Structures and formation methods of micro-electro mechanical system device
First Claim
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1. A micro-electro mechanical system (MEMS) device, comprising:
- a cap substrate;
a MEMS substrate bonded with the cap substrate, wherein the MEMS substrate comprises at least one first movable element and at least one second movable element;
a first closed chamber between the MEMS substrate and the cap substrate, wherein the first movable element is in the first closed chamber;
an outgassing layer in the first closed chamber;
a second closed chamber between the MEMS substrate and the cap substrate, wherein the second movable element is in the second closed chamber; and
a blocking layer surrounding the first closed chamber and the second closed chamber, wherein the blocking layer extends towards the cap substrate and the MEMS substrate and surrounds sidewalls of the first closed chamber and the second closed chamber, and the blocking layer is configured to block gas outside of the first and the second closed chambers from entering the first closed chamber and the second closed chamber.
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Abstract
A micro-electro mechanical system (MEMS) device is provided. The MEMS device includes a cap substrate and a MEMS substrate bonded with the cap substrate. The MEMS substrate includes a first movable element and a second movable element. The MEMS device also includes a first closed chamber between the MEMS substrate and the cap substrate, and the first movable element is in the first closed chamber. The MEMS device further includes an outgassing layer in the first closed chamber. In addition, the MEMS device includes a second closed chamber between the MEMS substrate and the cap substrate, and the second movable element is in the second closed chamber.
19 Citations
20 Claims
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1. A micro-electro mechanical system (MEMS) device, comprising:
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a cap substrate; a MEMS substrate bonded with the cap substrate, wherein the MEMS substrate comprises at least one first movable element and at least one second movable element; a first closed chamber between the MEMS substrate and the cap substrate, wherein the first movable element is in the first closed chamber; an outgassing layer in the first closed chamber; a second closed chamber between the MEMS substrate and the cap substrate, wherein the second movable element is in the second closed chamber; and a blocking layer surrounding the first closed chamber and the second closed chamber, wherein the blocking layer extends towards the cap substrate and the MEMS substrate and surrounds sidewalls of the first closed chamber and the second closed chamber, and the blocking layer is configured to block gas outside of the first and the second closed chambers from entering the first closed chamber and the second closed chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 12, 13, 14, 17, 18)
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9. A micro-electro mechanical system (MEMS) device, comprising:
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a cap substrate; a MEMS substrate bonded with the cap substrate, wherein the MEMS substrate comprises at least one first movable element and at least one second movable element; a first closed chamber between the MEMS substrate and the cap substrate, wherein the first movable element is in the first closed chamber; a second closed chamber between the MEMS substrate and the cap substrate, wherein the second movable element is in the second closed chamber; an outgassing layer in the first closed chamber and on the cap substrate; and a blocking layer surrounding the first closed chamber and the second closed chamber, wherein the blocking layer extends towards the cap substrate and the MEMS substrate and surrounds sidewalls of the first closed chamber and the second closed chamber, and the blocking layer is configured to block gas outside of the first and the second closed chambers from entering the first closed chamber and the second closed chamber. - View Dependent Claims (10, 11, 15, 16, 19, 20)
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Specification