Illumination optical system, exposure apparatus and device manufacturing method
First Claim
1. An illumination optical system for illuminating an illumination target surface with light from a light source, comprising:
- a polarization converting member which is arranged in an optical path of the illumination optical system and which converts a polarization state of incident light so as to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system;
a first path bending mirror having a planar reflecting surface; and
a wave plate which is arranged in the optical path between the polarization converting member and the first path bending mirror and an optic axis of which is set in a direction along a first plane including an optical axis of an optical system arranged on the light source side of the first path bending mirror and an optical axis of an optical system arranged on the illumination target surface side of the first path bending mirror, or in a direction perpendicular to said direction along the first plane.
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Abstract
The illumination optical system for illuminating an illumination target surface with light from a light source is provided with a polarization converting member which converts a polarization state of incident light to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; and a phase modulating member which is arranged in the optical path on the illumination target surface side with respect to the polarization converting member and which transmits light from the pupil intensity distribution so as to convert linearly polarized light thereof polarized in a first direction, into required elliptically polarized light and maintain a polarization state of linearly polarized light polarized in a second direction (X-direction or Y-direction) obliquely intersecting with the first direction, in order to reduce influence of retardation caused by a subsequent optical system between the polarization converting member and the illumination target surface.
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Citations
13 Claims
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1. An illumination optical system for illuminating an illumination target surface with light from a light source, comprising:
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a polarization converting member which is arranged in an optical path of the illumination optical system and which converts a polarization state of incident light so as to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil of the illumination optical system; a first path bending mirror having a planar reflecting surface; and a wave plate which is arranged in the optical path between the polarization converting member and the first path bending mirror and an optic axis of which is set in a direction along a first plane including an optical axis of an optical system arranged on the light source side of the first path bending mirror and an optical axis of an optical system arranged on the illumination target surface side of the first path bending mirror, or in a direction perpendicular to said direction along the first plane. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An illumination method for illuminating an illumination target surface with light from a light source, comprising:
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converting a polarization state of incident light from the light source so as to form a pupil intensity distribution in a predetermined polarization state on an illumination pupil by using a polarization converting member; passing light from the polarization converting member through a wave plate; and bending light from the wave plate by using a first path bending mirror having a planar reflecting surface, wherein an optic axis of the wave plate is set in a direction along a first plane including an optical axis of an optical system arranged on the light source side of the first path bending mirror and an optical axis of an optical system arranged on the illumination target surface side of the first path bending mirror, or in a direction perpendicular to said direction along the first plane. - View Dependent Claims (9, 10, 11, 12, 13)
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Specification