Semi-auto scanning probe microscopy scanning

• US 9,586,817 B2
• Filed: 07/26/2012
• Issued: 03/07/2017
• Est. Priority Date: 07/28/2011
• Status: Active Grant

• Current Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Original Assignee: Seagate Technology LLC (Seagate Technology Holdings Plc)
• Inventors: Liu, Huiwen, Gunderson, Peter
• Primary Examiner(s): Smith, David E
• Application Number:
  US13/559,165
• Publication Number:
  US 20130031680A1
• Time in Patent Office: 1,685 Days
• Field of Search: 850 1- 6, 850 19- 20, 850/33, 731/05
• US Class Current: 1/1
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 30/04 Display or data processing devices

Abstract

A semi-automated method for atomic force microscopy (“AFM”) scanning of a sample is disclosed. The method can include manually teaching a sample and AFM tip relative location on an AFM tool; then scanning, via a predefined program, on the same sample or other sample with same pattern to produce more images automatically.

Claims

1. A method comprising:

manually loading a first sample;

manually locating the first sample within a certain proximity to an atomic force microscopy (“

AFM”

) tip on an AFM tool, including;

displaying a placement of the first sample to an operator on a display;

creating a sample location mark and a tip location mark on the display;

manually defining, via the operator, a unique feature of an image pattern of the first sample;

determining an automated program via designating a series of scan locations using the unique feature as a landmark, the automated program includes a series of scans to be performed at the scan locations using the unique feature as a landmark;

storing the automated program in the memory to be executed for scans on other samples wherein the AFM tool defines the sample location mark and the tip location mark to be used for at least one future sample; and

scanning, via the automated program, the first sample with the AFM tool to determine a measurement of the first sample.

2. The method of claim 1 further comprising repeating the automated program for a next sample.

3. The method of claim 1 wherein the manually loading comprises using a step motor.

4. The method of claim 1 further comprising calibrations, analysis, or other operations are performed based on the measurement.

5. A method comprising:

manually loading a first sample;

manually locating the first sample within a certain proximity to an atomic force microscopy (“

AFM”

) tip on an AFM tool, including;

displaying a placement of the first sample to an operator on a display;

creating a sample location mark and a tip location mark on the display;

manually defining, via the operator, a unique feature of an image pattern of the first sample;

determining an automated program via designating a series of scan locations using the unique feature as a landmark, the automated program includes a series of scans to be performed at the scan locations using the unique feature as a landmark;

storing the automated program in the memory to be executed for scans on other samples;

scanning, via the automated program, the first sample with the AFM tool to determine a measurement of the first sample;

when the series of scans are done on the first sample, moving a next sample into a location that approximately aligns with the sample location mark previously defined;

identifying the unique feature for the next sample; and

performing the series of scans via the automated program on the next sample.

6. The method of claim 5 further comprising repeating the automated program for a next sample.

7. The method of claim 5 wherein the manually loading comprises using a step motor.

8. The method of claim 5 further comprising calibrations, analysis or other operations being performed based on the measurement.

9. An apparatus comprising:

an atomic force microscopy (“

AFM”

) tool having an AFM tip, the device adapted to;

allow a user to manually position a first sample relative to the AFM tip, including;

display a placement of the first sample to an operator on a display;

create a sample location mark and a tip location mark on the display, where the sample location mark is stored in the memory for use with at least one future sample;

allow the operator to manually define a unique feature of an image pattern of the first sample;

determine an automated program via designating a series of scan locations using the unique feature as a landmark, the automated program includes a series of scans to be performed at the scan locations using the unique feature as a landmark;

store the automated program in memory to be executed for scans on other samples; and

scan, via the automated program, the first sample with the AFM tip to produce an image of the first sample.

10. The apparatus of claim 9 wherein the device is further adapted to position a next sample based on the sample location mark previously defined and repeat the scan via the automated program for the next sample.

11. The apparatus of claim 9 further comprising the display to provide a view of the first sample and a human interface device to allow a user to manually select one or more positioning marks for the first sample.

12. The apparatus of claim 9 further comprising a step motor to manually position the first sample.

13. The apparatus of claim 10 further comprising a loader to provide the next sample to the AFM tool.

14. The device of claim 11 further comprising:

a microprocessor to execute a program to perform the scan; and

the memory to store the image.

15. The apparatus of claim 14 wherein the microprocessor is adapted to determine a measurement of the first sample based on the image.

16. The apparatus of claim 15 further comprising:

a display to provide a visible placement of the first sample to an operator;

the display shows an image to the operator and the device allows the operator to manually select the starting location wherein the series of scans provide data to determine a measurement of a sample; and

calibrations, analysis, or other operations are performed based on the measurement.