Methodology of grading reliability and performance of chips across wafer

• US 9,575,115 B2
• Filed: 10/11/2012
• Issued: 02/21/2017
• Est. Priority Date: 10/11/2012
• Status: Active Grant

• Current Assignee: Globalfoundries US Incorporated (GlobalFoundries, Inc.)
• Original Assignee: GlobalFoundries, Inc.
• Inventors: Chadwick, Nathaniel R., Di Sarro, James P., Gauthier, Robert J. Jr., Lee, Tom C., Li, Junjun, Mitra, Souvick, Peterson, Kirk D., Turner, Andrew A.
• Primary Examiner(s): Barnes-Bullock, Crystal J
• Application Number:
  US13/649,699
• Publication Number:
  US 20140107822A1
• Time in Patent Office: 1,594 Days
• US Class Current: 1/1
• CPC Class Codes: G01R 31/2831 Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates G01R31/318511 takes precedence; testing during manufacture H01L22/00
• CPC Class Codes: G01R 31/2872 related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
• CPC Class Codes: G01R 31/2894 Aspects of quality control [QC] G01R31/31718 takes precedence; program control for QC G05B19/41875
• CPC Class Codes: H01L 22/14 for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
• CPC Class Codes: H01L 22/20 Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

Abstract

A system and method sorts integrated circuit devices. Integrated circuit devices are manufactured on a wafer according to an integrated circuit design using manufacturing equipment. The design produces integrated circuit devices that are identically designed and perform differently based on manufacturing process variations. The integrated circuit devices are for use in a range of environmental conditions, when placed in service. Testing is performed on the integrated circuit devices. Environmental maximums are individually predicted for each device. The environmental maximums comprise ones of the environmental conditions that must not be exceeded for each device to perform above a given failure rate. Each integrated circuit device is assigned at least one of a plurality of grades based on the environmental maximums predicted for each device. The integrated circuit devices are provided to different forms of service having different ones of the environmental conditions based on the grades assigned to each device.

Claims

1. A method of sorting integrated circuit devices, said method comprising:

manufacturing said integrated circuit devices on a wafer according to an integrated circuit design using manufacturing equipment, said integrated circuit design producing identically designed integrated circuit devices that perform differently based on manufacturing process variations, said identically designed integrated circuit devices being for use in a range of environmental conditions, to satisfy needs of different customers;

performing testing on said identically designed integrated circuit devices using testing equipment to produce test results;

individually predicting environmental maximums for each identically designed integrated circuit device of said identically designed integrated circuit devices using a computerized device operatively connected to said testing equipment, said environmental maximums corresponding to said environmental conditions that must not be exceeded for each said identically designed integrated circuit device to perform above a given failure rate;

assigning each said identically designed integrated circuit device at least one grade based on said environmental maximums predicted for each said identically designed integrated circuit device, using said computerized device; and

sorting each of said identically designed integrated circuit devices to satisfy needs of different customers, based on said at least one grade assigned to each said identically designed integrated circuit device, using said computerized device based on said predicted environmental maximums.

2. The method of claim 1, said environmental conditions comprising operating temperature, operating voltage, and power-on hours.

3. The method of claim 1, said assigning of said at least one grade being based on different combinations of said environmental conditions for each of said identically designed integrated circuit devices.

4. The method of claim 1, said testing comprising testing processing tool events, metrology parameters, electrical parameters, process limited yield (PLY) parameters, technology, and product qualification outcomes.

5. The method of claim 1, an interval of said testing including at least one of:

during manufacturing, after manufacturing, and during packaging.

6. The method of claim 1, further comprising, adjusting an amount of burn-in for each of said identically designed integrated circuit devices based on said at least one grade of said identically designed integrated circuit devices.

7. A system for sorting integrated circuit devices for use in a range of environmental conditions, to satisfy needs of different customers, comprising:

a processor; and

a performance monitor operatively connected to said processor,

said integrated circuit devices are manufactured on a wafer according to an integrated circuit design using manufacturing equipment, said integrated circuit design producing identically designed integrated circuit devices that perform differently based on manufacturing process variations, said identically designed integrated circuit devices being for use in a range of environmental conditions, to satisfy needs of different customers

said performance monitor performing testing on said integrated circuit devices using testing equipment to produce test results,

said processor individually predicting environmental maximums for each integrated circuit device, said environmental maximums comprising said environmental conditions that must not be exceeded for each said integrated circuit device to perform above a given failure rate,

said processor assigning each said integrated circuit device at least one grade based on said environmental maximums predicted for each said integrated circuit device to satisfy said needs of different customers, and said processor sorting each of said identically designed integrated circuit devices to satisfy needs of different customers, based on said at least one grade assigned to each said identically designed integrated circuit device, using said computerized device based on said predicted environmental maximums.

8. The system of claim 7, said environmental conditions comprising operating temperature, operating voltage, and power-on hours.

9. The system of claim 7, said processor assigning of said at least one grade based on different combinations of said environmental conditions for each of said integrated circuit devices.

10. The system of claim 7, said testing comprising testing processing tool events, metrology parameters, electrical parameters, process limited yield (PLY) parameters, technology, and product qualification outcomes.

11. The system of claim 7, an interval of said testing including at least one of:

during manufacturing, after manufacturing, and during packaging.

12. The system of claim 7, further comprising:

said processor adjusting an amount of burn-in for each of said integrated circuit devices based on said at least one grade of said integrated circuit devices.

13. The system of claim 7, further comprising a temperature sensor connected to said processor, said processor sensing a temperature of a digital circuit of said integrated circuit devices using said temperature sensor and identifying a reliability band for a temperature operating range of said digital circuit.

14. A non-transitory computer readable storage medium readable by a computerized device, said non-transitory computer readable storage medium storing instructions executable by said computerized device to perform a method of sorting integrated circuit devices, said method comprising:

manufacturing integrated circuit devices on a wafer according to an integrated circuit design using manufacturing equipment, said integrated circuit design producing identically designed integrated circuit devices that perform differently based on manufacturing process variations, said identically designed integrated circuit devices being for use in a range of environmental conditions, to satisfy needs of different customers;

performing testing on said identically designed integrated circuit devices using testing equipment to produce test results;

individually predicting environmental maximums for each identically designed integrated circuit device of said identically designed integrated circuit devices, said environmental maximums corresponding to said environmental conditions that must not be exceeded for each said identically designed integrated circuit device to perform above a given failure rate;

assigning each said identically designed integrated circuit device at least one grade based on said environmental maximums predicted for each said identically designed integrated circuit device; and

sorting each of said identically designed integrated circuit devices to satisfy needs of different customers having different environmental conditions based on said at least one grade assigned to each said identically designed integrated circuit device based on said predicted environmental maximums.

15. The non-transitory computer readable storage medium of claim 14, said environmental conditions comprising operating temperature, operating voltage, and power-on hours.

16. The non-transitory computer readable storage medium of claim 14, said assigning of said at least one grade being based on different combinations of said environmental conditions for each of said identically designed integrated circuit devices.

17. The non-transitory computer readable storage medium of claim 14, said testing comprising testing processing tool events, metrology parameters, electrical parameters, process limited yield (PLY) parameters, technology, and product qualification outcomes.

18. The non-transitory computer readable storage medium of claim 14, an interval of said testing including at least one of:

during manufacturing, after manufacturing, and during packaging.

19. The non-transitory computer readable storage medium of claim 14, further comprising, adjusting an amount of burn-in for each of said identically designed integrated circuit devices based on said at least one grade of said identically designed integrated circuit devices.