Electrodeless single CW laser driven xenon lamp

• US 9,576,785 B2
• Filed: 05/14/2015
• Issued: 02/21/2017
• Est. Priority Date: 05/14/2015
• Status: Active Grant

• Current Assignee: Excelitas Technologies Corporation (Excelitas Technologies Holdings LLC)
• Original Assignee: Excelitas Technologies Corporation (Excelitas Technologies Holdings LLC)
• Inventors: Blondia, Rudi
• Primary Examiner(s): Pham, Thai
• Assistant Examiner(s): Alaeddini, Borna
• Application Number:
  US14/712,304
• Publication Number:
  US 20160336167A1
• Time in Patent Office: 649 Days
• Field of Search: 250/423.R, 250/423.P, 250/424, 250/426, 250/494.1, 250/493.1, 250/504.R, 250/504.H, 313/231.31, 313/231.41, 313/231.61, 313/231.71, 313/631, 313/632, 313/633, 315/111.21, 315/111.71, 315/111.91, 252/301.16, 252/301.36, 252/301.4 F, 385/31, 385/33, 385/38, 438/104, 438/156, 438/301, 438/513
• US Class Current: 1/1
• CPC Class Codes: G03F 7/70008 Production of exposure light, i.e. light sources
• CPC Class Codes: G03F 7/70016 by discharge lamps
• CPC Class Codes: G03F 7/70025 by lasers
• CPC Class Codes: G03F 7/70033 by plasma extreme ultraviolet [EUV] sources
• CPC Class Codes: G03F 7/7005 by multiple sources, e.g. light-emitting diodes [LED] or light source arrays addressable array sources specially adapted to produce patterns without a mask G03F7/70391
• CPC Class Codes: H01J 61/025 Associated optical elements
• CPC Class Codes: H01J 61/16 having helium, argon, neon, krypton, or xenon as the principle constituent
• CPC Class Codes: H01J 61/30 Vessels; Containers
• CPC Class Codes: H01J 61/54 Igniting arrangements, e.g. promoting ionisation for starting
• CPC Class Codes: H01J 65/04 Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

Abstract

An ignition facilitated electrodeless sealed high intensity illumination device is disclosed. The device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber has an ingress window disposed within a wall of a chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, and a high intensity light egress window configured to emit high intensity light from the chamber. A path of the CW laser beam from the laser light source through the ingress window to a focal region within the chamber is direct. The ingress window is configured to focus the laser beam to within a predetermined volume, and the plasma is configured to be ignited by the CW laser beam, optionally by heating of a non-electrode ignition agent located entirely within the chamber.

Claims

1. An ignition facilitated electrodeless sealed high intensity illumination device configured to receive a laser beam from a continuous wave (CW) laser light source comprising:

a sealed chamber configured to contain an ionizable medium, the chamber further comprising;

an ingress window disposed within a wall of a chamber interior surface configured to admit the CW laser beam into the chamber;

a plasma sustaining region; and

a high intensity light egress window configured to emit high intensity light from the chamber,

wherein a path of the CW laser beam from the CW laser light source through the ingress window to a focal region within the chamber is direct, the ingress window is configured to focus the CW laser beam to a region with a full width at half maximum (FWHM) beam waist of 1-15 microns² and a Rayleigh length of 6-18 micron or less, and the plasma is configured to be ignited by the CW laser beam without the use of an ignition agent.

2. The sealed high intensity illumination device of claim 1, wherein the ingress window further comprises a lens configured to focus the CW laser beam to a lens focal region within the chamber.

3. The sealed high intensity illumination device of claim 1, wherein the ingress window comprises a flat window.

4. The sealed high intensity illumination device of claim 3, further comprising a lens disposed in the path between the CW laser light source and the ingress window configured to focus the CW laser beam to a lens focal region within the chamber.

5. The sealed high intensity illumination device of claim 1, wherein the sealed chamber comprises a quartz body.

6. The sealed high intensity illumination device of claim 1, an integral reflective chamber interior surface configured to reflect high intensity light from the plasma sustaining region to the egress window.

7. The sealed high intensity illumination device of claim 1, further comprising a viewing window disposed within the wall of the integral reflective chamber interior surface.

8. The sealed high intensity illumination device of claim 7, wherein the viewing window is configured to provide a visual path to the plasma sustaining region from outside the sealed chamber.

9. The sealed high intensity illumination device of claim 1, wherein the reflective interior surface is substantially transparent to the CW laser beam.

10. The sealed high intensity illumination device of claim 1, wherein the chamber is enclosed by a ceramic or metal body CERMAX lamp with integral parabolic or elliptical reflector.

11. The sealed high intensity illumination device of claim 10, further comprising a hyperbolic internal reflector.

12. The sealed high intensity illumination device of claim 1, wherein the chamber is enclosed by a dual window cylindrical Xenon lamp.

13. The sealed high intensity illumination device of claim 1, wherein ionizable medium comprises Xenon gas.

14. The sealed high intensity illumination device of claim 1, further comprising a non-integral convex hyperbolic reflector disposed within the chamber disposed between the plasma sustaining region and the egress window, wherein the non-integral reflector is configured to reflect high intensity light from the plasma sustaining region toward the integral reflective chamber interior surface, wherein the non-integral reflector is configured to reflect non-visible light from the plasma sustaining region to the egress window.

15. A method for operating a sealed beam Xenon lamp without ignition electrodes comprising a sealed chamber, comprising the steps of:

providing a window configured to receive energy from a continuous wave (CW) laser light source disposed outside the chamber to a focal region within the chamber;

setting a pressure of the chamber to a predetermined pressure level;

focusing the CW laser light source to a focal region within the chamber having a predetermined volume of 300 micron³ or less within the chamber;

igniting the ionizable medium within the chamber with only the CW laser light source to form a plasma without the use of an ignition agent; and

sustaining the plasma within the chamber with the CW laser light source.

16. The method of claim 15, wherein the predetermined pressure level is at least 300 psi, and the CW laser light source has a power level of at least 200 Watts.

17. The method of claim 15, wherein the predetermined pressure level is in the range of 300-600 psi, and the CW laser light source has a power level in the range of 250-500 Watts.

18. A method for operating a sealed beam Xenon lamp without ignition electrodes comprising a sealed chamber, comprising the steps of:

providing a window configured to receive energy from a continuous wave (CW) laser light source disposed outside the chamber to a focal region within the chamber;

setting a pressure of the chamber to a predetermined pressure level;

positioning a passive non-electrode igniting agent disposed entirely within the chamber adjacent to the focal region;

heating the passive non-electrode igniting agent with the CW laser light source;

igniting the ionizable medium within the chamber with the heated passive non-electrode igniting agent to form a plasma;

focusing the CW laser light source to a focal region within the chamber having a predetermined volume of 300 micron³ or less within the chamber; and

sustaining the plasma within the chamber with the CW laser light source,

wherein the passive non-electrode igniting agent does not comprise an electrical connection, the predetermined pressure level is at least 300 psi, and the CW laser light source has a power level of at least 125 Watts.

19. The method of claim 18, wherein the passive non-electrode igniting agent comprises thoriated tungsten.

20. The method of claim 18, wherein the passive non-electrode igniting agent comprises Kr-85.

21. The method of claim 18, wherein the heating of the passive non-electrode igniting agent with the CW laser light source is indirect.

22. The method of claim 18, further comprising the step of focusing the CW laser light source onto the passive non-electrode igniting agent, and wherein the heating of the passive non-electrode igniting agent with the CW laser light source is direct.