwards, Victoria Ann, Giroux, Cynthia Baker, Quesada, Mark Alejandro, Walczak, Wanda Janina
• Primary Examiner(s): O'HERN, BRENT T
• Application Number:
  US14/032,663
• Publication Number:
  US 20140017437A1
• Time in Patent Office: 1,229 Days
• Field of Search: 428/98
• US Class Current: 1/1
• CPC Class Codes: B32B 2255/20 Inorganic coating
• CPC Class Codes: B32B 2307/412 Transparent
• CPC Class Codes: B32B 2307/546 Flexural strength; Flexion stiffness
• CPC Class Codes: B32B 2307/554 Wear resistance
• CPC Class Codes: B32B 2307/5825 Tear resistant
• CPC Class Codes: B32B 2307/732 Dimensional properties
• CPC Class Codes: B32B 2367/00 Polyesters, e.g. PET, i.e. polyethylene terephthalate
• CPC Class Codes: B32B 2439/70 Food packaging
• CPC Class Codes: B32B 2439/80 Medical packaging
• CPC Class Codes: B32B 2457/12 Photovoltaic modules
• CPC Class Codes: B32B 2457/206 Organic displays, e.g. OLED
• CPC Class Codes: B32B 27/283 comprising polysiloxanes
• CPC Class Codes: B32B 27/32 comprising polyolefins comprising vinyl (co)polymers or acrylic (co)polymers B32B27/30
• CPC Class Codes: B32B 27/36 comprising polyesters
• CPC Class Codes: B32B 3/04 characterised by at least one layer folded at the edge, e.g. over another layer ; characterised by at least one layer enveloping or enclosing a material
• CPC Class Codes: B32B 9/045 of synthetic resin
• CPC Class Codes: H10K 50/84 Passivation; Containers; Encapsulations
• CPC Class Codes: H10K 50/841 Self-supporting sealing arrangements
• CPC Class Codes: H10K 50/8426 Peripheral sealing arrangements, e.g. adhesives, sealants
• CPC Class Codes: H10K 50/8445 multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
• CPC Class Codes: Y10T 156/10 : Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 428/231 : Filled with gas other than air; or under vacuum
• CPC Class Codes: Y10T 428/239 : Complete cover or casing
• CPC Class Codes: Y10T 428/24 : Structurally defined web or sheet [e.g., overall dimension, etc.]
• CPC Class Codes: Y10T 428/249921 : Web or sheet containing structurally defined element or component
• CPC Class Codes: Y10T 428/263 : Coating layer not in excess of 5 mils thick or equivalent
• CPC Class Codes: Y10T 428/31663 : As siloxane, silicone or silane
• CPC Class Codes: Y10T 428/31786 : Of polyester [e.g., alkyd, etc.]

Abstract

A free-standing multi-laminate hermetic sheet includes a first carrier film, a hermetic inorganic thin film formed over the first carrier film, and a second carrier film formed over the hermetic inorganic thin film. A workpiece can be hermetically sealed using the multi-laminate sheet, which can be applied to the workpiece in a step separate from a formation step of either the multi-laminate sheet or the workpiece.

Claims

1. A protected substrate comprising:

an hermetic structure formed over a major surface of a substrate,

wherein the hermetic structure comprises a barrier layer in direct physical contact with a film,

wherein the barrier layer comprises a glass material selected from the group consisting of a tin fluorophosphate glass, a tungsten-doped tin fluorophosphate glass, a chalcogenide glass, a tellurite glass, and a borate glass and the film comprises a polymer layer,

wherein the tin fluorophosphate glass comprises 20-85 wt % Sn, 2-20 wt % P, 10-36 wt % O, 10-36 wt % F, 0-5 wt % Nb, and at least 75 wt % total of Sn+P+0+F, and

wherein the tungsten-doped tin fluorophosphate glass comprises 55-75 wt % Sn, 4-14 wt % P, 6-24 wt % O, 4-22 wt % F, and 0.15-15 wt % W.

2. The protected substrate according to claim 1, wherein from two or more hermetic structures are formed over the substrate.

3. The protected substrate according to claim 2, wherein a first major surface of the film is in direct physical contact with the barrier layer and an opposing second major surface of the film is in contact with a second barrier layer comprising a glass material selected from the group consisting of a tin fluorophosphate glass, a tungsten-doped tin fluorophosphate glass, a chalcogenide glass, a tellurite glass, a borate glass and a phosphate glass.

4. The protected substrate according to claim 1, wherein the barrier layer or film is in physical contact with the substrate.

5. The protected substrate according to claim 1, wherein the barrier layer, the film or both the barrier layer and film have an average thickness of less than about 50 microns.

6. The protected substrate according to claim 1, wherein the film comprises a polymer selected from the group consisting of polydimethylsiloxane, polyethylene naphthalate, and polyethylene terephthalate.

7. The protected substrate according to claim 1, wherein the hermetic structure is optically translucent.

8. The protected substrate according to claim 1, wherein the substrate comprises gallium nitride.

9. The protected substrate according to claim 1, wherein the barrier layer has an average thickness ranging from about 0.5 to about 10 microns.

10. A protected substrate comprising:

an hermetic structure formed over a major surface of a substrate,

wherein the hermetic structure comprises a barrier layer in direct physical contact with a film, and

wherein the barrier layer comprises a glass material selected from the group consisting of a tin fluorophosphate glass, a tungsten-doped tin fluorophosphate glass, a chalcogenide glass, a tellurite glass, a borate glass and a phosphate glass, and

wherein the film comprises a polymer selected from the group consisting of polydimethylsiloxane, polyethylene naphthalate, and polyethylene terephthalate.