Method of forming interconnects for three dimensional integrated circuit

• US 9,583,365 B2
• Filed: 05/25/2012
• Issued: 02/28/2017
• Est. Priority Date: 05/25/2012
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Yen, Liang-Ju, Sheu, Lawrence Chiang, Yu, Chun Hui, Yee, Kuo-Chung, Yu, Chen-Hua, Lin, Yeong-Jyh, Lin, Chia-Hsiang
• Primary Examiner(s): RUFO, LOUIS J
• Application Number:
  US13/481,517
• Publication Number:
  US 20130313121A1
• Time in Patent Office: 1,740 Days
• Field of Search: 205/123, 205/122, 205/131, 257/778, 257/775, 438/638, 481/23, 481/22, 481/31
• US Class Current: 1/1
• CPC Class Codes: H01L 21/2885 using an external electrical current, i.e. electro-deposition
• CPC Class Codes: H01L 21/486 Via connections through the substrate with or without pins
• CPC Class Codes: H01L 21/76898 formed through a semiconductor substrate
• CPC Class Codes: H01L 2224/13099 Material
• CPC Class Codes: H01L 2224/16238 the bump connector connecting to a bonding area protruding from the surface of the item
• CPC Class Codes: H01L 23/49816 Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
• CPC Class Codes: H01L 23/49827 Via connections through the substrates, e.g. pins going through the substrate, coaxial cables H01L23/49822, H01L23/49833, H01L23/4985, H01L23/49861 take precedence
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
• CPC Class Codes: H01L 2924/15311 being a ball array, e.g. BGA

Abstract

A method of forming interconnects for three dimensional integrated circuits comprises attaching a metal layer on a first carrier, attaching a first side of a packaging component on the metal layer, wherein the packaging component comprises a plurality of through vias. The method further comprises filling the plurality of through vias with a metal material using an electrochemical plating process, wherein the metal layer functions as an electrode for the electrochemical plating process, attaching a second carrier on a second side of the packaging component, detaching the first carrier from the packaging component, forming a photoresist layer on the metal layer, patterning the photoresist layer and detaching exposed portions of the metal layer.

Claims

1. A method comprising:

attaching a metal layer on a first carrier;

forming a dielectric layer on the metal layer;

attaching a first side of a packaging component on a first side of the dielectric layer, wherein the packaging component comprises a plurality of through holes before the packaging component is attached to the metal layer, and wherein the dielectric layer is between and in direct contact with the package component and the metal layer;

removing exposed portions of the dielectric layer to expose the metal layer;

filling the plurality of through holes with a metal material using an electrochemical plating process, wherein the exposed metal layer is employed as an electrode for the electrochemical plating process;

attaching a second carrier on a second side of the packaging component;

detaching the first carrier from the packaging component; and

patterning the metal layer to form a redistribution layer on the first side of the packaging component and expose a portion of a second side of the dielectric layer, wherein the plurality of through holes extend through the dielectric layer during the step of patterning the metal layer.

2. The method of claim 1, wherein:

the dielectric layer is a first adhesive layer.

3. The method of claim 1, wherein the packaging component is an interposer.

4. The method of claim 1, wherein the metal layer is a copper foil layer.

5. The method of claim 1, wherein the dielectric layer is a polymer adhesive layer.

6. A method comprising:

attaching a metal foil layer on a first carrier;

forming a dielectric layer on the metal foil layer;

attaching a first side of a packaging component on the metal foil layer, wherein, prior to the step of attaching the first side of the packaging component on the metal foil layer, the packaging component comprises a plurality of through holes, and wherein the dielectric layer is between and in direct contact with the package component and the metal foil layer;

removing exposed portions of the dielectric layer to expose the metal foil layer;

applying an electrochemical plating process to the packaging component such that a metal material fills the plurality of through holes to form a plurality of through vias, wherein the exposed metal foil layer is employed as an electrode for the electrochemical plating process; and

patterning the metal foil layer to expose the dielectric layer.

7. The method of claim 6, further comprising:

attaching a second carrier on a second side of the packaging component; and

detaching the first carrier from the packaging component.

8. The method of claim 6, further comprising:

forming a photoresist layer on the metal foil layer;

patterning the photoresist layer;

etching exposed portions of the metal foil layer to form a redistribution layer; and

removing remaining portions of the photoresist layer using a photoresist stripping process.

9. The method of claim 6, wherein:

the metal foil layer is formed of copper;

the packaging component is an interposer; and

the metal material is copper.

10. The method of claim 9, wherein the interposer is of a thickness in a range from about 50 um to about 800 um.

11. The method of claim 6, wherein the packaging component is a semiconductor die.

12. The method of claim 6, wherein the packaging component is a package substrate.

13. A method comprising:

forming a redistribution layer on a first side of a packaging component comprising;

attaching a metal layer on a first carrier;

attaching the first side of a packaging component on the metal layer, wherein the packaging component comprises a plurality of through holes;

filling the plurality of through holes with a metal material using an electrochemical plating process, wherein the metal layer is employed as an electrode for the electrochemical plating process;

attaching a second carrier on a second side of the packaging component;

detaching the first carrier from the packaging component;

forming a photoresist layer on the metal layer;

patterning the photoresist layer; and

etching exposed portions of the metal layer to form the redistribution layer on the first side of the packaging component, wherein, during the step of etching exposed portions of the metal layer, a dielectric layer is between and in direct contact with the redistribution layer and the packaging component, and wherein during the step of etching exposed portions of the metal layer, the plurality of through holes extend through the dielectric layer;

forming an under bump metallization structure on the redistribution layer; and

forming an interconnect bump on the under bump metallization structure.

14. The method of claim 13, further comprising:

forming a second redistribution layer on the second side of the packaging component;

attaching a semiconductor die on the second side of packaging component through a plurality of micro interconnect bumps; and

forming an encapsulation layer on the packaging component.

15. The method of claim 14, wherein the packaging component is an interposer.

16. The method of claim 15, wherein the interposer is of a thickness in a range from about 50 um to about 800 um.

17. The method of claim 16, wherein the semiconductor die is embedded in the encapsulation layer.

18. The method of claim 13, wherein the metal layer is a copper foil layer.