Conformal doping for punch through stopper in fin field effect transistor devices

• US 9,583,563 B1
• Filed: 10/26/2015
• Issued: 02/28/2017
• Est. Priority Date: 10/26/2015
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Bu, Huiming, Kanakasabapathy, Sivananda K., Lie, Fee Li, Yamashita, Tenko
• Primary Examiner(s): Vu, Hung
• Application Number:
  US14/922,939
• Time in Patent Office: 491 Days
• Field of Search: 438/298, 438/450
• US Class Current: 1/1
• CPC Class Codes: H01L 21/223 using diffusion into or out of a solid from or into a gaseous phase H01L21/221 - H01L21/222 take precedence; diffusion through an applied layer H01L21/225
• CPC Class Codes: H01L 21/324 Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering H01L21/20 - H01L21/288 and H01L21/302 - H01L21/322 take precedence
• CPC Class Codes: H01L 29/0638 for preventing surface leakage due to surface inversion layer, e.g. with channel stopper channel stoppers in combination with isolation region for integrated circuits H01L21/762
• CPC Class Codes: H01L 29/0649 Dielectric regions, e.g. SiO2 regions, air gaps
• CPC Class Codes: H01L 29/1083 with an inactive supplementary region, e.g. for preventing punch-through, improving capacity effect or leakage current
• CPC Class Codes: H01L 29/6653 using the removal of at least part of spacer, e.g. disposable spacer
• CPC Class Codes: H01L 29/6656 using multiple spacer layers, e.g. multiple sidewall spacers
• CPC Class Codes: H01L 29/66803 with a step of doping the vertical sidewall, e.g. using tilted or multi-angled implants

Abstract

A method of forming a punch through stop region that includes forming isolation regions of a first dielectric material between adjacent fin structures and forming a spacer of a second dielectric material on sidewalls of the fin structure. The first dielectric material of the isolation region may be recessed with an etch process that is selective to the second dielectric material to expose a base sidewall portion of the fin structures. Gas phase doping may introduce a first conductivity type dopant to the base sidewall portion of the fin structure forming a punch through stop region underlying a channel region of the fin structures.

Claims

1. A method of forming a semiconductor device comprising:

forming a spacer of a dielectric material on sidewalls of fin structures, wherein adjacent fin structures are separated by a dielectric isolation region;

recessing the dielectric isolation regions to expose a portion of the fin structures underlying the spacer of the dielectric material;

doping the exposed portion of the fin structures underlying the spacer with a dopant having a first conductivity type to form a punch through stop region;

removing the spacer; and

forming source and drain regions on the source and drain region portions of the fin structure, the source and drain regions doped with a second conductivity type dopant.

2. The method of claim 1, wherein the dielectric isolation regions are composed of an oxide, and the spacer of said dielectric material is composed of a nitride.

3. The method of claim 1 further comprising a hard mask present on an upper surface of the fin structures.

4. The method of claim 1, wherein said forming the spacer of the dielectric material comprises depositing a conformal dielectric layer on the fin structures, and anisotropically etching the conformal dielectric layer to remove horizontal portions that are overlying the dielectric isolation regions.

5. The method of claim 1, wherein said recessing the dielectric isolation regions to expose a portion of the fin structures underlying the spacer comprises an etch process that is selective to the spacer.

6. The method of claim 5, wherein the etch process that is selective to the spacer is isotropic.

7. The method of claim 1, wherein said doping the exposed portion of the fin structures underlying the spacer comprises gas phase doping.

8. The method of claim 1, wherein said doping the exposed portion of the fin structures underlying the spacer to form the punch stop through region further comprises an activation anneal.

9. The method of claim 1 further comprising forming a gate structure on a channel region of the fin structures.

10. A method of forming a punch through stop region comprising:

forming isolation regions of a first dielectric material between fin structures;

forming a spacer of a second dielectric material on sidewalls of the fin structures;

recessing the first dielectric material of the isolation region with an etch process that is selective to the second dielectric material to expose a base sidewall portion of the fin structures; and

gas phase doping to introduce a punch through stop dopant to the base sidewall portion of the fin structure forming a punch through stop region underlying a channel region of the fin structures.

11. The method of claim 10, wherein the isolation regions are composed of an oxide, and the spacer of said dielectric material is composed of a nitride.

12. The method of claim 10 further comprising a hard mask present on an upper surface of the fin structures.

13. The method of claim 10, wherein said forming the spacer of the second dielectric material comprises depositing a conformal dielectric layer on the fin structures;

and

anisotropically etching the conformal dielectric layer to removal horizontal portions that are overlying the isolation regions.

14. The method of claim 10, wherein said recessing the first dielectric material of the isolation region comprises an etch process that is selective to the spacer.

15. The method of claim 14, wherein the etch process that is selective to the spacer is isotropic.

16. The method of claim 10, wherein said forming the punch stop region further comprises an activation anneal.