XMR-sensor and method for manufacturing the XMR-sensor
First Claim
Patent Images
1. An XMR-sensor, comprising:
- a substrate having a first main surface area and a second, different main surface area;
an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area or the second main surface area such that an XMR-plane of the XMR-structure is arranged in the first direction;
a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure; and
a current conductor configured to conduct a current therethrough, and the current conductor further configured to generate a magnetic field parallel to the XMR-plane of the XMR-structure and within the XMR-structure in response to the conducting current.
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Abstract
An XMR-sensor and method for manufacturing the XMR-Sensor are provided. The XMR-sensor includes a substrate, a first contact, a second contact and an XMR-structure. The substrate includes a first main surface area and a second main surface area. The first contact is arranged at the first main surface area and the second contact is arranged at the second main surface area. The XMR-structure extends from the first contact to the second contact such that an XMR-plane of the XMR-structure is arranged along a first direction perpendicular to the first main surface area or the second main surface area.
84 Citations
24 Claims
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1. An XMR-sensor, comprising:
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a substrate having a first main surface area and a second, different main surface area; an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area or the second main surface area such that an XMR-plane of the XMR-structure is arranged in the first direction; a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure; and a current conductor configured to conduct a current therethrough, and the current conductor further configured to generate a magnetic field parallel to the XMR-plane of the XMR-structure and within the XMR-structure in response to the conducting current. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 24)
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13. A bridge circuit comprising a first bridge section having a series connection of a first XMR-sensor and a second XMR-sensor, and a second bridge section having a series connection of a third XMR-sensor and fourth XMR-sensor, wherein each of the first, second, third and fourth XMR-sensors comprises:
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a substrate area having a first main surface area and a second, different main surface area; an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area and the second main surface area, such that an XMR-plane of the XMR-structure is arranged in the first direction and in a second direction perpendicular to the first direction; a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure; and a current conductor configured to conduct a current therethrough, and the current conductor further configured to generate a magnetic field parallel to the XMR-plane of the XMR-structure within the XMR-structure in response to the conducting current, and wherein the current conductor is separate from the XMR-structure. - View Dependent Claims (14, 15, 16, 17)
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18. A method for manufacturing an XMR-sensor, the method comprising:
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providing a substrate having a first main surface area and a second, different main surface area; providing an XMR-structure comprising at least one section that extends along a first direction perpendicular to the first main surface area or the second main surface area such that an XMR-plane of the XMR-structure is arranged in the first direction; providing a first contact and a second contact arranged to contact the at least one section of the XMR-structure at different locations of the XMR-structure; providing a current conductor configured to conduct a current therethrough, and the current conductor being configured to generate a magnetic field parallel to the XMR-plane of the XMR-structure within the XMR-structure in response to the conducting current; wherein providing the substrate comprises providing a first substrate layer and providing a second substrate layer; wherein the first contact is arranged in the first substrate layer; wherein providing the XMR-structure comprises etching the substrate from the second main surface area against the first direction at least until reaching the first contact in order to obtain an etched structure in which the first contact is at least partly exposed; wherein the etched structure comprises side walls and a bottom wall; wherein the etched structure is arranged such that one of the sidewalls of the etched structure extends from the second main surface area to the first contact; wherein providing the XMR-structure comprises depositing an XMR-film on the second main surface area and on the etched structure such that the XMR-film rests on the etched structure covering the side walls and the bottom wall of the etched structure such that one part of the XMR-film, which rests on the one side wall of the etched structure that extends from the second main surface area to the first contact, extends from the second main surface area to the first contact; and wherein the XMR-film is thinner than the second substrate layer. - View Dependent Claims (19, 20, 21, 22, 23)
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Specification