×

Humidity sensor and sensor element

  • US 9,562,872 B2
  • Filed: 05/13/2013
  • Issued: 02/07/2017
  • Est. Priority Date: 05/29/2012
  • Status: Active Grant
First Claim
Patent Images

1. A humidity sensor element comprising:

  • a dielectric substrate;

    a nonporous conductive electrode having a first conductive member electrically coupled thereto, wherein the nonporous conductive electrode is disposed on the dielectric substrate;

    a permeable conductive electrode having a second conductive member electrically coupled thereto, wherein the permeable conductive electrode has a thickness in a range of from 4 to 10 nanometers, and wherein the permeable conductive electrode is permeable by water vapor;

    a detection layer disposed between the nonporous conductive electrode and the permeable conductive electrode, wherein the detection layer comprises a sulfonated copolymer including monomeric units comprising

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×