Compact vertical inductors extending in vertical planes
First Claim
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1. A device comprising:
- a substrate; and
a vertical inductor over the substrate and comprising;
a plurality of parts formed of metal, wherein each of the parts has a spiral configuration that extends in one of a plurality of parallel planes perpendicular to a major surface of the substrate, each part of the plurality of parts having an input end and an output end, and wherein a first spiral of a first plurality of parts in a first plane spirals inward in one of a clockwise direction or a counter-clockwise direction, a second spiral of a second plurality of parts in a second plane spirals inward in an other one of the clockwise direction or the counter-clockwise direction, and a third spiral of a third plurality of parts in a third plane spirals inward in a same direction as the first plurality of parts, the first plane and the second plane being adjacent planes of the plurality of parallel planes, the second plane and the third plane being adjacent planes of the plurality of parallel planes, wherein an input to the first spiral in the first plane is at a different relative location than an input to the third spiral in the third plane such that an axis extending through the input to the first spiral and normal to the first plane does not extend through the input to the third spiral; and
at least one straight metal line parallel to the major surface of the substrate and interconnecting the output end of one of the plurality of parts to the input end of one of the plurality of parts in an adjacent parallel plane.
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Abstract
A device includes a substrate, and a vertical inductor over the substrate. The vertical inductor includes a plurality of parts formed of metal, wherein each of the parts extends in one of a plurality of planes perpendicular to a major surface of the substrate. Metal lines interconnect neighboring ones of the plurality of parts of the vertical inductor.
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Citations
18 Claims
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1. A device comprising:
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a substrate; and a vertical inductor over the substrate and comprising; a plurality of parts formed of metal, wherein each of the parts has a spiral configuration that extends in one of a plurality of parallel planes perpendicular to a major surface of the substrate, each part of the plurality of parts having an input end and an output end, and wherein a first spiral of a first plurality of parts in a first plane spirals inward in one of a clockwise direction or a counter-clockwise direction, a second spiral of a second plurality of parts in a second plane spirals inward in an other one of the clockwise direction or the counter-clockwise direction, and a third spiral of a third plurality of parts in a third plane spirals inward in a same direction as the first plurality of parts, the first plane and the second plane being adjacent planes of the plurality of parallel planes, the second plane and the third plane being adjacent planes of the plurality of parallel planes, wherein an input to the first spiral in the first plane is at a different relative location than an input to the third spiral in the third plane such that an axis extending through the input to the first spiral and normal to the first plane does not extend through the input to the third spiral; and at least one straight metal line parallel to the major surface of the substrate and interconnecting the output end of one of the plurality of parts to the input end of one of the plurality of parts in an adjacent parallel plane. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A device comprising:
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a substrate; a plurality of metal layers over the substrate; and a vertical inductor comprising; a plurality of parts formed of metal; a spiral metal feature in each of the plurality of parts, wherein the spiral metal feature comprises a plurality of metal lines in the plurality of metal layers and a plurality of vias interconnecting the plurality of metal lines, and wherein the spiral metal feature extends along a vertical plane perpendicular to a major surface of the substrate, neighboring ones of the spiral metal features having a same current flow direction, the plurality of parts comprising a first spiral metal feature in a first plane, a second spiral metal feature in a second plane, and a third spiral metal feature in a third plane, the first spiral metal feature and the second spiral feature being adjacent spiral metal features of the plurality of parts, the second spiral metal feature and the third spiral metal feature being adjacent spiral metal features of the plurality of parts; metal lines interconnecting neighboring ones the plurality of parts; a first port disposed in a first part of the plurality of parts; and a second port disposed in a second part of the plurality of parts, the second part of the plurality of parts different from the first part of the plurality of parts; wherein an input to the first spiral metal feature in the first plane is at a different relative location than an input to the third spiral metal feature in the third plane such that an axis extending through the input to the first spiral metal feature and normal to the first plane does not extend through the input to the third spiral metal feature; and wherein the inductor is configured to route a current from the first port to the second port, and wherein the first port disposed at the same side of the vertical inductor as the second port, the first port and the second port extending from the inductor parallel to the vertical plane. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A device comprising:
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an inductor disposed in a plurality of metal layers over a substrate and comprising; a plurality of spiral features, each of the plurality of spiral features comprising a plurality of metal features that extends in one of a plurality of parallel planes perpendicular to a major surface of the substrate, each of the plurality of spiral features having an input end in a first relative location in the spiral feature and an output end in a second relative location in the spiral feature, neighboring ones of the plurality of spiral features having a same current flow direction, neighboring ones of the plurality of spiral feature spiraling from an outer portion to an inner portion in opposite directions, the plurality of spiral features comprising a first spiral feature in a first plane, a second spiral feature in a second plane, and a third spiral feature in a third plane, the first spiral feature and the second spiral feature being adjacent spiral features of the plurality of spiral features, the second spiral feature and the third spiral feature being adjacent spiral features of the plurality of spiral features; and a plurality of connections each having a straight metal line interconnecting the output end of a respective first metal feature of the plurality of metal features to the input end of a neighboring second metal feature of the plurality of metal features; wherein an input to the first spiral feature is at a different relative location than an input to the third spiral feature such that an axis extending through the input to the first spiral feature and normal to the first plane does not extend through the input to the third spiral feature; wherein each of the straight metal lines is substantially parallel to a major surface of the substrate; and wherein the inductor has a first port disposed at the same side as a second port, the first port and the second port extending from the inductor parallel to the plurality of parallel planes. - View Dependent Claims (15, 16, 17, 18)
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Specification