Solid state LIDAR circuit with waveguides tunable to separate phase offsets

• US 9,575,341 B2
• Filed: 06/28/2014
• Issued: 02/21/2017
• Est. Priority Date: 06/28/2014
• Status: Active Grant

• Current Assignee: Intel Corporation
• Original Assignee: Intel Corporation
• Inventors: Doylend, Jonathan K, Hutchison, David N, Sendowski, Jacob B, Heck, John, Rong, Haisheng
• Primary Examiner(s): Legasse, Jr., Francis M
• Application Number:
  US14/318,604
• Publication Number:
  US 20150378187A1
• Time in Patent Office: 969 Days
• US Class Current: 1/1
• CPC Class Codes: G01S 17/10 using transmission of interrupted, pulse-modulated waves determination of distance by phase measurements G01S17/32
• CPC Class Codes: G01S 17/34 using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal
• CPC Class Codes: G01S 17/42 Simultaneous measurement of distance and other co-ordinates indirect measurement G01S17/46
• CPC Class Codes: G01S 17/89 for mapping or imaging
• CPC Class Codes: G01S 7/4817 relating to scanning
• CPC Class Codes: G02B 2006/12061 Silicon
• CPC Class Codes: G02B 2006/12147 Coupler
• CPC Class Codes: G02B 6/12004 Combinations of two or more optical elements
• CPC Class Codes: G02F 1/1326 Liquid crystal optical waveguides or liquid crystal cells specially adapted for gating or modulating between optical waveguides
• CPC Class Codes: G02F 1/292 by controlled diffraction or phased-array beam steering controlled diffraction for optical switching G02F1/31

Abstract

A solid state photonics circuit having a liquid crystal (LC) layer for beam steering. The LC layer can provide tuning of an array of waveguides by controlling the application of voltage to the liquid crystal. The application of voltage to the liquid crystal can be controlled to perform beam steering with the light signal based on different tuning in each of the waveguides of the array. The waveguides are disposed in a substrate having an oxide or other insulating layer with an opening. The opening in the oxide layer exposes a portion of a path of the array of waveguides. The waveguides are exposed to the liquid crystal through the oxide opening, which allows the voltage changes to the liquid crystal to tune the optical signals in the waveguides.

Claims

1. A circuit device comprising:

an array of waveguides in a substrate coupled to a splitter that splits source light into the array of waveguides;

an insulating layer on the substrate, the insulating layer having an opening to expose a portion of a path of the array of waveguides;

a liquid crystal layer on the insulating layer and on the portion of the path of the array of waveguides exposed by the opening in the insulating layer, wherein a voltage across the liquid crystal layer is to cause a greater phase shift in a given waveguide relative to another waveguide in the array of waveguides exposed by the opening in the insulating layer; and

a coupler integrated in the substrate to receive light from the array of waveguides and couple the light through the liquid crystal layer.

2. The circuit device of claim 1, wherein the substrate comprises a silicon substrate.

3. The circuit device of claim 1, wherein the insulating layer comprises an oxide layer.

4. The circuit device of claim 1, wherein the liquid crystal layer comprises a liquid crystal on silicon (LCOS) layer.

5. The circuit device of claim 1, wherein the opening comprises a triangular shaped opening across the array of waveguides, where the triangular shaped opening has its apex nearest one waveguide, and the triangular shape exposes more of each subsequently adjacent waveguide to provide an increasing phase shift across the waveguides of the array.

6. The circuit device of claim 1, wherein the coupler comprises a grating coupler.

7. The circuit device of claim 1, wherein the coupler comprises a mirror coupler.

8. The circuit device of claim 1, further comprising:

one or more angled facets over the coupler to spread the light.

9. The circuit device of claim 1, further comprising:

a modulator prior to the splitter to modulate the source light received from a laser source.

10. The circuit device of claim 1, further comprising:

a laser device integrated in the substrate to generate the source light to pass through the splitter into the array of waveguides.

11. The circuit device of claim 8, wherein the one or more angled facets comprise one or more angled facets in the insulating layer.

12. The circuit device of claim 8, wherein the one or more angled facets comprise one or more angled facets in the liquid crystal layer.

13. An integrated photonic chip comprising:

an array of waveguides integrated in a substrate;

a splitter integrated in the substrate to receive source light from a laser and split the source light into the array of waveguides;

an insulating layer on the substrate, the insulating layer having an opening to expose a portion of a path of the array of waveguides;

a liquid crystal layer on the insulating layer and on the portion of the path of the array of waveguides exposed by the opening in the insulating layer, wherein a voltage across the liquid crystal layer is to cause a greater phase shift in a given waveguide relative to another waveguide in the array of waveguides exposed by the opening in the insulating layer; and

photodetectors integrated in the substrate to receive light from the waveguides as a reference signal to compare against detected far field scattered light.

14. The integrated photonic chip of claim 13, wherein the opening comprises a triangular shaped opening across the array of waveguides, where the triangular shaped opening has its apex nearest one waveguide, and the triangular shape exposes more of each subsequently adjacent waveguide to provide an increasing phase shift across the waveguides of the array.

15. The integrated photonic chip of claim 13, further comprising:

a photodetector that taps off the source light as a reference signal.

16. The integrated photonic chip of claim 13, further comprising:

one or more angled facets over a coupler to spread the light.

17. The integrated photonic chip of claim 13, further comprising:

a laser device integrated in the substrate to generate the source light received at the splitter.

18. A circuit device comprising:

an array of waveguides in a substrate coupled to a splitter that splits source light into the array of waveguides;

an insulating layer on the substrate, the insulating layer having an opening to expose a portion of a path of the array of waveguides, wherein the opening is to expose more of a given waveguide than an adjacent waveguide of the array of waveguides; and

a liquid crystal layer on the insulating layer and on the portion of the path of the array of waveguides exposed by the opening in the insulating layer, wherein a voltage across the liquid crystal layer is to cause a greater phase shift in the given waveguide than the adjacent waveguide of the array based on greater exposure of the given waveguide, relative to the adjacent waveguide, to the liquid crystal layer through the opening in the insulating layer.

19. The circuit device of claim 18, wherein the opening comprises a triangular shaped opening across the array of waveguides, wherein an apex of the triangular shaped opening is disposed further from the given waveguide than the adjacent waveguide.