Gas sensors and methods of preparation thereof

• US 9,557,285 B2
• Filed: 08/21/2012
• Issued: 01/31/2017
• Est. Priority Date: 08/25/2011
• Status: Active Grant

• Current Assignee: Global Life Science Partners Limited, Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Gole, James L.
• Primary Examiner(s): Gray, Francis
• Application Number:
  US14/240,691
• Publication Number:
  US 20140223997A1
• Time in Patent Office: 1,624 Days
• US Class Current: 1/1
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01N 27/06 of a liquid involving electrolysis G01N27/26
• CPC Class Codes: G01N 27/127 comprising nanoparticles

Abstract

Embodiments of the present disclosure include sensors, arrays of conductometric sensors, devices including conductometric sensors, methods of making conductometric sensors, methods of using conductometric gas sensors, and the like. One exemplary embodiment of a device, among others, includes: a conductometric gas sensor including a n-type substrate having a porous layer, wherein a plurality of ‘nanostructures are disposed on a portion of the porous layer, wherein the nanostructure provides a fractional coverage on the porous layer, wherein the conductometric gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration.

Claims

1. A device, comprising:

a conductometric porous silicon gas sensor including a n-type silicon substrate having a porous silicon layer, wherein the n-type silicon substrate is an n⁺-type silicon substrate, wherein a plurality of nanostructures are disposed on a portion of the porous silicon layer,

wherein the conductometric porous silicon gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration.

2. The device of claim 1, wherein the nanostructure provides a fractional coverage on the porous silicon layer.

3. The device of claim 2, wherein the nanostructure is a metal oxide.

4. The device of claim 2, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

5. The device of claim 2, wherein the nanostructure is selected from the group consisting of:

aluminum oxide (Al₂O₃, AlO₂), silicon oxide (SiO_x, x is 1 to

     4), tin oxide (SnO_x, x is 2 to

     4), chromia (Cr₂O₃), iron oxide (Fe₂O₃, Fe₃O₄, or FeO), nickel oxide (NiO), silver oxide (AgO), titanium oxide (TiO₂), cobalt oxide (Co₂O₃, Co₃O₄, or CoO), zinc oxide (ZnO), platinum oxide (PtO), palladium oxide (PdO), vanadium oxide (VO₂), molybdenum oxide (MoO₂), lead oxide (PbO), titanium oxide (TiO_2-x, x is 1 to

     2), titanium nitride (TiN₁), titanium oxinitride (TiO_2-xN_x), gold oxide (Au_xO, x>

>

1), copper oxide (Cu_xO, x is 1 to

     2), and a combination thereof.

6. The device of claim 2, wherein the nanostructure is selected from the group consisting of:

tin oxide (SnO_x, x is 2 to

     4), nickel oxide (NiO), titanium oxide (TiO₂), titanium oxide (TiO_x, x is 1 to

     2), titanium nitride (TiN₁), titanium oxinitride (TiO_2-xN_x), gold oxide (Au_xO, x>

>

1), copper oxide (Cu_xO, x is 1 to

     2), and a combination thereof.

7. The device of claim 6, wherein the nanostructure is a nanoparticle.

8. The device of claim 1, wherein the porous silicon region has a hybrid microporous/nanoporous framework, wherein the walls of the microporous framework are superimposed with a nanoporous layer.

9. The device of claim 8, wherein the macroporous framework includes pores approximately 1 to 2 μ

m wide and 0.5 to 20 μ

m deep.

10. The device of claim 1, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change corresponding to a gas concentration at less than 100 parts per billion.

11. The device of claim 1, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change at room temperature.

12. The device of claim 1, further comprising a p-type conductometric porous silicon gas sensor.

13. The device of claim 1, further comprising an array of n-type conductometric porous silicon gas sensors and p-type conductometric porous silicon gas sensors.

14. A method of detecting a concentration of a gas, comprising:

providing a conductometric porous silicon gas sensor including a n-type silicon substrate having a porous silicon layer, wherein a plurality of nanostructures are disposed on a portion of the porous silicon layer, wherein the conductometric porous silicon gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration;

introducing the gas to the sensor; and

measuring an impedance change in the sensor at room temperature.

15. The method of claim 14, wherein measuring includes obtaining an impedance value from an impedance analyzer.

16. The method of claim 14, wherein measuring includes obtaining a resistive value from a sensor and shunt circuit.

17. The method of claim 14, further comprising:

correlating the impedance change to the concentration of the gas.

18. The method of claim 17, wherein correlating includes computing a magnitude of the impedance change, computing the time over which the magnitude of the impedance change occurs, and computing a slope from the ratio of the magnitude of the impedance change and the time to determine the concentration of the gas.

19. A device, comprising:

a conductometric gas sensor including a n-type substrate having a porous layer, wherein a plurality of nanostructures are disposed on a portion of the porous layer, wherein the nanostructure provides a fractional coverage on the porous layer,

wherein the conductometric gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the n-type substrate is selected from the group consisting of;

n- or n⁺-type doped wafer and n- or n⁺-type phosphorous doped wafer.

20. The device of claim 19, wherein the n-type substrate is an extrinsic n-type semiconductor.

21. The device of claim 19, wherein the n-type substrate is selected from the group consisiting of:

silicon, GaP, InP, and CdTe.

22. The device of claim 19, wherein the nanostructure is a metal oxide.

23. The device of claim 22, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

24. The device of claim 19, further comprising a p-type conductometric porous silicon gas sensor.

25. The device of claim 19, further comprising an array of n-type conductometric porous silicon gas sensors and p-type conductometric porous silicon gas sensors.

26. A device, comprising:

a conductometric porous silicon gas sensor including a n-type silicon substrate having a porous silicon layer, wherein a plurality of nanostructures are disposed on a portion of the porous silicon layer,

wherein the conductometric porous silicon gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the porous silicon region has a hybrid microporous/nanoporous framework, wherein the walls of the microporous framework are superimposed with a nanoporous layer.

27. The device of claim 26, wherein the macroporous framework includes pores approximately 1 to 2 μ

m wide and 0.5 to 20 μ

m deep.

28. The device of claim 26, wherein the nanostructure provides a fractional coverage on the porous silicon layer.

29. The device of claim 26, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

30. The device of claim 26, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change corresponding to a gas concentration at less than 100 parts per billion.

31. The device of claim 26, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change at room temperature.

32. A device, comprising:

a conductometric porous silicon gas sensor including a n-type silicon substrate having a porous silicon layer, wherein a plurality of nanostructures are disposed on a portion of the porous silicon layer,

wherein the conductometric porous silicon gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the conductometric porous silicon gas sensor is operative to measure the impedance change corresponding to a gas concentration at less than 100 parts per billion.

33. The device of claim 32, wherein the porous silicon region has a hybrid microporous/nanoporous framework, wherein the walls of the microporous framework are superimposed with a nanoporous layer.

34. The device of claim 32, wherein the nanostructure provides a fractional coverage on the porous silicon layer.

35. The device of claim 32, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

36. The device of claim 32, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change corresponding to a gas concentration at less than 100 parts per billion.

37. The device of claim 32, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change at room temperature.

38. A device, comprising:

a conductometric porous silicon gas sensor including a n-type silicon substrate having a porous silicon layer, wherein a plurality of nanostructures are disposed on a portion of the porous silicon layer,

wherein the conductometric porous silicon gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the conductometric porous silicon gas sensor is operative to measure the impedance change at room temperature.

39. The device of claim 38, wherein the porous silicon region has a hybrid microporous/nanoporous framework, wherein the walls of the microporous framework are superimposed with a nanoporous layer.

40. The device of claim 38, wherein the nanostructure provides a fractional coverage on the porous silicon layer.

41. The device of claim 38, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

42. The device of claim 38, wherein the conductometric porous silicon gas sensor is operative to measure the impedance change corresponding to a gas concentration at less than 100 parts per billion.

43. A device, comprising:

a conductometric gas sensor including a n-type substrate having a porous layer, wherein a plurality of nanostructures are disposed on a portion of the porous layer, wherein the nanostructure provides a fractional coverage on the porous layer,

wherein the conductometric gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the conductometric porous silicon gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration.

44. The device of claim 43, wherein the n-type substrate is an extrinsic n-type semiconductor.

45. The device of claim 43, wherein the n-type substrate is selected from the group consisiting of:

silicon, GaP, InP, and CdTe.

46. The device of claim 43, wherein the n-type substrate is selected from the group consisting of:

n- or n⁺-type doped wafer and n- or n⁺-type phosphorous doped wafer.

47. The device of claim 43, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

48. A device, comprising:

a conductometric gas sensor including a n-type substrate having a porous layer, wherein a plurality of nanostructures are disposed on a portion of the porous layer, wherein the nanostructure provides a fractional coverage on the porous layer,

wherein the conductometric gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the porous silicon region has a hybrid microporous/nanoporous framework, wherein the walls of the microporous framework are superimposed with a nanoporous layer.

49. The device of claim 48, wherein the n-type substrate is an extrinsic n-type semiconductor.

50. The device of claim 48, wherein the n-type substrate is selected from the group consisiting of:

silicon, GaP, InP, and CdTe.

51. The device of claim 48, wherein the n-type substrate is selected from the group consisting of:

n- or n⁺-type doped wafer and n- or n⁺-type phosphorous doped wafer.

52. The device of claim 48, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

53. A device, comprising:

a conductometric gas sensor including a n-type substrate having a porous layer, wherein a plurality of nanostructures are disposed on a portion of the porous layer, wherein the nanostructure provides a fractional coverage on the porous layer,

wherein the conductometric gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the conductometric porous silicon gas sensor is operative to measure the impedance change corresponding to a gas concentration at less than 100 parts per billion.

54. The device of claim 53, wherein the n-type substrate is an extrinsic n-type semiconductor.

55. The device of claim 53, wherein the n-type substrate is selected from the group consisiting of:

silicon, GaP, InP, and CdTe.

56. The device of claim 53, wherein the n-type substrate is selected from the group consisting of:

n- or n⁺-type doped wafer and n- or n⁺-type phosphorous doped wafer.

57. The device of claim 53, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.

58. A device, comprising:

a conductometric gas sensor including a n-type substrate having a porous layer, wherein a plurality of nanostructures are disposed on a portion of the porous layer, wherein the nanostructure provides a fractional coverage on the porous layer,

wherein the conductometric gas sensor is operative to transduce the presence of a gas into an impedance change, wherein the impedance change correlates to the gas concentration,

wherein the conductometric porous silicon gas sensor is operative to measure the impedance change at room temperature.

59. The device of claim 58, wherein the n-type substrate is an extrinsic n-type semiconductor.

60. The device of claim 58, wherein the n-type substrate is selected from the group consisiting of:

silicon, GaP, InP, and CdTe.

61. The device of claim 58, wherein the n-type substrate is selected from the group consisting of:

n- or n⁺-type doped wafer and n- or n⁺-type phosphorous doped wafer.

62. The device of claim 58, wherein the nanostructure is a metal oxide.

63. The device of claim 58, wherein the nanostructure is selected from the group consisting of:

tin (Sn), chromium (Cr), iron (Fe), nickel (Ni), silver (Ag), titanium (Ti), cobalt (Co), zinc (Zn), platinum (Pt), palladium (Pd), osmium (Os), gold (Au), lead (Pb), iridium (Ir), molybdenum (Mo), vanadium (V), aluminum (Al), an oxide of each of these, and a combination thereof.