Methods and apparatus for providing a floating seal for chamber doors

• US 9,580,956 B2
• Filed: 01/02/2014
• Issued: 02/28/2017
• Est. Priority Date: 06/02/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Leung, Billy C., Berkstresser, David E., Kurita, Shinichi
• Primary Examiner(s): PERREAULT, ANDREW D
• Application Number:
  US14/146,332
• Publication Number:
  US 20140111074A1
• Time in Patent Office: 1,153 Days
• Field of Search: 118/733, 220/378, 220/216, 349/58, 277/315, 277/312, 277/300, 277/628
• US Class Current: 1/1
• CPC Class Codes: B65D 53/00 Sealing or packing elements sealings in general F16J15/00; Sealings formed by liquid or plastics material
• CPC Class Codes: E06B 7/232 Resilient strips of hard material, e.g. metal
• CPC Class Codes: H01L 21/67772 involving removal of lid, door, cover

Abstract

An apparatus is provided that includes a chamber wall section prone to deflection, a stationary section providing a sealing surface, and a flexible bellows attached to the chamber wall section and the stationary section. A system is also provided that includes a chamber including a chamber wall having an opening, a door disposed to seal the opening, a sealing surface adjacent the opening and isolated from the chamber wall, and a seal between the sealing surface and the chamber wall. Numerous other aspects are provided.

Claims

1. A system comprising:

a chamber including a chamber wall having an opening, the chamber wall subject to deflection;

a door operable to seal the opening, the door including a door sealing element;

a flexible seat adjacent the opening and mounted to the chamber wall;

a sealing surface surrounding the opening and attached to the flexible seat, the sealing surface providing a planar surface that is mechanically isolated from deflection displacement of the chamber wall, the sealing surface adapted to have the door sealing element compressed against the sealing surface, and the sealing surface adapted to remain stationary relative to the door sealing element when the chamber wall deflects; and

a seal extending between the sealing surface and the chamber wall and fastened between and to the sealing surface and the flexible seat.

2. The system of claim 1 wherein the sealing surface is isolated from the chamber wall by a gap in the chamber wall between the sealing surface and the chamber wall.

3. The system of claim 2 wherein the gap is of sufficient size to accommodate a largest anticipated amount of chamber wall deflection.

4. The system of claim 3 wherein the gap spans along a major dimension of the opening.

5. The system of claim 1 wherein the sealing surface extends around the opening.

6. The system of claim 5 wherein the sealing surface around the opening is isolated by at least two gaps in the chamber wall adjacent the opening.

7. The system of claim 6 wherein the gaps include a first horizontal gap disposed above the opening and a second horizontal gap disposed below the opening,

wherein the first and second gaps are of sufficient size to jointly accommodate a largest anticipated amount of chamber wall deflection and to each span a width of the opening.

8. The system of claim 7 wherein the seal includes a first flexible bellows that seals the first horizontal gap and a second flexible bellows that seals the second horizontal gap.

9. The system of claim 1 wherein the seal includes a bellows adapted to seal the chamber between the sealing surface and the chamber wall.

10. The system of claim 9 wherein the bellows is constructed of a molded compound.

11. The system of claim 9 wherein the bellows includes a flexible metal bellows.

12. The system of claim 11 wherein the flexible metal bellows is flexible in a direction of anticipated deflection of the chamber wall.

13. The system of claim 1 wherein the flexible seat is mounted to the chamber wall where deflection of the chamber wall is minimal.

14. The system of claim 1 wherein the flexible seat is mounted to a first portion of the chamber wall and forms at least one gap between the flexible seat and a second portion of the chamber wall, the gap providing isolation of the sealing surface from the chamber wall.