Optical coordinate measuring device

• US 9,557,159 B2
• Filed: 02/26/2015
• Issued: 01/31/2017
• Est. Priority Date: 03/28/2014
• Status: Active Grant

• Current Assignee: Keyence Corporation (Keyence)
• Original Assignee: Keyence Corporation (Keyence)
• Inventors: Ikebuchi, Masayasu
• Primary Examiner(s): Ton, Tri T
• Application Number:
  US14/631,877
• Publication Number:
  US 20150276377A1
• Time in Patent Office: 705 Days
• Field of Search: 356614-640
• US Class Current: 1/1
• CPC Class Codes: G01B 11/005 coordinate measuring machines
• CPC Class Codes: G01B 5/008 using coordinate measuring machines

Abstract

Provided is an optical coordinate measuring device that prevents deterioration in measurement accuracy. A holding member is made of a material having low moisture absorption properties and a small linear expansion coefficient. A marker member is held by the holding member. The marker member includes a plate member made of glass. A light shielding mask is formed by printing on one surface of the plate member except for a plurality of circular regions. A light emitting substrate is arranged below the marker member. A plurality of light emitting elements are mounted on the upper surfaces of the light emitting substrates.

Claims

1. An optical coordinate measuring device comprising:

a probe configured to designate a measurement position, and having a plurality of markers;

an imaging unit configured to capture an image including the plurality of markers to generate image data; and

a calculation unit configured to calculate a coordinate point of a measurement position designated by the probe based on the plurality of markers in the image data generated by the imaging unit,

wherein the probe includes

a light source,

a plurality of light transmitting portions each having a light transmitting region corresponding to each of the markers, each having a planar outer surface, and including glass that transmits light emitted by the light source,

a light shielding film formed on each of the planar outer surface of the plurality of light transmitting portions except for each of the light transmitting regions so as to form an outer shape of the marker, and

a holding part configured to hold the plurality of light transmitting portions.

2. The optical coordinate measuring device according to claim 1, wherein the holding part is made of one or a plurality of materials selected from glass, metal, alloy, ceramic, and glass ceramic.

3. The optical coordinate measuring device according to claim 1, wherein the holding part is made of quartz glass.

4. The optical coordinate measuring device according to claim 1, wherein the plurality of light transmitting portions and the holding part are made of the same material.

5. The optical coordinate measuring device according to claim 1, wherein each of the light transmitting portions is made of plate glass.

6. The optical coordinate measuring device according to claim 1, wherein the light shielding film is a vapor deposition film.

7. The optical coordinate measuring device according to claim 1, wherein the respective planar outer surfaces of the light transmitting portions are disposed in parallel to each other.

8. The optical coordinate measuring device according to claim 1, wherein the imaging unit is a single camera, and each of the planar outer surfaces of the light transmitting portions faces a common direction.

9. The optical coordinate measuring device according to claim 8, wherein the probe further includes a housing having an opening corresponding to each of the markers on one side of the housing, and a grip part projects along a first direction on the other side of the housing.

10. The optical coordinate measuring device according to claim 1, wherein the probe further includes a housing configured to cover the holding part, and a grip part projects along a first direction distinct from a second direction parallel to the planar outer surfaces of the light transmitting portions.

11. The optical coordinate measuring device according to claim 1, wherein the probe further includes a diffusion member which is provided between the light source and each of the light transmitting portions, and which diffuses and transmits light emitted by the light source.

12. The optical coordinate measuring device according to claim 1, wherein the probe further includes a housing which houses the holding part, and a buffer member having flexibility is arranged between the holding part and the housing.