Diagnosis system for pulsed plasma
First Claim
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1. A diagnosis system for pulsed plasma, the diagnosis system comprising:
- a chamber in which light is to be generated by a reaction between a substrate and the pulsed plasma;
a first pulsed RF power supply to provide a first pulsed RF power corresponding to a pulse signal to the chamber;
an optical emission sensor (OES) to sense generated light and convert the generated light into an electrical signal;
a digitizer to synchronize the electrical signal with the pulse signal; and
an analyzer to analyze the synchronized electrical signal, whereina period of the pulse signal is divided into a pulse-on period and a pulse-off period, andthe analyzer is to determine at least one from among a first maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-on period, a first maximum signal time when the first maximum signal magnitude value occurs, a first minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-on period, a first minimum signal time when the first minimum signal magnitude value occurs, a first average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-on period, a first standard deviation value defined as a standard deviation corresponding to the first average signal magnitude value, a second maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-off period, a second maximum signal time when the second maximum signal magnitude value occurs, a second minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-off period, a second minimum signal time when the second minimum signal magnitude value occurs, a second average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-off period, and a second standard deviation value defined as a standard deviation corresponding to the second average signal magnitude value.
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Abstract
A diagnosis system for pulsed plasma includes an optical emission sensor (OES) to receive light generated the pulsed plasma, the pulsed plasma having been generated in accordance with a pulse signal, a digitizer to synchronize the electrical signal with the pulse signal, and an analyzer to analyze the synchronized electrical signal.
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Citations
18 Claims
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1. A diagnosis system for pulsed plasma, the diagnosis system comprising:
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a chamber in which light is to be generated by a reaction between a substrate and the pulsed plasma; a first pulsed RF power supply to provide a first pulsed RF power corresponding to a pulse signal to the chamber; an optical emission sensor (OES) to sense generated light and convert the generated light into an electrical signal; a digitizer to synchronize the electrical signal with the pulse signal; and an analyzer to analyze the synchronized electrical signal, wherein a period of the pulse signal is divided into a pulse-on period and a pulse-off period, and the analyzer is to determine at least one from among a first maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-on period, a first maximum signal time when the first maximum signal magnitude value occurs, a first minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-on period, a first minimum signal time when the first minimum signal magnitude value occurs, a first average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-on period, a first standard deviation value defined as a standard deviation corresponding to the first average signal magnitude value, a second maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-off period, a second maximum signal time when the second maximum signal magnitude value occurs, a second minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-off period, a second minimum signal time when the second minimum signal magnitude value occurs, a second average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-off period, and a second standard deviation value defined as a standard deviation corresponding to the second average signal magnitude value. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An etching apparatus, comprising:
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a chamber in which light is to be generated by an etching reaction between a substrate and a pulsed plasma; a pulsed RF power supply to provide to pulsed RF power in accordance with a pulse signal to the chamber; an optical emission sensor to output an electrical signal obtained by electrically converting the generated light; a digitizer to synchronize the electrical signal with the pulse signal; a detector to detect an etch end point time based on a magnitude of the synchronized electrical signal; and an analyzer to analyze the synchronized electrical signal, wherein; a period of the pulse signal is divided into a pulse-on period and a pulse-off period, and the analyzer is to determine at least one from among; a first maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-on period, a first maximum signal time when the first maximum signal magnitude value occurs, a first minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-on period, a first minimum signal time when the first minimum signal magnitude value occurs, a first average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-on period, a first standard deviation value defined as a standard deviation corresponding to the first average signal magnitude value, a second maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-off period, a second maximum signal time when the second maximum signal magnitude value occurs, a second minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-off period, a second minimum signal time when the second minimum signal magnitude value occurs, a second average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-off period, and a second standard deviation value defined as a standard deviation corresponding to the second average signal magnitude value.
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16. A diagnosis system for pulsed plasma, comprising:
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an optical emission sensor (OES) to receive light generated by the pulsed plasma and output an electrical signal in accordance with the light, the pulsed plasma having been generated in accordance with a pulse signal; a digitizer to synchronize the electrical signal with the pulse signal; and an analyzer to analyze the synchronized electrical signal, wherein; a period of the pulse signal is divided into a pulse-on period and a pulse-off period, and the analyzer is to determine at least one from among; a first maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-on period, a first maximum signal time when the first maximum signal magnitude value occurs, a first minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-on period, a first minimum signal time when the first minimum signal magnitude value occurs, a first average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-on period, a first standard deviation value defined as a standard deviation corresponding to the first average signal magnitude value, a second maximum signal magnitude value defined as the maximum electrical signal magnitude value in the pulse-off period, a second maximum signal time when the second maximum signal magnitude value occurs, a second minimum signal magnitude value defined as the minimum electrical signal magnitude value in the pulse-off period, a second minimum signal time when the second minimum signal magnitude value occurs, a second average signal magnitude value defined as an average of an electrical signal magnitude value in the pulse-off period, and a second standard deviation value defined as a standard deviation corresponding to the second average signal magnitude value. - View Dependent Claims (17, 18)
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Specification