Diaphragm-type pressure gauge

• US 9,581,513 B2
• Filed: 04/03/2014
• Issued: 02/28/2017
• Est. Priority Date: 10/05/2011
• Status: Active Grant

• Current Assignee: Canon Anelva Corporation (Canon Inc.)
• Original Assignee: Canon Anelva Corporation (Canon Inc.)
• Inventors: Miyashita, Haruzo
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): PLUMB, NIGEL H
• Application Number:
  US14/244,469
• Publication Number:
  US 20140208860A1
• Time in Patent Office: 1,062 Days
• Field of Search: 737/18, 737/15, 737/16, 737/17, 737/23, 737/24, 737/00
• US Class Current: 1/1
• CPC Class Codes: G01L 19/02 Arrangements for preventing, or for compensating for, effects of inclination or acceleration of the measuring device; Zero-setting means for aneroid barometers G01L7/14
• CPC Class Codes: G01L 9/0048 Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor
• CPC Class Codes: G01L 9/125 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel includes a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas. When the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.

Claims

1. A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel, the gauge comprising:

a housing having a member separating an internal space of the housing into a first space and a second space, the first space communicating with the vessel, and the gas being introduced into the first space; and

a sensor unit arranged in the housing, the sensor unit including an insulating substrate having a first surface and a second surface opposing the first surface, a fixed electrode arranged on the first surface, a diaphragm electrode having a measurement surface facing the fixed electrode and arranged parallel to an introduction direction of the gas, the fixed electrode and the measurement surface facing an airtight reference pressure chamber formed between the insulating substrate and the diaphragm electrode, the second surface facing the first space, a surface of the diaphragm electrode, which opposes the measurement surface, facing the first space,

wherein the insulating substrate and the diaphragm electrode are arranged in the first space, a capacitor constituted by the fixed electrode and the diaphragm electrode is connected to an electrode pad attached to the insulating substrate, the electrode pad is connected to a conductive wiring in the first space, and the conductive wiring extends through the member from the first space to the second space.

2. The diaphragm-type pressure gauge according to claim 1,

wherein when the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force.

3. The diaphragm-type pressure gauge according to claim 1, further comprising:

an attaching portion configured to attach the housing to the vessel so as to make the measurement surface of the diaphragm electrode parallel to a direction of gravitational force.

4. The diaphragm-type pressure gauge according to claim 1, wherein the diaphragm electrode comprises two diaphragm electrodes, and

measurement surfaces of the two diaphragm electrodes are arranged parallel.

5. The diaphragm-type pressure gauge according to claim 4, wherein the housing includes an introduction path on which a gas is introduced from the vessel into the first space of the internal space of the housing, and

the measurement surfaces of the two diaphragm electrodes are arranged on two sides of a central axis of the introduction path.

6. The diaphragm-type pressure gauge according to claim 4, wherein the housing includes an introduction path on which a gas is introduced from the vessel into the first space of the internal space of the housing, and

the two diaphragm electrodes are symmetrically arranged with respect to a central axis of the introduction path.

7. The diaphragm-type pressure gauge according to claim 1, wherein the housing includes an introduction path on which a gas is introduced from the vessel into the first space of the internal space of the housing, and

a measurement surface of the diaphragm electrode is spaced apart from a central axis of the introduction path.

8. The diaphragm-type pressure gauge according to claim 1 further comprising:

an attaching portion configured to attach the housing to the vessel,

wherein the measurement surface of the diaphragm electrode is parallel to a direction in which a gas inside the vessel flows in the first space of the internal space, and

an outer surface of the housing is provided with a mark with which the diaphragm-type pressure gauge is attached to the vessel so as to make the measurement surface parallel to a direction of gravitational force.

9. The diaphragm-type pressure gauge according to claim 1, wherein the diaphragm electrode extends parallel to a direction of gravitational force.

10. The diaphragm-type pressure gauge according to claim 1, further comprising:

an output terminal arranged on the housing; and

an electric circuit arranged in the second space and configured to output measurement value to the output terminal in accordance with a signal supplied from the sensor unit via the conductive wiring.

11. The diaphragm-type pressure gauge according to claim 1, wherein the insulating substrate is fixed to the member such that a gap is formed between the insulating substrate and the member.

12. The diaphragm-type pressure gauge according to claim 1, wherein the insulating substrate is fixed to the member by connecting the conductive wiring to the electrode pad attached to the insulating substrate.