Humidity sensor and sensor element
First Claim
1. A humidity sensor element comprising:
- a dielectric substrate;
a nonporous conductive electrode having a first conductive member electrically coupled thereto, wherein the nonporous conductive electrode is disposed on the dielectric substrate;
a permeable conductive electrode having a second conductive member electrically coupled thereto, wherein the permeable conductive electrode has a thickness in a range of from 4 to 10 nanometers, and wherein the permeable conductive electrode is permeable by water vapor;
a detection layer disposed between the nonporous conductive electrode and the permeable conductive electrode, wherein the detection layer comprises a sulfonated copolymer including monomeric units comprising
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Abstract
A humidity sensor element includes a dielectric substrate, a nonporous conductive electrode disposed on the dielectric substrate, a permeable conductive electrode having a thickness in a range of from 4 to 10 nanometers and permeable by water vapor, and a detection layer disposed between the nonporous conductive electrode and the permeable conductive electrode. Both conductive electrodes have respective conductive leads attached thereto. The detection layer includes a sulfonated copolymer including monomeric units comprising (I) and (II), Wherein x and y are independently integers in the range of from 2 to 6, and wherein each M independently represents H or an alkali metal. A humidity sensor including the humidity sensor element is also disclosed.
11 Citations
10 Claims
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1. A humidity sensor element comprising:
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a dielectric substrate; a nonporous conductive electrode having a first conductive member electrically coupled thereto, wherein the nonporous conductive electrode is disposed on the dielectric substrate; a permeable conductive electrode having a second conductive member electrically coupled thereto, wherein the permeable conductive electrode has a thickness in a range of from 4 to 10 nanometers, and wherein the permeable conductive electrode is permeable by water vapor; a detection layer disposed between the nonporous conductive electrode and the permeable conductive electrode, wherein the detection layer comprises a sulfonated copolymer including monomeric units comprising - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification