Three-dimensional nano-structure array
First Claim
Patent Images
1. A three-dimensional nano-structure array, comprising:
- a substrate having a plurality of three-dimensional nano-structures extending along the same direction, wherein each of the three-dimensional nano-structures has a first peak and a second peak aligned side by side, a first groove is defined between the first peak and the second peak, a second groove is defined between every two adjacent three-dimensional nano-structures of the three-dimensional nano-structures, and a first depth of the first groove is smaller than a second depth of the second groove, a width of each of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 300 nanometers, the first peak and the second peak have a same height, the first depth of the first groove ranges from about 30 nanometers to about 120 nanometers, and the second depth of the second groove ranges from about 100 nanometers to about 200 nanometers;
wherein a first portion of the plurality of three-dimensional nano-structures are aligned along a first period P, a second portion of the plurality of three-dimensional nano-structures are aligned along a second period P′
, and P≠
P′
.
1 Assignment
0 Petitions
Accused Products
Abstract
A three-dimensional nano-structure array includes a substrate and a number of three-dimensional nano-structures. Each three-dimensional nano-structure has a first peak and a second peak aligned side by side. A first groove is defined between the first peak and the second peak. A second groove is defined between the two adjacent three-dimensional nano-structures. A depth of the first groove is lower than that of the second groove.
-
Citations
18 Claims
-
1. A three-dimensional nano-structure array, comprising:
a substrate having a plurality of three-dimensional nano-structures extending along the same direction, wherein each of the three-dimensional nano-structures has a first peak and a second peak aligned side by side, a first groove is defined between the first peak and the second peak, a second groove is defined between every two adjacent three-dimensional nano-structures of the three-dimensional nano-structures, and a first depth of the first groove is smaller than a second depth of the second groove, a width of each of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 300 nanometers, the first peak and the second peak have a same height, the first depth of the first groove ranges from about 30 nanometers to about 120 nanometers, and the second depth of the second groove ranges from about 100 nanometers to about 200 nanometers;
wherein a first portion of the plurality of three-dimensional nano-structures are aligned along a first period P, a second portion of the plurality of three-dimensional nano-structures are aligned along a second period P′
, and P≠
P′
.- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 18)
-
16. A three-dimensional nano-structure array, comprising:
a substrate comprising a surface, and a plurality of first grooves and a plurality of second grooves alternately defined in the surface, the plurality of first grooves and the plurality of second grooves extending substantially along the same direction, and a first depth of the first groove is lower than a second depth of the second groove, the first depth ranges from about 30 nanometers to about 120 nanometers, and the second depth ranges from about 100 nanometers to about 200 nanometers;
wherein a first portion of the plurality of three-dimensional nano-structures are aligned along a first period P, a second portion of the plurality of three-dimensional nano-structures are aligned along a second period P′
, and P≠
P′
.
-
17. A three-dimensional nano-structure array, comprising:
a substrate comprising a plurality of three-dimensional nano-structures, wherein the plurality of three-dimensional nano-structures are aligned side by side to form an array, and extend along the same direction, and a cross-section of each three-dimensional nano-structure is M-shaped, each of the plurality of three-dimensional nano-structures has a first peak and a second peak aligned side by side, the first peak and the second peak have a same height, a first groove is defined between the first peak and the second peak, a second groove is defined between every two adjacent three-dimensional nano-structures of the plurality of three-dimensional nano-structures, and a first depth of the first groove is smaller than a second depth of the second groove;
a width of each of the plurality of three-dimensional nano-structures ranges from about 100 nanometers to about 300 nanometers, a first depth of the first groove ranges from about 30 nanometers to about 120 nanometers, and a second depth of the second groove ranges from about 100 nanometers to about 200 nanometers;
wherein a distance between every two adjacent three-dimensional nano-structures of the plurality of three-dimensional nano-structures is periodically varied.
Specification