Component part and method for testing such a component part
First Claim
1. A component, comprising:
- a housing in which are situated at least;
an MEMS element having a pressure-sensitive sensor diaphragm and a switching arrangement for detecting a diaphragm deflection as a measuring signal,an arrangement for analyzing the measuring signal,an arrangement for providing a defined excitation of the sensor diaphragm, andat least one pressure connection port, wherein the arrangement for exciting the sensor diaphragm includes at least one selectively actuable actuator component for generating defined pressure pulses that act on the sensor diaphragm, and wherein;
the at least one pressure connection port is a through hole in the housing,the actuator component is at least partially integrated into a component structure of the MEMS element;
the actuator component includes at least;
an actuator diaphragm formed on a side next to the sensor diaphragm, anda switching arrangement for deflecting the actuator diaphragm independently of the sensor diaphragm, wherein the actuator diaphragm is provided with at least one electrode of a selectively actuable actuator capacitor;
at least one stationary counter element is developed at least one of above and below the actuator diaphragm in the component structure of the MEMS element; and
the counter element is provided with at least one counter electrode of the actuator capacitor.
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Accused Products
Abstract
Measures are described which simplify the functional testing of a component having an MEMS element provided with a pressure-sensitive sensor diaphragm, and which allow a self-calibration of the component even after it is already in place, i.e., following the end of the production process. The component has a housing, in which are situated at least one MEMS element having a pressure-sensitive sensor diaphragm and a switching arrangement for detecting the diaphragm deflections as measuring signals; an arrangement for analyzing the measuring signals; and an arrangement for the defined excitation of the sensor diaphragm. The housing has at least one pressure connection port. The arrangement for exciting the sensor diaphragm includes at least one selectively actuable actuator component for generating defined pressure pulses that act on the sensor diaphragm.
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Citations
12 Claims
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1. A component, comprising:
a housing in which are situated at least; an MEMS element having a pressure-sensitive sensor diaphragm and a switching arrangement for detecting a diaphragm deflection as a measuring signal, an arrangement for analyzing the measuring signal, an arrangement for providing a defined excitation of the sensor diaphragm, and at least one pressure connection port, wherein the arrangement for exciting the sensor diaphragm includes at least one selectively actuable actuator component for generating defined pressure pulses that act on the sensor diaphragm, and wherein; the at least one pressure connection port is a through hole in the housing, the actuator component is at least partially integrated into a component structure of the MEMS element; the actuator component includes at least; an actuator diaphragm formed on a side next to the sensor diaphragm, and a switching arrangement for deflecting the actuator diaphragm independently of the sensor diaphragm, wherein the actuator diaphragm is provided with at least one electrode of a selectively actuable actuator capacitor; at least one stationary counter element is developed at least one of above and below the actuator diaphragm in the component structure of the MEMS element; and the counter element is provided with at least one counter electrode of the actuator capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for testing a component having a housing, in which are situated at least one pressure connection port, at least an MEMS element having a pressure-sensitive sensor diaphragm and a switching arrangement for detecting a diaphragm deflection, and an arrangement for analyzing the diaphragm deflection, the method comprising:
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generating at least one defined pressure pulse inside the housing with the aid of an actuator component; detecting and analyzing deflections of the sensor diaphragm induced by the defined pressure pulse inside the housing with the aid of the arrangement for analyzing the diaphragm deflection; and
wherein;the at least one pressure connection port is a through hole in the housing; the actuator component is at least partially integrated into a component structure of the MEMS element; the actuator component includes at least; an actuator diaphragm formed on a side next to the sensor diaphragm, and a switching arrangement for deflecting the actuator diaphragm independently of the sensor diaphragm, wherein the actuator diaphragm is provided with at least one electrode of a selectively actuable actuator capacitor; at least one stationary counter element is developed at least one of above and below the actuator diaphragm in the component structure of the MEMS element; and the counter element is provided with at least one counter electrode of the actuator capacitor. - View Dependent Claims (9, 10, 11, 12)
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Specification