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Apparatus and method for transporting a vessel to and from a PECVD processing station

  • US 9,572,526 B2
  • Filed: 06/16/2014
  • Issued: 02/21/2017
  • Est. Priority Date: 05/13/2009
  • Status: Active Grant
First Claim
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1. Apparatus for PECVD treatment of a first vessel having an open end, a closed end, and an interior space, comprising:

  • a vessel holder configured for seating to the open end of a vessel;

    a first gripper configured for selectively holding and releasing the closed end of a vessel and, while gripping the closed end of the vessel, transporting the vessel to the vicinity of the vessel holder;

    a seat on the vessel holder, the seat configured for establishing sealed communication between the vessel holder and the interior space of the first vessel;

    a reactant supply operatively connected for introducing at least one gaseous reactant within the first vessel through the vessel holder;

    a plasma generator configured for forming plasma within the first vessel under conditions effective to form a reaction product of the reactant on the interior surface of the first vessel;

    a vessel release for unseating the first vessel from the vessel holder; and

    a gripper which is the first gripper or another gripper, configured for axially transporting the first vessel away from the vessel holder, and then releasing the first vessel.

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