Electrochemical sensing well
First Claim
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1. A method comprising:
- forming an array of open wells in a body, each of the wells having a chamfered edge about a top side of the well;
directionally depositing an electrode material on the top surface of the body and the chamfered edge of each of the wells to form a top electrode layer; and
providing a bottom electrode on a bottom of the wells,providing a non-conductive sidewall in each of the wells to electrically isolate the top electrode layer from the bottom electrode, the non-conductive sidewall to extend from the bottom electrode to the chamfered edge.
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Abstract
A well is formed in a body of dielectric material and has a chamfered edge about a top side of the well. A top electrode layer is on a top face of the body and on the chamfered edge of the well. A bottom electrode is on a floor of the well.
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11 Claims
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1. A method comprising:
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forming an array of open wells in a body, each of the wells having a chamfered edge about a top side of the well; directionally depositing an electrode material on the top surface of the body and the chamfered edge of each of the wells to form a top electrode layer; and providing a bottom electrode on a bottom of the wells, providing a non-conductive sidewall in each of the wells to electrically isolate the top electrode layer from the bottom electrode, the non-conductive sidewall to extend from the bottom electrode to the chamfered edge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification