Liquid crystal display device, EL display device, and manufacturing method thereof
First Claim
Patent Images
1. A display device comprising:
- a first wiring;
a semiconductor layer over the first wiring with a first insulating layer interposed therebetween;
a second insulating layer over and in direct contact with the semiconductor layer;
a second wiring over the second insulating layer, the second wiring electrically connected to the semiconductor layer through an opening formed in the second insulating layer;
a capacitor wiring;
a third insulating layer over the second wiring; and
a pixel electrode electrically connected to the semiconductor layer,wherein a part of the first wiring is a gate electrode,wherein a part of the second insulating layer overlaps with a channel region of the semiconductor layer,wherein the semiconductor layer includes an oxide semiconductor containing indium and zinc,wherein the second insulating layer contains oxygen, indium and zinc,wherein the second insulating layer and the semiconductor layer overlap with the first wiring, the second wiring, and the pixel electrode,wherein a first groove is formed at least in the first insulating layer, the second insulating layer, the third insulating layer, and the semiconductor layer to cross the first wiring,wherein a second groove is formed at least in the first insulating layer, the second insulating layer, the third insulating layer, and the semiconductor layer between the pixel electrode and the first wiring,wherein a first part of the first groove overlaps first edges of the first wiring,wherein a second part of the first groove overlaps second edges of the first wiring,wherein a third part of the first groove overlaps third edges of the capacitor wiring,wherein a fourth part of the first groove overlaps fourth edges of the first wiring,wherein a fifth part of the second groove is between the channel region of the semiconductor layer and the pixel electrode,wherein the first part, the fourth part and the second part are aligned in a first direction,wherein the first part, and the third part are aligned in a second direction that is perpendicular to the first direction,wherein the fourth part, the channel region of the semiconductor layer and the fifth part are aligned in the second direction,wherein the first groove and the second groove are separated.
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Abstract
A display device is manufactured with five photolithography steps: a step of forming a gate electrode, a step of forming a protective layer for reducing damage due to an etching step or the like, a step of forming a source electrode and a drain electrode, a step of forming a contact hole, and a step of forming a pixel electrode. The display device includes a groove portion which is formed in the step of forming the contact hole and separates the semiconductor layer.
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Citations
17 Claims
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1. A display device comprising:
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a first wiring; a semiconductor layer over the first wiring with a first insulating layer interposed therebetween; a second insulating layer over and in direct contact with the semiconductor layer; a second wiring over the second insulating layer, the second wiring electrically connected to the semiconductor layer through an opening formed in the second insulating layer; a capacitor wiring; a third insulating layer over the second wiring; and a pixel electrode electrically connected to the semiconductor layer, wherein a part of the first wiring is a gate electrode, wherein a part of the second insulating layer overlaps with a channel region of the semiconductor layer, wherein the semiconductor layer includes an oxide semiconductor containing indium and zinc, wherein the second insulating layer contains oxygen, indium and zinc, wherein the second insulating layer and the semiconductor layer overlap with the first wiring, the second wiring, and the pixel electrode, wherein a first groove is formed at least in the first insulating layer, the second insulating layer, the third insulating layer, and the semiconductor layer to cross the first wiring, wherein a second groove is formed at least in the first insulating layer, the second insulating layer, the third insulating layer, and the semiconductor layer between the pixel electrode and the first wiring, wherein a first part of the first groove overlaps first edges of the first wiring, wherein a second part of the first groove overlaps second edges of the first wiring, wherein a third part of the first groove overlaps third edges of the capacitor wiring, wherein a fourth part of the first groove overlaps fourth edges of the first wiring, wherein a fifth part of the second groove is between the channel region of the semiconductor layer and the pixel electrode, wherein the first part, the fourth part and the second part are aligned in a first direction, wherein the first part, and the third part are aligned in a second direction that is perpendicular to the first direction, wherein the fourth part, the channel region of the semiconductor layer and the fifth part are aligned in the second direction, wherein the first groove and the second groove are separated. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A display device comprising:
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a transistor including a gate electrode, a semiconductor layer, a protective layer, a first electrode, and a second electrode; a first wiring electrically connected to the gate electrode; a second wiring electrically connected to the first electrode; a pixel electrode electrically connected to the second electrode; a capacitor wiring; a first groove; and a second groove, wherein a part of the protective layer overlaps with a channel region of the semiconductor layer, wherein the semiconductor layer includes an oxide semiconductor containing indium and zinc, wherein the protective layer contains oxygen, indium and zinc, wherein the protective layer is provided over and in direct contact with the semiconductor layer, and the semiconductor layer and the protective layer overlap with the first wiring, the second wiring, the pixel electrode, and the capacitor wiring, wherein the first electrode and the second electrode are electrically connected to the semiconductor layer through first and second openings formed in the protective layer, respectively, wherein the display device further comprises; a first insulating layer between the gate electrode and the semiconductor layer; and a second insulating layer over the protective layer, wherein the first groove is formed at least in the first insulating layer, the protective layer, the second insulating layer, and the semiconductor layer to cross the first wiring in a line width direction of the first wiring and to cross the capacitor wiring in a line width direction of the capacitor wiring, wherein, in a direction parallel to a direction in which the second wiring extends, the first groove is longer than the pixel electrode, wherein the second groove is formed at least in the first insulating layer, the protective layer, the second insulating layer, and the semiconductor layer between the pixel electrode and the first wiring, wherein a first part of the first groove overlaps a first part of the first wiring, wherein a second part of the first groove overlaps a second part of the first wiring, wherein a third part of the first groove overlaps a first part of the capacitor wiring, wherein a fourth part of the first groove overlaps edges of the first wiring, wherein a fifth part of the second groove is between the channel region of the semiconductor layer and the pixel electrode, wherein the first part, the fourth part, and the second part are aligned in a first direction, wherein the first part and the third part are aligned in a second direction that is perpendicular to the first direction, wherein the fourth part, the channel region of the semiconductor layer, and the fifth part are aligned in the second direction, wherein the first groove and the second groove are separated. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification